Matches in SemOpenAlex for { <https://semopenalex.org/work/W304867992> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W304867992 endingPage "160" @default.
- W304867992 startingPage "151" @default.
- W304867992 abstract "Defect size distribution is a probability density function for the defects that occur on wafers or glasses during semiconductor/LCD fabrication. It is one of the most important information to estimate manufacturing yield using well-known statistical estimation methods. The defects are detected by automatic optical inspection (AOI) facilities. However, the data that is provided from AOI is not accurate due to resolution of AOI and its defect detection mechanism. It causes distortion of defect size distribution and results in wrong estimation of the manufacturing yield. In this paper, I suggest a size conversion method and a maximum likelihood estimator to overcome the vague defect size information of AOI. The methods are verified by the Monte Carlo simulation that is constructed as similar as real situation." @default.
- W304867992 created "2016-06-24" @default.
- W304867992 creator A5085116388 @default.
- W304867992 date "2008-01-01" @default.
- W304867992 modified "2023-09-24" @default.
- W304867992 title "Effective Construction Method of Defect Size Distribution Using AOI Data: Application for Semiconductor and LCD Manufacturing" @default.
- W304867992 hasPublicationYear "2008" @default.
- W304867992 type Work @default.
- W304867992 sameAs 304867992 @default.
- W304867992 citedByCount "0" @default.
- W304867992 crossrefType "journal-article" @default.
- W304867992 hasAuthorship W304867992A5085116388 @default.
- W304867992 hasConcept C105795698 @default.
- W304867992 hasConcept C11413529 @default.
- W304867992 hasConcept C126780896 @default.
- W304867992 hasConcept C134121241 @default.
- W304867992 hasConcept C160671074 @default.
- W304867992 hasConcept C185429906 @default.
- W304867992 hasConcept C191897082 @default.
- W304867992 hasConcept C192562407 @default.
- W304867992 hasConcept C194257627 @default.
- W304867992 hasConcept C19499675 @default.
- W304867992 hasConcept C197055811 @default.
- W304867992 hasConcept C33923547 @default.
- W304867992 hasConcept C41008148 @default.
- W304867992 hasConcept C46362747 @default.
- W304867992 hasConcept C49040817 @default.
- W304867992 hasConcept C66018809 @default.
- W304867992 hasConceptScore W304867992C105795698 @default.
- W304867992 hasConceptScore W304867992C11413529 @default.
- W304867992 hasConceptScore W304867992C126780896 @default.
- W304867992 hasConceptScore W304867992C134121241 @default.
- W304867992 hasConceptScore W304867992C160671074 @default.
- W304867992 hasConceptScore W304867992C185429906 @default.
- W304867992 hasConceptScore W304867992C191897082 @default.
- W304867992 hasConceptScore W304867992C192562407 @default.
- W304867992 hasConceptScore W304867992C194257627 @default.
- W304867992 hasConceptScore W304867992C19499675 @default.
- W304867992 hasConceptScore W304867992C197055811 @default.
- W304867992 hasConceptScore W304867992C33923547 @default.
- W304867992 hasConceptScore W304867992C41008148 @default.
- W304867992 hasConceptScore W304867992C46362747 @default.
- W304867992 hasConceptScore W304867992C49040817 @default.
- W304867992 hasConceptScore W304867992C66018809 @default.
- W304867992 hasIssue "2" @default.
- W304867992 hasLocation W3048679921 @default.
- W304867992 hasOpenAccess W304867992 @default.
- W304867992 hasPrimaryLocation W3048679921 @default.
- W304867992 hasRelatedWork W1539662488 @default.
- W304867992 hasRelatedWork W1622337394 @default.
- W304867992 hasRelatedWork W1873030251 @default.
- W304867992 hasRelatedWork W1895031786 @default.
- W304867992 hasRelatedWork W2030894915 @default.
- W304867992 hasRelatedWork W2069911028 @default.
- W304867992 hasRelatedWork W2083988308 @default.
- W304867992 hasRelatedWork W2088152862 @default.
- W304867992 hasRelatedWork W2098993426 @default.
- W304867992 hasRelatedWork W2103806811 @default.
- W304867992 hasRelatedWork W2142551277 @default.
- W304867992 hasRelatedWork W2152813777 @default.
- W304867992 hasRelatedWork W2161524539 @default.
- W304867992 hasRelatedWork W2163664127 @default.
- W304867992 hasRelatedWork W2170193684 @default.
- W304867992 hasRelatedWork W2330168730 @default.
- W304867992 hasRelatedWork W2536522640 @default.
- W304867992 hasRelatedWork W2789074063 @default.
- W304867992 hasRelatedWork W2892194316 @default.
- W304867992 hasRelatedWork W2875543764 @default.
- W304867992 hasVolume "21" @default.
- W304867992 isParatext "false" @default.
- W304867992 isRetracted "false" @default.
- W304867992 magId "304867992" @default.
- W304867992 workType "article" @default.