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• W3042536558 abstract "We report a novel and simple fabrication process to realize vertically tapered spot size converters (SSC) on InP photonic integrated circuits. The vertical tapering was achieved via a linewidth controlled local optical dose variation, leading to a grey tone photoresist profile. The fabricated SSCs are compact, polarization insensitive and demonstrate a very high mode conversion efficiency of 95%. Integrated SSCs improved the overall loss by 5 dB giving a coupling loss as low as 1.3 dB/facet, for a lensed fibre with a mode field diameter of 3.0 µm. A good agreement was found between the fibre-to-fibre optical loss measurements and those predicted from simulations." @default.
• W3042536558 created "2020-07-23" @default.
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• W3042536558 date "2020-07-23" @default.
• W3042536558 modified "2023-09-27" @default.
• W3042536558 title "Vertically tapered waveguide spot size converters fabricated via a linewidth controlled grey tone lithography for InP-based photonic integrated circuits" @default.
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• W3042536558 doi "https://doi.org/10.1364/oe.397489" @default.
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