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• W3048082550 abstract "We present a Lamé mode resonator whose limiting damping mechanism depends on its anchor geometry. The device is anchor-limited when the anchors are stiffer and is Akhiezer-limited with more compliant anchors. This result is determined by observing the temperature dependence of the quality factor (Q) for devices with different lateral dimensions and different anchor designs. The total measured Q increases by an order of magnitude with the more compliant anchors and reaches a room temperature fxQ product of 2.2 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>13</sup> . We studied the relationship between the device design and the anchor design and the measured Q(T) results to identify the contributions from different dissipation mechanisms. This investigation provides insight into how anchor design affects anchor damping." @default.
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• W3048082550 date "2020-10-01" @default.
• W3048082550 modified "2023-10-01" @default.
• W3048082550 title "Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator" @default.
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• W3048082550 doi "https://doi.org/10.1109/jmems.2020.3012925" @default.
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