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- W3042333393 abstract "在高精度光学元件领域，特别是大口径的平面光学元件，随着对测试精度和口径要求的提高，重力变形成为其不可避免的问题。介绍了立式斐索型干涉仪的系统设计和多点可调支撑方法的变形理论，通过有限元分析（FEM），优化得到了合理的支撑结构。采用液面基准，在300 mm口径的立式斐索型干涉仪上进行了平面的重力变形校正。与三平面法检测结果比较，两者的残差峰谷（PV）值为10.20 nm，均方根（RMS）值为1.56 nm。" @default.
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- W3042333393 date "2020-01-01" @default.
- W3042333393 modified "2023-09-26" @default.
- W3042333393 title "Distortion correction research by gravity for 300-mm-aperture flat based on multi-point adjustable support" @default.
- W3042333393 doi "https://doi.org/10.5768/jao202041.0409801" @default.
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