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- W3044334471 abstract "Sensors to analyse layer structures already during epitaxial growth provide valuable information for developing device structures and for ensuring the reproducibility of run-to-run conditions. Most analytical online tools are applicable to all major growth techniques. Today a variety of probes is routinely integrated into growth systems for monitoring in situ sample temperature, growth rate, layer thickness, composition, strain, and other parameters of the growth process. Sensors measure either the ambient in the vicinity of the growing sample or the sample surface. Ambient analysis comprises mass spectrometry and optical probes; they provide information about the mass transport, the kind and density of species, their temperature, and potential mutual reactions. Surface probes include diffraction techniques and various optical tools. Surface sensitivity for diffraction is achieved by applying grazing-incidence angles, and the diffracted electron and X-ray beams disclose the surface morphology and reconstructions. Optical probes are widely applied in gaseous growth ambient. The selectivity for the surface may strongly be enhanced by taking advantages of symmetry-related surface properties, and several optical probes can resolve the growth of single monolayers. The chapter describes prominent techniques for in situ analysis of epitaxy. After discussing ambient analysis using mass spectrometry and optical spectroscopy, surface probes are considered. Structural analysis by reflection high-energy electron diffraction and by X-ray diffraction is outlined, and optical probes by pyrometry and deflectometry yielding data on temperature and strain are presented. The text then focuses on reflectometry, ellipsometry, and reflectance-difference spectroscopy (reflectance-anisotropy spectroscopy); these techniques provide both chemical and structural information." @default.
- W3044334471 created "2020-07-29" @default.
- W3044334471 creator A5058473399 @default.
- W3044334471 date "2020-01-01" @default.
- W3044334471 modified "2023-10-03" @default.
- W3044334471 title "In Situ Growth Analysis" @default.
- W3044334471 cites W1552754939 @default.
- W3044334471 cites W1600308401 @default.
- W3044334471 cites W1965949156 @default.
- W3044334471 cites W1968706406 @default.
- W3044334471 cites W1971553357 @default.
- W3044334471 cites W1973006625 @default.
- W3044334471 cites W1973060664 @default.
- W3044334471 cites W1980712652 @default.
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- W3044334471 cites W1986587371 @default.
- W3044334471 cites W1987126079 @default.
- W3044334471 cites W1991223053 @default.
- W3044334471 cites W1996192129 @default.
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- W3044334471 cites W2006644469 @default.
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- W3044334471 cites W2018465768 @default.
- W3044334471 cites W2018609669 @default.
- W3044334471 cites W2018721776 @default.
- W3044334471 cites W2019817762 @default.
- W3044334471 cites W2022242148 @default.
- W3044334471 cites W2022957019 @default.
- W3044334471 cites W2027398067 @default.
- W3044334471 cites W2030816898 @default.
- W3044334471 cites W2034910071 @default.
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- W3044334471 cites W2037795806 @default.
- W3044334471 cites W2038030728 @default.
- W3044334471 cites W2044497134 @default.
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- W3044334471 cites W2049520739 @default.
- W3044334471 cites W2050347003 @default.
- W3044334471 cites W2060455113 @default.
- W3044334471 cites W2062892721 @default.
- W3044334471 cites W2063638697 @default.
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- W3044334471 cites W2065776135 @default.
- W3044334471 cites W2066874036 @default.
- W3044334471 cites W2069020768 @default.
- W3044334471 cites W2074796258 @default.
- W3044334471 cites W2074817624 @default.
- W3044334471 cites W2075141274 @default.
- W3044334471 cites W2079247164 @default.
- W3044334471 cites W2089404383 @default.
- W3044334471 cites W2090085321 @default.
- W3044334471 cites W2093563087 @default.
- W3044334471 cites W2106603672 @default.
- W3044334471 cites W2121440434 @default.
- W3044334471 cites W2124606043 @default.
- W3044334471 cites W2125474540 @default.
- W3044334471 cites W2142704993 @default.
- W3044334471 cites W2147737622 @default.
- W3044334471 cites W2152406463 @default.
- W3044334471 cites W2161834981 @default.
- W3044334471 cites W2161963512 @default.
- W3044334471 cites W2187818007 @default.
- W3044334471 cites W2216356668 @default.
- W3044334471 cites W2491301398 @default.
- W3044334471 cites W2497076390 @default.
- W3044334471 cites W2512077076 @default.
- W3044334471 cites W2526222971 @default.
- W3044334471 cites W2728073912 @default.
- W3044334471 cites W2781927843 @default.
- W3044334471 cites W2782218010 @default.
- W3044334471 cites W3105043858 @default.
- W3044334471 cites W407262643 @default.
- W3044334471 cites W9921031 @default.
- W3044334471 cites W2001947852 @default.
- W3044334471 doi "https://doi.org/10.1007/978-3-030-43869-2_8" @default.
- W3044334471 hasPublicationYear "2020" @default.
- W3044334471 type Work @default.
- W3044334471 sameAs 3044334471 @default.
- W3044334471 citedByCount "0" @default.
- W3044334471 crossrefType "book-chapter" @default.
- W3044334471 hasAuthorship W3044334471A5058473399 @default.
- W3044334471 hasConcept C103824480 @default.
- W3044334471 hasConcept C113196181 @default.
- W3044334471 hasConcept C120665830 @default.
- W3044334471 hasConcept C121332964 @default.
- W3044334471 hasConcept C185592680 @default.
- W3044334471 hasConcept C192562407 @default.
- W3044334471 hasConcept C207114421 @default.
- W3044334471 hasConcept C2778925768 @default.
- W3044334471 hasConcept C31972630 @default.
- W3044334471 hasConcept C32891209 @default.
- W3044334471 hasConcept C41008148 @default.