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• W3045535078 endingPage "741" @default.
• W3045535078 startingPage "741" @default.
• W3045535078 abstract "We introduce a single-grain gate-all-around (GAA) Si nanowire (NW) FET using the location-controlled-grain technique and several innovative low-thermal budget processes, including green nanosecond laser crystallization, far-infrared laser annealing, and hybrid laser-assisted salicidation, that keep the substrate temperature (Tsub) lower than 400 °C for monolithic three-dimensional integrated circuits (3D-ICs). The detailed process verification of a low-defect GAA nanowire and electrical characteristics were investigated in this article. The GAA Si NW FETs, which were intentionally fabricated within the controlled Si grain, exhibit a steeper subthreshold swing (S.S.) of about 65 mV/dec., higher driving currents of 327 µA/µm (n-type) and 297 µA/µm (p-type) @ Vth ± 0.8 V, and higher Ion/Ioff (>105 @|Vd| = 1 V) and have a narrower electrical property distribution. In addition, the proposed Si NW FETs with a GAA structure were found to be less sensitive to Vth roll-off and S.S. degradation compared to the omega(Ω)-gate Si FETs. It enables ultrahigh-density sequentially stackable integrated circuits with superior performance and low power consumption for future mobile and neuromorphic applications." @default.
• W3045535078 created "2020-08-03" @default.
• W3045535078 creator A5009745732 @default.
• W3045535078 creator A5021989314 @default.
• W3045535078 creator A5038488892 @default.
• W3045535078 creator A5058046305 @default.
• W3045535078 creator A5061141099 @default.
• W3045535078 creator A5077021794 @default.
• W3045535078 creator A5087126884 @default.
• W3045535078 date "2020-07-30" @default.
• W3045535078 modified "2023-10-02" @default.
• W3045535078 title "Single-Grain Gate-All-Around Si Nanowire FET Using Low-Thermal-Budget Processes for Monolithic Three-Dimensional Integrated Circuits" @default.
• W3045535078 cites W1931699552 @default.
• W3045535078 cites W1974359539 @default.
• W3045535078 cites W1974851488 @default.
• W3045535078 cites W1978672336 @default.
• W3045535078 cites W1997388970 @default.
• W3045535078 cites W1999199054 @default.
• W3045535078 cites W2010053543 @default.
• W3045535078 cites W2036406970 @default.
• W3045535078 cites W2047575359 @default.
• W3045535078 cites W2057210222 @default.
• W3045535078 cites W2064323891 @default.
• W3045535078 cites W2094221410 @default.
• W3045535078 cites W2114853176 @default.
• W3045535078 cites W2124680121 @default.
• W3045535078 cites W2128058741 @default.
• W3045535078 cites W2131527550 @default.
• W3045535078 cites W2135674775 @default.
• W3045535078 cites W2143475156 @default.
• W3045535078 cites W2147731882 @default.
• W3045535078 cites W2149277680 @default.
• W3045535078 cites W2155707315 @default.
• W3045535078 cites W2157679477 @default.
• W3045535078 cites W2167393833 @default.
• W3045535078 cites W2334061346 @default.
• W3045535078 cites W2346205343 @default.
• W3045535078 cites W2585315539 @default.
• W3045535078 cites W2608956429 @default.
• W3045535078 cites W2621979731 @default.
• W3045535078 cites W2731422849 @default.
• W3045535078 cites W2748661253 @default.
• W3045535078 cites W2790991759 @default.
• W3045535078 cites W2896419591 @default.
• W3045535078 cites W2944964251 @default.
• W3045535078 cites W3036800039 @default.
• W3045535078 cites W938849189 @default.
• W3045535078 doi "https://doi.org/10.3390/mi11080741" @default.
• W3045535078 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7464086" @default.
• W3045535078 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32751538" @default.
• W3045535078 hasPublicationYear "2020" @default.
• W3045535078 type Work @default.
• W3045535078 sameAs 3045535078 @default.
• W3045535078 citedByCount "2" @default.
• W3045535078 countsByYear W30455350782022 @default.
• W3045535078 crossrefType "journal-article" @default.
• W3045535078 hasAuthorship W3045535078A5009745732 @default.
• W3045535078 hasAuthorship W3045535078A5021989314 @default.
• W3045535078 hasAuthorship W3045535078A5038488892 @default.
• W3045535078 hasAuthorship W3045535078A5058046305 @default.
• W3045535078 hasAuthorship W3045535078A5061141099 @default.
• W3045535078 hasAuthorship W3045535078A5077021794 @default.
• W3045535078 hasAuthorship W3045535078A5087126884 @default.
• W3045535078 hasBestOaLocation W30455350781 @default.
• W3045535078 hasConcept C111368507 @default.
• W3045535078 hasConcept C119599485 @default.
• W3045535078 hasConcept C120665830 @default.
• W3045535078 hasConcept C121332964 @default.
• W3045535078 hasConcept C127313418 @default.
• W3045535078 hasConcept C127413603 @default.
• W3045535078 hasConcept C134146338 @default.
• W3045535078 hasConcept C156465305 @default.
• W3045535078 hasConcept C159985019 @default.
• W3045535078 hasConcept C165801399 @default.
• W3045535078 hasConcept C171250308 @default.
• W3045535078 hasConcept C172385210 @default.
• W3045535078 hasConcept C192562407 @default.
• W3045535078 hasConcept C2777289219 @default.
• W3045535078 hasConcept C2777855556 @default.
• W3045535078 hasConcept C49040817 @default.
• W3045535078 hasConcept C520434653 @default.
• W3045535078 hasConcept C530198007 @default.
• W3045535078 hasConcept C74214498 @default.
• W3045535078 hasConceptScore W3045535078C111368507 @default.
• W3045535078 hasConceptScore W3045535078C119599485 @default.
• W3045535078 hasConceptScore W3045535078C120665830 @default.
• W3045535078 hasConceptScore W3045535078C121332964 @default.
• W3045535078 hasConceptScore W3045535078C127313418 @default.
• W3045535078 hasConceptScore W3045535078C127413603 @default.
• W3045535078 hasConceptScore W3045535078C134146338 @default.
• W3045535078 hasConceptScore W3045535078C156465305 @default.
• W3045535078 hasConceptScore W3045535078C159985019 @default.
• W3045535078 hasConceptScore W3045535078C165801399 @default.
• W3045535078 hasConceptScore W3045535078C171250308 @default.
• W3045535078 hasConceptScore W3045535078C172385210 @default.
• W3045535078 hasConceptScore W3045535078C192562407 @default.
• W3045535078 hasConceptScore W3045535078C2777289219 @default.
• W3045535078 hasConceptScore W3045535078C2777855556 @default.

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