FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3048685493> ?p ?o ?g. }

• W3048685493 abstract "Abstract The dependences of silicon etching rate on the concentration of F atoms are investigated theoretically. The nonlinear regression analysis of the experimental data indicates that the reaction of F atoms with silicon is 2nd overall order reaction. The relationship between overall reaction order and kinetic reaction order is established using the etching rate equation. It is found that kinetic reaction order monotonically decreases with the increase in concentration of F atoms due to the increased surface coverage. Surface passivation by the reaction products is not observed under the investigated experimental conditions." @default.
• W3048685493 created "2020-08-18" @default.
• W3048685493 creator A5067861169 @default.
• W3048685493 date "2020-08-12" @default.
• W3048685493 modified "2023-09-26" @default.
• W3048685493 title "Statistical insights into the reaction of fluorine atoms with silicon" @default.
• W3048685493 cites W1968127071 @default.
• W3048685493 cites W1969621395 @default.
• W3048685493 cites W1972135184 @default.
• W3048685493 cites W1972868442 @default.
• W3048685493 cites W1973685322 @default.
• W3048685493 cites W1975482305 @default.
• W3048685493 cites W1977163085 @default.
• W3048685493 cites W1984004960 @default.
• W3048685493 cites W1984671227 @default.
• W3048685493 cites W1986160614 @default.
• W3048685493 cites W1996055888 @default.
• W3048685493 cites W2005556303 @default.
• W3048685493 cites W2014140468 @default.
• W3048685493 cites W2028103479 @default.
• W3048685493 cites W2030394866 @default.
• W3048685493 cites W2037292825 @default.
• W3048685493 cites W2037296150 @default.
• W3048685493 cites W2041399685 @default.
• W3048685493 cites W2048483194 @default.
• W3048685493 cites W2050053321 @default.
• W3048685493 cites W2053459321 @default.
• W3048685493 cites W2054379677 @default.
• W3048685493 cites W2058608224 @default.
• W3048685493 cites W2082403656 @default.
• W3048685493 cites W2082778446 @default.
• W3048685493 cites W2090566586 @default.
• W3048685493 cites W2092201281 @default.
• W3048685493 cites W2093388038 @default.
• W3048685493 cites W2097292231 @default.
• W3048685493 cites W2133269728 @default.
• W3048685493 cites W2267616190 @default.
• W3048685493 cites W2329006240 @default.
• W3048685493 cites W2330333580 @default.
• W3048685493 cites W2618706414 @default.
• W3048685493 cites W2889201520 @default.
• W3048685493 cites W2950740811 @default.
• W3048685493 cites W898248678 @default.
• W3048685493 doi "https://doi.org/10.1038/s41598-020-70432-0" @default.
• W3048685493 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7423933" @default.
• W3048685493 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32788642" @default.
• W3048685493 hasPublicationYear "2020" @default.
• W3048685493 type Work @default.
• W3048685493 sameAs 3048685493 @default.
• W3048685493 citedByCount "8" @default.
• W3048685493 countsByYear W30486854932021 @default.
• W3048685493 countsByYear W30486854932022 @default.
• W3048685493 countsByYear W30486854932023 @default.
• W3048685493 crossrefType "journal-article" @default.
• W3048685493 hasAuthorship W3048685493A5067861169 @default.
• W3048685493 hasBestOaLocation W30486854931 @default.
• W3048685493 hasConcept C100460472 @default.
• W3048685493 hasConcept C111163200 @default.
• W3048685493 hasConcept C121332964 @default.
• W3048685493 hasConcept C135502975 @default.
• W3048685493 hasConcept C135889238 @default.
• W3048685493 hasConcept C147789679 @default.
• W3048685493 hasConcept C148898269 @default.
• W3048685493 hasConcept C161790260 @default.
• W3048685493 hasConcept C171250308 @default.
• W3048685493 hasConcept C175113610 @default.
• W3048685493 hasConcept C178790620 @default.
• W3048685493 hasConcept C185592680 @default.
• W3048685493 hasConcept C191897082 @default.
• W3048685493 hasConcept C192562407 @default.
• W3048685493 hasConcept C2779227376 @default.
• W3048685493 hasConcept C33574316 @default.
• W3048685493 hasConcept C506198293 @default.
• W3048685493 hasConcept C544956773 @default.
• W3048685493 hasConcept C62520636 @default.
• W3048685493 hasConcept C93391505 @default.
• W3048685493 hasConceptScore W3048685493C100460472 @default.
• W3048685493 hasConceptScore W3048685493C111163200 @default.
• W3048685493 hasConceptScore W3048685493C121332964 @default.
• W3048685493 hasConceptScore W3048685493C135502975 @default.
• W3048685493 hasConceptScore W3048685493C135889238 @default.
• W3048685493 hasConceptScore W3048685493C147789679 @default.
• W3048685493 hasConceptScore W3048685493C148898269 @default.
• W3048685493 hasConceptScore W3048685493C161790260 @default.
• W3048685493 hasConceptScore W3048685493C171250308 @default.
• W3048685493 hasConceptScore W3048685493C175113610 @default.
• W3048685493 hasConceptScore W3048685493C178790620 @default.
• W3048685493 hasConceptScore W3048685493C185592680 @default.
• W3048685493 hasConceptScore W3048685493C191897082 @default.
• W3048685493 hasConceptScore W3048685493C192562407 @default.
• W3048685493 hasConceptScore W3048685493C2779227376 @default.
• W3048685493 hasConceptScore W3048685493C33574316 @default.
• W3048685493 hasConceptScore W3048685493C506198293 @default.
• W3048685493 hasConceptScore W3048685493C544956773 @default.
• W3048685493 hasConceptScore W3048685493C62520636 @default.
• W3048685493 hasConceptScore W3048685493C93391505 @default.
• W3048685493 hasIssue "1" @default.
• W3048685493 hasLocation W30486854931 @default.
• W3048685493 hasLocation W30486854932 @default.
• W3048685493 hasOpenAccess W3048685493 @default.

• next