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- W3048222534 endingPage "063006" @default.
- W3048222534 startingPage "063006" @default.
- W3048222534 abstract "Accelerating interest in silicon nitride thin film material system continues in both academic and industrial communities due to its highly desirable physical, chemical, and electrical properties and the potential to enable new device technologies. As considered here, the silicon nitride material system encompasses both non-hydrogenated (SiN x ) and hydrogenated (SiN x :H) silicon nitride, as well as silicon nitride-rich films, defined as SiN x with C inclusion, in both non-hydrogenated (SiN x (C)) and hydrogenated (SiN x :H(C)) forms. Due to the extremely high level of interest in these materials, this article is intended as a follow-up to the authors’ earlier publication [A. E. Kaloyeros, F. A. Jové, J. Goff, B. Arkles, Silicon nitride and silicon nitride-rich thin film technologies: trends in deposition techniques and related applications, ECS J. Solid State Sci. Technol. , 6 , 691 (2017)] that summarized silicon nitride research and development (R&D) trends through the end of 2016. In this survey, emphasis is placed on cutting-edge achievements and innovations from 2017 through 2019 in Si and N source chemistries, vapor phase growth processes, film properties, and emerging applications, particularly in heterodevice areas including sensors, biointerfaces and photonics." @default.
- W3048222534 created "2020-08-13" @default.
- W3048222534 creator A5023624056 @default.
- W3048222534 creator A5045742946 @default.
- W3048222534 creator A5050498301 @default.
- W3048222534 creator A5071131499 @default.
- W3048222534 date "2020-01-08" @default.
- W3048222534 modified "2023-10-16" @default.
- W3048222534 title "Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications" @default.
- W3048222534 cites W1978539061 @default.
- W3048222534 cites W1983259829 @default.
- W3048222534 cites W1991524796 @default.
- W3048222534 cites W1996419870 @default.
- W3048222534 cites W2049912370 @default.
- W3048222534 cites W2053367843 @default.
- W3048222534 cites W2074815846 @default.
- W3048222534 cites W2120213152 @default.
- W3048222534 cites W2209327572 @default.
- W3048222534 cites W2409564094 @default.
- W3048222534 cites W2483752930 @default.
- W3048222534 cites W2533951656 @default.
- W3048222534 cites W2540196821 @default.
- W3048222534 cites W2548301516 @default.
- W3048222534 cites W2553632289 @default.
- W3048222534 cites W2563810937 @default.
- W3048222534 cites W2569901511 @default.
- W3048222534 cites W2571148582 @default.
- W3048222534 cites W2574993199 @default.
- W3048222534 cites W2583422472 @default.
- W3048222534 cites W2585097840 @default.
- W3048222534 cites W2587688094 @default.
- W3048222534 cites W2587864452 @default.
- W3048222534 cites W2588720706 @default.
- W3048222534 cites W2590029087 @default.
- W3048222534 cites W2590134473 @default.
- W3048222534 cites W2603789271 @default.
- W3048222534 cites W2618808852 @default.
- W3048222534 cites W2619605557 @default.
- W3048222534 cites W2727096153 @default.
- W3048222534 cites W2729356526 @default.
- W3048222534 cites W2730460017 @default.
- W3048222534 cites W2735748309 @default.
- W3048222534 cites W2741998022 @default.
- W3048222534 cites W2745199203 @default.
- W3048222534 cites W2748442374 @default.
- W3048222534 cites W2755654747 @default.
- W3048222534 cites W2757296099 @default.
- W3048222534 cites W2766144925 @default.
- W3048222534 cites W2766656494 @default.
- W3048222534 cites W2770886687 @default.
- W3048222534 cites W2786312499 @default.
- W3048222534 cites W2789675512 @default.
- W3048222534 cites W2790894488 @default.
- W3048222534 cites W2793598030 @default.
- W3048222534 cites W2796529746 @default.
- W3048222534 cites W2797945640 @default.
- W3048222534 cites W2800559686 @default.
- W3048222534 cites W2806750411 @default.
- W3048222534 cites W2807235457 @default.
- W3048222534 cites W2808731558 @default.
- W3048222534 cites W2810369601 @default.
- W3048222534 cites W2884735747 @default.
- W3048222534 cites W2886309250 @default.
- W3048222534 cites W2887103175 @default.
- W3048222534 cites W2888866904 @default.
- W3048222534 cites W2889118670 @default.
- W3048222534 cites W2890362207 @default.
- W3048222534 cites W2894308888 @default.
- W3048222534 cites W2898156085 @default.
- W3048222534 cites W2898961751 @default.
- W3048222534 cites W2900645910 @default.
- W3048222534 cites W2901428048 @default.
- W3048222534 cites W2902170331 @default.
- W3048222534 cites W2903309525 @default.
- W3048222534 cites W2903453818 @default.
- W3048222534 cites W2909671704 @default.
- W3048222534 cites W2911033206 @default.
- W3048222534 cites W2911254050 @default.
- W3048222534 cites W2914992723 @default.
- W3048222534 cites W2917652461 @default.
- W3048222534 cites W2922239415 @default.
- W3048222534 cites W2939035891 @default.
- W3048222534 cites W2940053926 @default.
- W3048222534 cites W2942485789 @default.
- W3048222534 cites W2951307079 @default.
- W3048222534 cites W2955201738 @default.
- W3048222534 cites W2955437437 @default.
- W3048222534 cites W2961280050 @default.
- W3048222534 cites W2963026362 @default.
- W3048222534 cites W2965182070 @default.
- W3048222534 cites W2965907500 @default.
- W3048222534 cites W2969052202 @default.
- W3048222534 cites W2969749606 @default.
- W3048222534 cites W2970012311 @default.
- W3048222534 cites W2971025728 @default.
- W3048222534 cites W2976672754 @default.
- W3048222534 cites W2978857651 @default.
- W3048222534 cites W2980007136 @default.