FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3056490355> ?p ?o ?g. }

• W3056490355 endingPage "538" @default.
• W3056490355 startingPage "534" @default.
• W3056490355 abstract "GaN power ICs on engineered substrates of Qromis substrate technology (QST) are promising for future power applications, thanks to the reduced parasitics, thermally matched substrate of poly-AlN, high thermal conductivity, and high mechanical yield in combination with thick GaN buffer layers. In this article, we will elaborate in detail on epitaxy, integration, and trench isolation. Electrical characterizations show that the GaN buffer bears a breakdown voltage of > 650 V under the leakage criterion of 10 μA/mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> at 150°C. The fabricated 36 mm power HEMTs with L <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>GD</sub> of 16 μm show a high threshold voltage of 3.1 V and a low OFF-state drain leakage of c1 μA/mm until 650 V. The horizontal trench isolation breakdown voltage exceeds 850 V. The device dispersion is well controlled within 20% over full temperature and bias range. Finally, GaN power ICs on this platform are demonstrated." @default.
• W3056490355 created "2020-08-24" @default.
• W3056490355 creator A5008126297 @default.
• W3056490355 creator A5010711349 @default.
• W3056490355 creator A5016429233 @default.
• W3056490355 creator A5016911852 @default.
• W3056490355 creator A5018684508 @default.
• W3056490355 creator A5019671684 @default.
• W3056490355 creator A5020367935 @default.
• W3056490355 creator A5022414227 @default.
• W3056490355 creator A5034440999 @default.
• W3056490355 creator A5039021722 @default.
• W3056490355 creator A5049639179 @default.
• W3056490355 creator A5050656366 @default.
• W3056490355 creator A5051320701 @default.
• W3056490355 creator A5056071536 @default.
• W3056490355 creator A5056409480 @default.
• W3056490355 creator A5077631766 @default.
• W3056490355 creator A5091454714 @default.
• W3056490355 date "2020-11-01" @default.
• W3056490355 modified "2023-09-30" @default.
• W3056490355 title "Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates" @default.
• W3056490355 cites W1975719088 @default.
• W3056490355 cites W2168620418 @default.
• W3056490355 cites W2344720892 @default.
• W3056490355 cites W2615972614 @default.
• W3056490355 cites W2738121890 @default.
• W3056490355 cites W2769798541 @default.
• W3056490355 cites W2775276566 @default.
• W3056490355 cites W2800339899 @default.
• W3056490355 cites W2809745529 @default.
• W3056490355 cites W2810825921 @default.
• W3056490355 cites W2901511775 @default.
• W3056490355 cites W2904371401 @default.
• W3056490355 cites W2905336478 @default.
• W3056490355 cites W2945368664 @default.
• W3056490355 cites W2963689371 @default.
• W3056490355 cites W2973395542 @default.
• W3056490355 cites W3005923405 @default.
• W3056490355 cites W3006491566 @default.
• W3056490355 doi "https://doi.org/10.1109/tsm.2020.3017703" @default.
• W3056490355 hasPublicationYear "2020" @default.
• W3056490355 type Work @default.
• W3056490355 sameAs 3056490355 @default.
• W3056490355 citedByCount "13" @default.
• W3056490355 countsByYear W30564903552021 @default.
• W3056490355 countsByYear W30564903552022 @default.
• W3056490355 countsByYear W30564903552023 @default.
• W3056490355 crossrefType "journal-article" @default.
• W3056490355 hasAuthorship W3056490355A5008126297 @default.
• W3056490355 hasAuthorship W3056490355A5010711349 @default.
• W3056490355 hasAuthorship W3056490355A5016429233 @default.
• W3056490355 hasAuthorship W3056490355A5016911852 @default.
• W3056490355 hasAuthorship W3056490355A5018684508 @default.
• W3056490355 hasAuthorship W3056490355A5019671684 @default.
• W3056490355 hasAuthorship W3056490355A5020367935 @default.
• W3056490355 hasAuthorship W3056490355A5022414227 @default.
• W3056490355 hasAuthorship W3056490355A5034440999 @default.
• W3056490355 hasAuthorship W3056490355A5039021722 @default.
• W3056490355 hasAuthorship W3056490355A5049639179 @default.
• W3056490355 hasAuthorship W3056490355A5050656366 @default.
• W3056490355 hasAuthorship W3056490355A5051320701 @default.
• W3056490355 hasAuthorship W3056490355A5056071536 @default.
• W3056490355 hasAuthorship W3056490355A5056409480 @default.
• W3056490355 hasAuthorship W3056490355A5077631766 @default.
• W3056490355 hasAuthorship W3056490355A5091454714 @default.
• W3056490355 hasBestOaLocation W30564903552 @default.
• W3056490355 hasConcept C105066941 @default.
• W3056490355 hasConcept C110738630 @default.
• W3056490355 hasConcept C111368507 @default.
• W3056490355 hasConcept C119321828 @default.
• W3056490355 hasConcept C119599485 @default.
• W3056490355 hasConcept C127313418 @default.
• W3056490355 hasConcept C127413603 @default.
• W3056490355 hasConcept C139719470 @default.
• W3056490355 hasConcept C155310634 @default.
• W3056490355 hasConcept C159818811 @default.
• W3056490355 hasConcept C159985019 @default.
• W3056490355 hasConcept C162324750 @default.
• W3056490355 hasConcept C165801399 @default.
• W3056490355 hasConcept C171250308 @default.
• W3056490355 hasConcept C192562407 @default.
• W3056490355 hasConcept C2777042071 @default.
• W3056490355 hasConcept C2777289219 @default.
• W3056490355 hasConcept C2778871202 @default.
• W3056490355 hasConcept C2779227376 @default.
• W3056490355 hasConcept C49040817 @default.
• W3056490355 hasConcept C530198007 @default.
• W3056490355 hasConcept C97346530 @default.
• W3056490355 hasConceptScore W3056490355C105066941 @default.
• W3056490355 hasConceptScore W3056490355C110738630 @default.
• W3056490355 hasConceptScore W3056490355C111368507 @default.
• W3056490355 hasConceptScore W3056490355C119321828 @default.
• W3056490355 hasConceptScore W3056490355C119599485 @default.
• W3056490355 hasConceptScore W3056490355C127313418 @default.
• W3056490355 hasConceptScore W3056490355C127413603 @default.
• W3056490355 hasConceptScore W3056490355C139719470 @default.
• W3056490355 hasConceptScore W3056490355C155310634 @default.

• next