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• W3058230660 endingPage "1667" @default.
• W3058230660 startingPage "1653" @default.
• W3058230660 abstract "Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling robot. When the tool is operating, generally each PM is processing a wafer, and the robot is responsible for delivering the wafers from one PM to another. Thus, when a wafer is completed in a PM, the robot may be busy for performing other tasks such that it cannot immediately unload the completed wafer in the PM, resulting in that the wafer has to stay there for some extra time. The processing time of a wafer together with its delay time for waiting for the robot’s arrival for unloading is defined as wafer residency time in a PM. However, a long wafer delay time may deteriorate its quality. Therefore, it is highly desired and important to reduce the wafer delay time at each step as much as possible. This work aims to tackle this important issue for single-arm cluster tools (SACTs). Specifically, by using a Petri net model, this work analyzes the steady-state operational behavior of an SACT under the backward and earliest starting strategies. It is found that there must exist wafer delay time at the steps in the upstream of the bottleneck step, and such wafer delay time can be reduced by properly adjusting the robot waiting time. Thus, three algorithms are developed to reduce the wafer delay time at each step as much as possible by properly assigning the robot idle time. Finally, the application of the proposed method is illustrated by using examples. <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Note to Practitioners</i> —In a modern semiconductor fab, there are hundreds of cluster tools for wafer fabrication. To ensure wafer quality, it is important to reduce the wafer delay time in PMs of cluster tools after a wafer is processed since the high temperature, chemical gas, and particles in the PMs may damage the wafer. To do so, this work proposes three algorithms with polynomial complexity to assign the robot idle time as robot waiting time such that the wafer delay time in PMs can be reduced as much as possible. Furthermore, the obtained schedule by these algorithms is optimal in terms of the cycle time. Besides, the developed algorithms can be easily embedded into the controller of cluster tools by facility engineers. Therefore, this work has a practical value." @default.
• W3058230660 created "2020-08-24" @default.
• W3058230660 creator A5009709906 @default.
• W3058230660 creator A5037881127 @default.
• W3058230660 creator A5044196048 @default.
• W3058230660 creator A5047765441 @default.
• W3058230660 creator A5074774843 @default.
• W3058230660 creator A5090664309 @default.
• W3058230660 date "2021-10-01" @default.
• W3058230660 modified "2023-10-15" @default.
• W3058230660 title "Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools" @default.
• W3058230660 cites W1925800244 @default.
• W3058230660 cites W1965215820 @default.
• W3058230660 cites W1971369168 @default.
• W3058230660 cites W1981704280 @default.
• W3058230660 cites W1988796610 @default.
• W3058230660 cites W2002235729 @default.
• W3058230660 cites W2007491945 @default.
• W3058230660 cites W2012448698 @default.
• W3058230660 cites W2012508441 @default.
• W3058230660 cites W2014660552 @default.
• W3058230660 cites W2019766155 @default.
• W3058230660 cites W2025592351 @default.
• W3058230660 cites W2026048895 @default.
• W3058230660 cites W2033764666 @default.
• W3058230660 cites W2041266349 @default.
• W3058230660 cites W2041853864 @default.
• W3058230660 cites W2063846645 @default.
• W3058230660 cites W2076749410 @default.
• W3058230660 cites W2082437273 @default.
• W3058230660 cites W2086414784 @default.
• W3058230660 cites W2095610108 @default.
• W3058230660 cites W2096110679 @default.
• W3058230660 cites W2103693167 @default.
• W3058230660 cites W2106659191 @default.
• W3058230660 cites W2109845613 @default.
• W3058230660 cites W2110050374 @default.
• W3058230660 cites W2115448177 @default.
• W3058230660 cites W2117906302 @default.
• W3058230660 cites W2119364285 @default.
• W3058230660 cites W2127104083 @default.
• W3058230660 cites W2132355828 @default.
• W3058230660 cites W2137987710 @default.
• W3058230660 cites W2143862160 @default.
• W3058230660 cites W2144283213 @default.
• W3058230660 cites W2157572995 @default.
• W3058230660 cites W2310250136 @default.
• W3058230660 cites W2316865521 @default.
• W3058230660 cites W2326589682 @default.
• W3058230660 cites W2331742122 @default.
• W3058230660 cites W2344101367 @default.
• W3058230660 cites W2344326925 @default.
• W3058230660 cites W2511769035 @default.
• W3058230660 cites W2514647592 @default.
• W3058230660 cites W2523482717 @default.
• W3058230660 cites W2529540870 @default.
• W3058230660 cites W2562649913 @default.
• W3058230660 cites W2597321818 @default.
• W3058230660 cites W2606497581 @default.
• W3058230660 cites W2610006370 @default.
• W3058230660 cites W2735669400 @default.
• W3058230660 cites W2739664263 @default.
• W3058230660 cites W2795857438 @default.
• W3058230660 cites W2799338570 @default.
• W3058230660 cites W2898488651 @default.
• W3058230660 cites W2915806045 @default.
• W3058230660 cites W3022502563 @default.
• W3058230660 doi "https://doi.org/10.1109/tase.2020.3014078" @default.
• W3058230660 hasPublicationYear "2021" @default.
• W3058230660 type Work @default.
• W3058230660 sameAs 3058230660 @default.
• W3058230660 citedByCount "20" @default.
• W3058230660 countsByYear W30582306602020 @default.
• W3058230660 countsByYear W30582306602021 @default.
• W3058230660 countsByYear W30582306602022 @default.
• W3058230660 countsByYear W30582306602023 @default.
• W3058230660 crossrefType "journal-article" @default.
• W3058230660 hasAuthorship W3058230660A5009709906 @default.
• W3058230660 hasAuthorship W3058230660A5037881127 @default.
• W3058230660 hasAuthorship W3058230660A5044196048 @default.
• W3058230660 hasAuthorship W3058230660A5047765441 @default.
• W3058230660 hasAuthorship W3058230660A5074774843 @default.
• W3058230660 hasAuthorship W3058230660A5090664309 @default.
• W3058230660 hasConcept C111919701 @default.
• W3058230660 hasConcept C119599485 @default.
• W3058230660 hasConcept C120314980 @default.
• W3058230660 hasConcept C127413603 @default.
• W3058230660 hasConcept C149635348 @default.
• W3058230660 hasConcept C154945302 @default.
• W3058230660 hasConcept C157764524 @default.
• W3058230660 hasConcept C160671074 @default.
• W3058230660 hasConcept C176553487 @default.
• W3058230660 hasConcept C2780513914 @default.
• W3058230660 hasConcept C35750839 @default.
• W3058230660 hasConcept C38677869 @default.
• W3058230660 hasConcept C41008148 @default.
• W3058230660 hasConcept C44154836 @default.
• W3058230660 hasConcept C555944384 @default.

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