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• W3044269868 abstract "The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system which allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Connection to a vacuum suitcase is also demonstrated to enable receiving from and transfer to various ultra-high vacuum (UHV) equipment including molecular-beam epitaxy (MBE) and scanning tunneling microscopy (STM)." @default.
• W3044269868 created "2020-07-29" @default.
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• W3044269868 date "2020-07-01" @default.
• W3044269868 modified "2023-10-18" @default.
• W3044269868 title "A cleanroom in a glovebox" @default.
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• W3044269868 doi "https://doi.org/10.1063/5.0006462" @default.
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• W3044269868 hasPublicationYear "2020" @default.
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