Matches in SemOpenAlex for { <https://semopenalex.org/work/W3040471144> ?p ?o ?g. }
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- W3040471144 endingPage "1083" @default.
- W3040471144 startingPage "1082" @default.
- W3040471144 abstract "With the need to introduce new materials and processes to the semiconductor fabrication process, there is a great need to understand the diffusion of a large number of elements in silicon. To this end, a systematic SIMS study was done for implanted elements with subsequent annealing. There is a surprising lack of earlier work on many of the elements of the periodic table and the work that was done did not involve the additional effects of ion implantation. The recent SIMS results allow the diffusion of the many elements to be categorized into several groups. These effects range from elements that do not appear to move substantially upon annealing, rapid diffusion to the surface, and formation of various peaks in the concentration profile. Based on the SIMS results, we have used TEM to study the microstructure and composition of subset of the implants. The figure below shows the SIMS and TEM results for a Chromium implant." @default.
- W3040471144 created "2020-07-10" @default.
- W3040471144 creator A5011300729 @default.
- W3040471144 creator A5027947926 @default.
- W3040471144 creator A5030695391 @default.
- W3040471144 creator A5036540094 @default.
- W3040471144 creator A5049878089 @default.
- W3040471144 creator A5050644581 @default.
- W3040471144 creator A5060733821 @default.
- W3040471144 date "2000-08-01" @default.
- W3040471144 modified "2023-10-18" @default.
- W3040471144 title "Diffusion of Ion Implanted Elements in Silicon by TEM And SIMS" @default.
- W3040471144 doi "https://doi.org/10.1017/s1431927600037909" @default.
- W3040471144 hasPublicationYear "2000" @default.
- W3040471144 type Work @default.
- W3040471144 sameAs 3040471144 @default.
- W3040471144 citedByCount "0" @default.
- W3040471144 crossrefType "journal-article" @default.
- W3040471144 hasAuthorship W3040471144A5011300729 @default.
- W3040471144 hasAuthorship W3040471144A5027947926 @default.
- W3040471144 hasAuthorship W3040471144A5030695391 @default.
- W3040471144 hasAuthorship W3040471144A5036540094 @default.
- W3040471144 hasAuthorship W3040471144A5049878089 @default.
- W3040471144 hasAuthorship W3040471144A5050644581 @default.
- W3040471144 hasAuthorship W3040471144A5060733821 @default.
- W3040471144 hasConcept C113196181 @default.
- W3040471144 hasConcept C121332964 @default.
- W3040471144 hasConcept C136525101 @default.
- W3040471144 hasConcept C142724271 @default.
- W3040471144 hasConcept C145148216 @default.
- W3040471144 hasConcept C178790620 @default.
- W3040471144 hasConcept C185592680 @default.
- W3040471144 hasConcept C191897082 @default.
- W3040471144 hasConcept C192562407 @default.
- W3040471144 hasConcept C204787440 @default.
- W3040471144 hasConcept C2777855556 @default.
- W3040471144 hasConcept C2909539053 @default.
- W3040471144 hasConcept C41823505 @default.
- W3040471144 hasConcept C43617362 @default.
- W3040471144 hasConcept C544956773 @default.
- W3040471144 hasConcept C69357855 @default.
- W3040471144 hasConcept C71924100 @default.
- W3040471144 hasConcept C77671233 @default.
- W3040471144 hasConcept C97355855 @default.
- W3040471144 hasConceptScore W3040471144C113196181 @default.
- W3040471144 hasConceptScore W3040471144C121332964 @default.
- W3040471144 hasConceptScore W3040471144C136525101 @default.
- W3040471144 hasConceptScore W3040471144C142724271 @default.
- W3040471144 hasConceptScore W3040471144C145148216 @default.
- W3040471144 hasConceptScore W3040471144C178790620 @default.
- W3040471144 hasConceptScore W3040471144C185592680 @default.
- W3040471144 hasConceptScore W3040471144C191897082 @default.
- W3040471144 hasConceptScore W3040471144C192562407 @default.
- W3040471144 hasConceptScore W3040471144C204787440 @default.
- W3040471144 hasConceptScore W3040471144C2777855556 @default.
- W3040471144 hasConceptScore W3040471144C2909539053 @default.
- W3040471144 hasConceptScore W3040471144C41823505 @default.
- W3040471144 hasConceptScore W3040471144C43617362 @default.
- W3040471144 hasConceptScore W3040471144C544956773 @default.
- W3040471144 hasConceptScore W3040471144C69357855 @default.
- W3040471144 hasConceptScore W3040471144C71924100 @default.
- W3040471144 hasConceptScore W3040471144C77671233 @default.
- W3040471144 hasConceptScore W3040471144C97355855 @default.
- W3040471144 hasIssue "S2" @default.
- W3040471144 hasLocation W30404711441 @default.
- W3040471144 hasOpenAccess W3040471144 @default.
- W3040471144 hasPrimaryLocation W30404711441 @default.
- W3040471144 hasRelatedWork W1585227540 @default.
- W3040471144 hasRelatedWork W1982235876 @default.
- W3040471144 hasRelatedWork W1986285647 @default.
- W3040471144 hasRelatedWork W2006354268 @default.
- W3040471144 hasRelatedWork W2042925312 @default.
- W3040471144 hasRelatedWork W2045422872 @default.
- W3040471144 hasRelatedWork W2045981640 @default.
- W3040471144 hasRelatedWork W2063677047 @default.
- W3040471144 hasRelatedWork W2088081281 @default.
- W3040471144 hasRelatedWork W2090805197 @default.
- W3040471144 hasVolume "6" @default.
- W3040471144 isParatext "false" @default.
- W3040471144 isRetracted "false" @default.
- W3040471144 magId "3040471144" @default.
- W3040471144 workType "article" @default.