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• W3048892729 endingPage "113906" @default.
• W3048892729 startingPage "113906" @default.
• W3048892729 abstract "Large target is essential for the fabrication of semiconductor devices, and the reliability of sputtering target backplate assembly plays a key role on the quality of sputtered films in the devices. In this work, the interface of an 8-inch Co target soldered on Cu backplate by In alloy is studied and characterized systematically. At the Cu backplate side, there are many void defects, and only one kind of intermetallic compound (IMC), namely Cu11In9, was observed after soldering. This Cu11In9 layer consists of two sublayers, which were formed at different reaction stage during soldering. At the Co target side, the voids are small, and the formed IMC is Ni28In72 phase. There is a thin Ni(V) layer at the Co side, and the V element is concentrated and stable at the interface, while Co will diffuse into Ni(V) layer to form a solid solution. The interfacial reaction and IMC formation related mechanisms are discussed, which can provide guidance for the design and fabrication of large-scale sputtering target assembly in microelectronic industry." @default.
• W3048892729 created "2020-08-18" @default.
• W3048892729 creator A5004449255 @default.
• W3048892729 creator A5030702320 @default.
• W3048892729 creator A5052467164 @default.
• W3048892729 creator A5061218618 @default.
• W3048892729 creator A5067829822 @default.
• W3048892729 creator A5074602868 @default.
• W3048892729 date "2020-10-01" @default.
• W3048892729 modified "2023-09-27" @default.
• W3048892729 title "The interfacial reaction and microstructure of Co/In/Cu sputtering target assembly after soldering" @default.
• W3048892729 cites W1982471501 @default.
• W3048892729 cites W1984545357 @default.
• W3048892729 cites W1988880647 @default.
• W3048892729 cites W2008956728 @default.
• W3048892729 cites W2019616476 @default.
• W3048892729 cites W2037938846 @default.
• W3048892729 cites W2048528074 @default.
• W3048892729 cites W2077116923 @default.
• W3048892729 cites W2082661289 @default.
• W3048892729 cites W2101145206 @default.
• W3048892729 cites W2110165447 @default.
• W3048892729 cites W2123048614 @default.
• W3048892729 cites W2172103101 @default.
• W3048892729 cites W2220103078 @default.
• W3048892729 cites W2755541949 @default.
• W3048892729 cites W2768044736 @default.
• W3048892729 cites W2776105502 @default.
• W3048892729 cites W2781940811 @default.
• W3048892729 cites W2801905283 @default.
• W3048892729 cites W2892129264 @default.
• W3048892729 cites W2903901817 @default.
• W3048892729 cites W2905292621 @default.
• W3048892729 cites W2917425486 @default.
• W3048892729 cites W2941978413 @default.
• W3048892729 cites W2945152500 @default.
• W3048892729 cites W2946549282 @default.
• W3048892729 cites W2997710498 @default.
• W3048892729 cites W4252052526 @default.
• W3048892729 doi "https://doi.org/10.1016/j.microrel.2020.113906" @default.
• W3048892729 hasPublicationYear "2020" @default.
• W3048892729 type Work @default.
• W3048892729 sameAs 3048892729 @default.
• W3048892729 citedByCount "1" @default.
• W3048892729 countsByYear W30488927292022 @default.
• W3048892729 crossrefType "journal-article" @default.
• W3048892729 hasAuthorship W3048892729A5004449255 @default.
• W3048892729 hasAuthorship W3048892729A5030702320 @default.
• W3048892729 hasAuthorship W3048892729A5052467164 @default.
• W3048892729 hasAuthorship W3048892729A5061218618 @default.
• W3048892729 hasAuthorship W3048892729A5067829822 @default.
• W3048892729 hasAuthorship W3048892729A5074602868 @default.
• W3048892729 hasConcept C136525101 @default.
• W3048892729 hasConcept C142724271 @default.
• W3048892729 hasConcept C159985019 @default.
• W3048892729 hasConcept C171250308 @default.
• W3048892729 hasConcept C187937830 @default.
• W3048892729 hasConcept C19067145 @default.
• W3048892729 hasConcept C191897082 @default.
• W3048892729 hasConcept C192562407 @default.
• W3048892729 hasConcept C204787440 @default.
• W3048892729 hasConcept C22423302 @default.
• W3048892729 hasConcept C27501479 @default.
• W3048892729 hasConcept C2779227376 @default.
• W3048892729 hasConcept C2779772531 @default.
• W3048892729 hasConcept C2780026712 @default.
• W3048892729 hasConcept C50296614 @default.
• W3048892729 hasConcept C71924100 @default.
• W3048892729 hasConcept C87976508 @default.
• W3048892729 hasConceptScore W3048892729C136525101 @default.
• W3048892729 hasConceptScore W3048892729C142724271 @default.
• W3048892729 hasConceptScore W3048892729C159985019 @default.
• W3048892729 hasConceptScore W3048892729C171250308 @default.
• W3048892729 hasConceptScore W3048892729C187937830 @default.
• W3048892729 hasConceptScore W3048892729C19067145 @default.
• W3048892729 hasConceptScore W3048892729C191897082 @default.
• W3048892729 hasConceptScore W3048892729C192562407 @default.
• W3048892729 hasConceptScore W3048892729C204787440 @default.
• W3048892729 hasConceptScore W3048892729C22423302 @default.
• W3048892729 hasConceptScore W3048892729C27501479 @default.
• W3048892729 hasConceptScore W3048892729C2779227376 @default.
• W3048892729 hasConceptScore W3048892729C2779772531 @default.
• W3048892729 hasConceptScore W3048892729C2780026712 @default.
• W3048892729 hasConceptScore W3048892729C50296614 @default.
• W3048892729 hasConceptScore W3048892729C71924100 @default.
• W3048892729 hasConceptScore W3048892729C87976508 @default.
• W3048892729 hasFunder F4320335777 @default.
• W3048892729 hasLocation W30488927291 @default.
• W3048892729 hasOpenAccess W3048892729 @default.
• W3048892729 hasPrimaryLocation W30488927291 @default.
• W3048892729 hasRelatedWork W1534893029 @default.
• W3048892729 hasRelatedWork W2068239450 @default.
• W3048892729 hasRelatedWork W2089251307 @default.
• W3048892729 hasRelatedWork W2267870793 @default.
• W3048892729 hasRelatedWork W2350388810 @default.
• W3048892729 hasRelatedWork W2528998499 @default.
• W3048892729 hasRelatedWork W2529340958 @default.
• W3048892729 hasRelatedWork W2771611885 @default.

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