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- W3040966730 abstract "A low-temperature ( 200 μm) using one masking step only. The proposed post-processing module was successfully demonstrated on a 4 by 4 array of dummy silicon segments and a wafer thickness of 260 μm. Next to the stretchable mechanical interconnection, the proposed module allows also embedding of aluminum electrical interconnect lines within the parylene beams thus potentially realizing a fully functional stretchable system." @default.
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- W3040966730 date "2008-01-01" @default.
- W3040966730 modified "2023-09-27" @default.
- W3040966730 title "High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics" @default.
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