Matches in SemOpenAlex for { <https://semopenalex.org/work/W3040251180> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W3040251180 endingPage "511" @default.
- W3040251180 startingPage "510" @default.
- W3040251180 abstract "TEM has been used for semiconductor device characterization since the 1980's, when Marcus and Cheng first demonstrated the feasibility and utility of applying TEM to semiconductors. The frequency of use of TEM has accelerated briskly due to the continual shrinkage of devices as predicted by Gordon Moore and now documented in the SIA roadmap ( http://public.itrs.net/Home.htm ). TEM use has also grown due to application of FIB techniques which make possible high precision cross-sections of specific structures. This relentless shrinking has resulted in difficulties in preparing suitable specimens. Many of the features and interfaces in a device may be curved rather than planar, and as the radius of curvature begins to approach the thickness of a TEM specimen, it can result in “geometrical blurring” of features, both for imaging and microanalysis. The origin of this blurring is illustrated in Figure 1, where it can be seen that a single electron may pass through two different features, and as a result, they are not resolved." @default.
- W3040251180 created "2020-07-10" @default.
- W3040251180 creator A5026399729 @default.
- W3040251180 date "2001-08-01" @default.
- W3040251180 modified "2023-09-25" @default.
- W3040251180 title "The Effect of Moore&s Law on the Growing Role of Transmission Electron Microscopy in the Semiconductor Industry" @default.
- W3040251180 cites W1972991047 @default.
- W3040251180 doi "https://doi.org/10.1017/s1431927600028622" @default.
- W3040251180 hasPublicationYear "2001" @default.
- W3040251180 type Work @default.
- W3040251180 sameAs 3040251180 @default.
- W3040251180 citedByCount "7" @default.
- W3040251180 crossrefType "journal-article" @default.
- W3040251180 hasAuthorship W3040251180A5026399729 @default.
- W3040251180 hasConcept C108225325 @default.
- W3040251180 hasConcept C11665553 @default.
- W3040251180 hasConcept C119599485 @default.
- W3040251180 hasConcept C121332964 @default.
- W3040251180 hasConcept C121684516 @default.
- W3040251180 hasConcept C127413603 @default.
- W3040251180 hasConcept C127813850 @default.
- W3040251180 hasConcept C134786449 @default.
- W3040251180 hasConcept C146088050 @default.
- W3040251180 hasConcept C159985019 @default.
- W3040251180 hasConcept C171250308 @default.
- W3040251180 hasConcept C175017881 @default.
- W3040251180 hasConcept C180145272 @default.
- W3040251180 hasConcept C192562407 @default.
- W3040251180 hasConcept C195065555 @default.
- W3040251180 hasConcept C206891323 @default.
- W3040251180 hasConcept C2524010 @default.
- W3040251180 hasConcept C2779227376 @default.
- W3040251180 hasConcept C2780841128 @default.
- W3040251180 hasConcept C33923547 @default.
- W3040251180 hasConcept C41008148 @default.
- W3040251180 hasConcept C49040817 @default.
- W3040251180 hasConcept C61696701 @default.
- W3040251180 hasConcept C79635011 @default.
- W3040251180 hasConceptScore W3040251180C108225325 @default.
- W3040251180 hasConceptScore W3040251180C11665553 @default.
- W3040251180 hasConceptScore W3040251180C119599485 @default.
- W3040251180 hasConceptScore W3040251180C121332964 @default.
- W3040251180 hasConceptScore W3040251180C121684516 @default.
- W3040251180 hasConceptScore W3040251180C127413603 @default.
- W3040251180 hasConceptScore W3040251180C127813850 @default.
- W3040251180 hasConceptScore W3040251180C134786449 @default.
- W3040251180 hasConceptScore W3040251180C146088050 @default.
- W3040251180 hasConceptScore W3040251180C159985019 @default.
- W3040251180 hasConceptScore W3040251180C171250308 @default.
- W3040251180 hasConceptScore W3040251180C175017881 @default.
- W3040251180 hasConceptScore W3040251180C180145272 @default.
- W3040251180 hasConceptScore W3040251180C192562407 @default.
- W3040251180 hasConceptScore W3040251180C195065555 @default.
- W3040251180 hasConceptScore W3040251180C206891323 @default.
- W3040251180 hasConceptScore W3040251180C2524010 @default.
- W3040251180 hasConceptScore W3040251180C2779227376 @default.
- W3040251180 hasConceptScore W3040251180C2780841128 @default.
- W3040251180 hasConceptScore W3040251180C33923547 @default.
- W3040251180 hasConceptScore W3040251180C41008148 @default.
- W3040251180 hasConceptScore W3040251180C49040817 @default.
- W3040251180 hasConceptScore W3040251180C61696701 @default.
- W3040251180 hasConceptScore W3040251180C79635011 @default.
- W3040251180 hasIssue "S2" @default.
- W3040251180 hasLocation W30402511801 @default.
- W3040251180 hasOpenAccess W3040251180 @default.
- W3040251180 hasPrimaryLocation W30402511801 @default.
- W3040251180 hasRelatedWork W154570863 @default.
- W3040251180 hasRelatedWork W1970759429 @default.
- W3040251180 hasRelatedWork W1976798960 @default.
- W3040251180 hasRelatedWork W1977939775 @default.
- W3040251180 hasRelatedWork W1986587358 @default.
- W3040251180 hasRelatedWork W2291772612 @default.
- W3040251180 hasRelatedWork W2353572513 @default.
- W3040251180 hasRelatedWork W2544070273 @default.
- W3040251180 hasRelatedWork W3040251180 @default.
- W3040251180 hasRelatedWork W4249287129 @default.
- W3040251180 hasVolume "7" @default.
- W3040251180 isParatext "false" @default.
- W3040251180 isRetracted "false" @default.
- W3040251180 magId "3040251180" @default.
- W3040251180 workType "article" @default.