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- W3049436599 abstract "In this paper, we demonstrate a dual frequency oven-controlled MEMS resonator that can be designed to have an output frequency of 1.27 Mhz or 13 Mhz depending on the crystal orientation of the device. Both modes operate based on closed-loop thermal compensation that can offer PPB (parts-per-billion) level temperature stability over a wide temperature range using low power and exhibit strong shock robustness. As the device is rotated 45- degrees with respect to the $ $ plane of the wafer, the two modes used in oven control exhibit a unique temperature coefficient of frequency (tcF) reversal that allows selection of the output frequency for timing reference applications. The stiffer inplane mode has better temperature stability and shock resistance whereas the plate-bending mode offers ease of drive. Both devices retain stability performance after multiple 12,000g level shocks. [2020-0143]" @default.
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- W3049436599 date "2020-10-01" @default.
- W3049436599 modified "2023-10-01" @default.
- W3049436599 title "Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness" @default.
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- W3049436599 doi "https://doi.org/10.1109/jmems.2020.3012109" @default.
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