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- W3043128147 abstract "A modular spectroscopic ellipsometer, capable of both in-situ and ex-situ operation, has been used to measure important growth parameters of GaAs/AIGaAs structures. The ex-situ measurements provided layer thicknesses and compositions of the grown structures. In-situ ellipsometric measurements allowed the determination of growth rates, layer thicknesses, and high temperature optical constants. By performing a regression analysis of the in-situ data in real-time, the thickness and composition of an AIGaAs layer were extracted during the MBE growth of the structure." @default.
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- W3043128147 date "1993-01-01" @default.
- W3043128147 modified "2023-09-27" @default.
- W3043128147 title "Real-time analysis of in-situ spectroscopic ellipsometric data during MBE growth of III-V semiconductors" @default.
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