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- W3040191432 endingPage "478" @default.
- W3040191432 startingPage "477" @default.
- W3040191432 abstract "A recent process technology to manufacture bipolar junction transistors utilizes polysilicon emitters. Polysilicon is deposited, appropriately doped to form both NPN and PNP transistors, and exposed to temperatures that result in grain growth. Since polysilicon is in contact with Si( 100) at the emitter, base, and collector (Fig. 1), solid phase epitaxial regrowth might also occur. Production runs with this structure occasionally produce transistors with low current gain. High and low gain NPN and PNP transistors were characterized by transmission electron microscopy. Vertical sections through NPN/PNP transistor arrays were made by the wedge technique, low-angle ion milled to electron-transparency, and viewed at 200 KV. The grain size of the polysilicon on oxide was recorded and estimated. The extent of epitaxial regrowth was quantified for each of the Si (100) contact areas. Convergent Beam Electron Diffraction (CBED) was used to confirm the orientation of the presumed regrown polysilicon." @default.
- W3040191432 created "2020-07-10" @default.
- W3040191432 creator A5037594780 @default.
- W3040191432 creator A5055631227 @default.
- W3040191432 creator A5062683067 @default.
- W3040191432 creator A5081804593 @default.
- W3040191432 date "1997-08-01" @default.
- W3040191432 modified "2023-09-25" @default.
- W3040191432 title "The Influence of Dopant Type on Polysilicon Grain Growth and Solid Phase Epitaxial Regrowth" @default.
- W3040191432 cites W1561371047 @default.
- W3040191432 cites W2002065694 @default.
- W3040191432 cites W2012995435 @default.
- W3040191432 cites W2109506834 @default.
- W3040191432 doi "https://doi.org/10.1017/s1431927600009272" @default.
- W3040191432 hasPublicationYear "1997" @default.
- W3040191432 type Work @default.
- W3040191432 sameAs 3040191432 @default.
- W3040191432 citedByCount "0" @default.
- W3040191432 crossrefType "journal-article" @default.
- W3040191432 hasAuthorship W3040191432A5037594780 @default.
- W3040191432 hasAuthorship W3040191432A5055631227 @default.
- W3040191432 hasAuthorship W3040191432A5062683067 @default.
- W3040191432 hasAuthorship W3040191432A5081804593 @default.
- W3040191432 hasConcept C110738630 @default.
- W3040191432 hasConcept C119599485 @default.
- W3040191432 hasConcept C120665830 @default.
- W3040191432 hasConcept C121332964 @default.
- W3040191432 hasConcept C127413603 @default.
- W3040191432 hasConcept C146088050 @default.
- W3040191432 hasConcept C165801399 @default.
- W3040191432 hasConcept C171250308 @default.
- W3040191432 hasConcept C172385210 @default.
- W3040191432 hasConcept C191952053 @default.
- W3040191432 hasConcept C192562407 @default.
- W3040191432 hasConcept C207114421 @default.
- W3040191432 hasConcept C23061349 @default.
- W3040191432 hasConcept C2361726 @default.
- W3040191432 hasConcept C25356406 @default.
- W3040191432 hasConcept C2779227376 @default.
- W3040191432 hasConcept C2780081452 @default.
- W3040191432 hasConcept C46918542 @default.
- W3040191432 hasConcept C49040817 @default.
- W3040191432 hasConcept C544956773 @default.
- W3040191432 hasConcept C57863236 @default.
- W3040191432 hasConcept C77557913 @default.
- W3040191432 hasConceptScore W3040191432C110738630 @default.
- W3040191432 hasConceptScore W3040191432C119599485 @default.
- W3040191432 hasConceptScore W3040191432C120665830 @default.
- W3040191432 hasConceptScore W3040191432C121332964 @default.
- W3040191432 hasConceptScore W3040191432C127413603 @default.
- W3040191432 hasConceptScore W3040191432C146088050 @default.
- W3040191432 hasConceptScore W3040191432C165801399 @default.
- W3040191432 hasConceptScore W3040191432C171250308 @default.
- W3040191432 hasConceptScore W3040191432C172385210 @default.
- W3040191432 hasConceptScore W3040191432C191952053 @default.
- W3040191432 hasConceptScore W3040191432C192562407 @default.
- W3040191432 hasConceptScore W3040191432C207114421 @default.
- W3040191432 hasConceptScore W3040191432C23061349 @default.
- W3040191432 hasConceptScore W3040191432C2361726 @default.
- W3040191432 hasConceptScore W3040191432C25356406 @default.
- W3040191432 hasConceptScore W3040191432C2779227376 @default.
- W3040191432 hasConceptScore W3040191432C2780081452 @default.
- W3040191432 hasConceptScore W3040191432C46918542 @default.
- W3040191432 hasConceptScore W3040191432C49040817 @default.
- W3040191432 hasConceptScore W3040191432C544956773 @default.
- W3040191432 hasConceptScore W3040191432C57863236 @default.
- W3040191432 hasConceptScore W3040191432C77557913 @default.
- W3040191432 hasIssue "S2" @default.
- W3040191432 hasLocation W30401914321 @default.
- W3040191432 hasOpenAccess W3040191432 @default.
- W3040191432 hasPrimaryLocation W30401914321 @default.
- W3040191432 hasRelatedWork W1543420704 @default.
- W3040191432 hasRelatedWork W1983500710 @default.
- W3040191432 hasRelatedWork W1985772127 @default.
- W3040191432 hasRelatedWork W2015003920 @default.
- W3040191432 hasRelatedWork W2040013779 @default.
- W3040191432 hasRelatedWork W2055517702 @default.
- W3040191432 hasRelatedWork W2111773097 @default.
- W3040191432 hasRelatedWork W2135393038 @default.
- W3040191432 hasRelatedWork W2370990351 @default.
- W3040191432 hasRelatedWork W3204143395 @default.
- W3040191432 hasVolume "3" @default.
- W3040191432 isParatext "false" @default.
- W3040191432 isRetracted "false" @default.
- W3040191432 magId "3040191432" @default.
- W3040191432 workType "article" @default.