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- W3048653472 abstract "This chapter focuses on the inspection and analysis of particulate contamination on silicon surfaces and discusses the present status and future prospects of the technology with emphasis on applications of this technology in very large-scale integrated (VLSI) wafer processing for yield enhancement. The particulate detection program comprises surface inspection of unpatterned test wafers to check process equipment cleanliness and surface inspection of patterned product wafers to monitor total process cleanliness. To rapidly locate and analyze both organic and inorganic particles on a large silicon wafer, an automated wafer-surface particle detection and identification system has been developed. Examples of successful applications of the particle inspection and analysis program using this new system in the advanced VLSI wafer processing lines are presented. Because process-induced particulate contamination is prone to clustering, full-wafer inspection is preferred for particle detection. For particle detection, automated laser-scanning wafer inspection systems are indispensable tools in meeting the goals." @default.
- W3048653472 created "2020-08-18" @default.
- W3048653472 creator A5091856831 @default.
- W3048653472 date "2020-08-21" @default.
- W3048653472 modified "2023-10-17" @default.
- W3048653472 title "Detection and Identification of Particles on Silicon Surfaces" @default.
- W3048653472 doi "https://doi.org/10.1201/9781003067429-11" @default.
- W3048653472 hasPublicationYear "2020" @default.
- W3048653472 type Work @default.
- W3048653472 sameAs 3048653472 @default.
- W3048653472 citedByCount "0" @default.
- W3048653472 crossrefType "book-chapter" @default.
- W3048653472 hasAuthorship W3048653472A5091856831 @default.
- W3048653472 hasConcept C111368507 @default.
- W3048653472 hasConcept C116834253 @default.
- W3048653472 hasConcept C127313418 @default.
- W3048653472 hasConcept C127413603 @default.
- W3048653472 hasConcept C14580979 @default.
- W3048653472 hasConcept C160671074 @default.
- W3048653472 hasConcept C171250308 @default.
- W3048653472 hasConcept C192562407 @default.
- W3048653472 hasConcept C21880701 @default.
- W3048653472 hasConcept C24326235 @default.
- W3048653472 hasConcept C2778517922 @default.
- W3048653472 hasConcept C35750839 @default.
- W3048653472 hasConcept C41008148 @default.
- W3048653472 hasConcept C59822182 @default.
- W3048653472 hasConcept C86803240 @default.
- W3048653472 hasConceptScore W3048653472C111368507 @default.
- W3048653472 hasConceptScore W3048653472C116834253 @default.
- W3048653472 hasConceptScore W3048653472C127313418 @default.
- W3048653472 hasConceptScore W3048653472C127413603 @default.
- W3048653472 hasConceptScore W3048653472C14580979 @default.
- W3048653472 hasConceptScore W3048653472C160671074 @default.
- W3048653472 hasConceptScore W3048653472C171250308 @default.
- W3048653472 hasConceptScore W3048653472C192562407 @default.
- W3048653472 hasConceptScore W3048653472C21880701 @default.
- W3048653472 hasConceptScore W3048653472C24326235 @default.
- W3048653472 hasConceptScore W3048653472C2778517922 @default.
- W3048653472 hasConceptScore W3048653472C35750839 @default.
- W3048653472 hasConceptScore W3048653472C41008148 @default.
- W3048653472 hasConceptScore W3048653472C59822182 @default.
- W3048653472 hasConceptScore W3048653472C86803240 @default.
- W3048653472 hasLocation W30486534721 @default.
- W3048653472 hasOpenAccess W3048653472 @default.
- W3048653472 hasPrimaryLocation W30486534721 @default.
- W3048653472 hasRelatedWork W10994290 @default.
- W3048653472 hasRelatedWork W2623737 @default.
- W3048653472 hasRelatedWork W383522 @default.
- W3048653472 hasRelatedWork W4564352 @default.
- W3048653472 hasRelatedWork W5230069 @default.
- W3048653472 hasRelatedWork W63360 @default.
- W3048653472 hasRelatedWork W7963752 @default.
- W3048653472 hasRelatedWork W8024076 @default.
- W3048653472 hasRelatedWork W8270539 @default.
- W3048653472 hasRelatedWork W9254944 @default.
- W3048653472 isParatext "false" @default.
- W3048653472 isRetracted "false" @default.
- W3048653472 magId "3048653472" @default.
- W3048653472 workType "book-chapter" @default.