Matches in SemOpenAlex for { <https://semopenalex.org/work/W3048059365> ?p ?o ?g. }
- W3048059365 endingPage "053004" @default.
- W3048059365 startingPage "053004" @default.
- W3048059365 abstract "This paper deals with different mechanisms of the interaction of light and heavy low-energy ions with nanoporous structures and main structural changes that occur in these structures under irradiation. The study was carried out using the molecular dynamics method for silicon models with pores of radius of 8 and 28 Å, which are structural analogs of porous films with low dielectric constant (low-k materials). Based on the results obtained, the mechanisms of interaction of light and heavy noble gas ions (He, Ne, Ar, and Xe) with these structures were compared, and the effects of ion mass and energy on processes of pore sealing were studied." @default.
- W3048059365 created "2020-08-13" @default.
- W3048059365 creator A5016876955 @default.
- W3048059365 creator A5036276058 @default.
- W3048059365 creator A5049491376 @default.
- W3048059365 creator A5065890890 @default.
- W3048059365 creator A5080719764 @default.
- W3048059365 date "2020-09-01" @default.
- W3048059365 modified "2023-09-25" @default.
- W3048059365 title "Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing" @default.
- W3048059365 cites W1510635921 @default.
- W3048059365 cites W1966184457 @default.
- W3048059365 cites W1968600571 @default.
- W3048059365 cites W1969903651 @default.
- W3048059365 cites W1970648723 @default.
- W3048059365 cites W1972068858 @default.
- W3048059365 cites W1978725501 @default.
- W3048059365 cites W1980085585 @default.
- W3048059365 cites W1982381330 @default.
- W3048059365 cites W1985692567 @default.
- W3048059365 cites W1992566599 @default.
- W3048059365 cites W1993662404 @default.
- W3048059365 cites W1994010627 @default.
- W3048059365 cites W1995959481 @default.
- W3048059365 cites W1998153935 @default.
- W3048059365 cites W2003979947 @default.
- W3048059365 cites W2004234572 @default.
- W3048059365 cites W2006483093 @default.
- W3048059365 cites W2009983100 @default.
- W3048059365 cites W2014733848 @default.
- W3048059365 cites W2019465613 @default.
- W3048059365 cites W2020441562 @default.
- W3048059365 cites W2021477634 @default.
- W3048059365 cites W2029790604 @default.
- W3048059365 cites W2029944231 @default.
- W3048059365 cites W2035503582 @default.
- W3048059365 cites W2036940588 @default.
- W3048059365 cites W2037782625 @default.
- W3048059365 cites W2041631899 @default.
- W3048059365 cites W2043454726 @default.
- W3048059365 cites W2047968138 @default.
- W3048059365 cites W2048732167 @default.
- W3048059365 cites W2051943365 @default.
- W3048059365 cites W2053949441 @default.
- W3048059365 cites W2056000081 @default.
- W3048059365 cites W2059306972 @default.
- W3048059365 cites W2061329175 @default.
- W3048059365 cites W2069658117 @default.
- W3048059365 cites W2071897680 @default.
- W3048059365 cites W2077638523 @default.
- W3048059365 cites W2078290150 @default.
- W3048059365 cites W2090451199 @default.
- W3048059365 cites W2116712680 @default.
- W3048059365 cites W2129081786 @default.
- W3048059365 cites W2151358996 @default.
- W3048059365 cites W2170012063 @default.
- W3048059365 cites W2197924674 @default.
- W3048059365 cites W2318167016 @default.
- W3048059365 cites W2321446078 @default.
- W3048059365 cites W2336302696 @default.
- W3048059365 cites W2469956215 @default.
- W3048059365 cites W2473654724 @default.
- W3048059365 cites W2518743677 @default.
- W3048059365 cites W2561070525 @default.
- W3048059365 cites W2615519848 @default.
- W3048059365 cites W2618623670 @default.
- W3048059365 cites W2767325666 @default.
- W3048059365 cites W2770374011 @default.
- W3048059365 cites W2806954344 @default.
- W3048059365 cites W2809649586 @default.
- W3048059365 cites W2898820156 @default.
- W3048059365 cites W2909605560 @default.
- W3048059365 cites W2912895072 @default.
- W3048059365 cites W2919462078 @default.
- W3048059365 cites W2986830973 @default.
- W3048059365 cites W2993951990 @default.
- W3048059365 cites W3001234499 @default.
- W3048059365 cites W3121555355 @default.
- W3048059365 cites W4230053467 @default.
- W3048059365 doi "https://doi.org/10.1116/6.0000389" @default.
- W3048059365 hasPublicationYear "2020" @default.
- W3048059365 type Work @default.
- W3048059365 sameAs 3048059365 @default.
- W3048059365 citedByCount "3" @default.
- W3048059365 countsByYear W30480593652023 @default.
- W3048059365 crossrefType "journal-article" @default.
- W3048059365 hasAuthorship W3048059365A5016876955 @default.
- W3048059365 hasAuthorship W3048059365A5036276058 @default.
- W3048059365 hasAuthorship W3048059365A5049491376 @default.
- W3048059365 hasAuthorship W3048059365A5065890890 @default.
- W3048059365 hasAuthorship W3048059365A5080719764 @default.
- W3048059365 hasConcept C111337013 @default.
- W3048059365 hasConcept C121332964 @default.
- W3048059365 hasConcept C127413603 @default.
- W3048059365 hasConcept C133386390 @default.
- W3048059365 hasConcept C145148216 @default.
- W3048059365 hasConcept C147597530 @default.
- W3048059365 hasConcept C159467904 @default.