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• W3048579858 abstract "Elastic properties of TaN films on (001)Si are investigated by surface Brillouin scattering (SBS). The velocity dispersion is obtained from Brillouin frequency shifts and surface acoustic wave phase velocities derived from measured SBS spectra. The observed Rayleigh surface acoustic and Sezawa waves indicate a soft on hard configuration. The elastic stiffnesses from the best fit of the calculated and measured spectra were <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mi>C</mml:mi> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>11</mml:mn> </mml:mrow> </mml:msub> </mml:mrow> <mml:mo>=</mml:mo> <mml:mn>288</mml:mn> </mml:math> and <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mi>C</mml:mi> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>44</mml:mn> </mml:mrow> </mml:msub> </mml:mrow> <mml:mo>=</mml:mo> <mml:mn>80</mml:mn> <mml:mspace width=thickmathspace /> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>G</mml:mi> <mml:mi mathvariant=normal>P</mml:mi> <mml:mi mathvariant=normal>a</mml:mi> </mml:mrow> </mml:mrow> </mml:math> . Using these elastic constants in the surface elastodynamic Green’s function yielded theoretical Brillouin spectra in agreement with measured spectra. Employing a least squares fitting procedure to the elastic constants gives uncertainties in <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mi>C</mml:mi> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>11</mml:mn> </mml:mrow> </mml:msub> </mml:mrow> </mml:math> and <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mi>C</mml:mi> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>44</mml:mn> </mml:mrow> </mml:msub> </mml:mrow> </mml:math> as <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mo>±<!-- ± --></mml:mo> </mml:mrow> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>3.7</mml:mn> </mml:mrow> </mml:math> and <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mo>±<!-- ± --></mml:mo> </mml:mrow> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>2.5</mml:mn> </mml:mrow> <mml:mspace width=thickmathspace /> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>G</mml:mi> <mml:mi mathvariant=normal>P</mml:mi> <mml:mi mathvariant=normal>a</mml:mi> </mml:mrow> </mml:mrow> </mml:math> , respectively." @default.
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• W3048579858 date "2020-08-31" @default.
• W3048579858 modified "2023-09-23" @default.
• W3048579858 title "Surface Brillouin scattering study of tantalum nitride (TaN) thin films" @default.
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