FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3065149780> ?p ?o ?g. }

• W3065149780 endingPage "13032" @default.
• W3065149780 startingPage "13025" @default.
• W3065149780 abstract "The dielectric and physical properties of nanoscale thin films are significantly enhanced by atomic layer substrate biasing." @default.
• W3065149780 created "2020-08-24" @default.
• W3065149780 creator A5000275104 @default.
• W3065149780 creator A5028649041 @default.
• W3065149780 creator A5044693849 @default.
• W3065149780 creator A5047838710 @default.
• W3065149780 creator A5048174462 @default.
• W3065149780 creator A5063084145 @default.
• W3065149780 creator A5078032697 @default.
• W3065149780 creator A5080668936 @default.
• W3065149780 date "2020-01-01" @default.
• W3065149780 modified "2023-09-26" @default.
• W3065149780 title "Dielectric properties and reliability enhancement of atomic layer deposited thin films by <i>in situ</i> atomic layer substrate biasing" @default.
• W3065149780 cites W1663845104 @default.
• W3065149780 cites W1865254928 @default.
• W3065149780 cites W1972792582 @default.
• W3065149780 cites W1978557462 @default.
• W3065149780 cites W1980048478 @default.
• W3065149780 cites W1985648908 @default.
• W3065149780 cites W2002738781 @default.
• W3065149780 cites W2004823737 @default.
• W3065149780 cites W2027625393 @default.
• W3065149780 cites W2038330453 @default.
• W3065149780 cites W2042432373 @default.
• W3065149780 cites W2044253606 @default.
• W3065149780 cites W2053674573 @default.
• W3065149780 cites W2060595913 @default.
• W3065149780 cites W2064058327 @default.
• W3065149780 cites W2066303531 @default.
• W3065149780 cites W2079201822 @default.
• W3065149780 cites W2088084492 @default.
• W3065149780 cites W2092746093 @default.
• W3065149780 cites W2098550459 @default.
• W3065149780 cites W2113239004 @default.
• W3065149780 cites W2115651894 @default.
• W3065149780 cites W2149248689 @default.
• W3065149780 cites W2158932701 @default.
• W3065149780 cites W2168751187 @default.
• W3065149780 cites W2253614698 @default.
• W3065149780 cites W2320589283 @default.
• W3065149780 cites W2492471222 @default.
• W3065149780 cites W2538900758 @default.
• W3065149780 cites W2580767461 @default.
• W3065149780 cites W2789517172 @default.
• W3065149780 cites W2790150426 @default.
• W3065149780 cites W2901297356 @default.
• W3065149780 cites W2911583474 @default.
• W3065149780 cites W2950544996 @default.
• W3065149780 cites W2986478220 @default.
• W3065149780 cites W2996283855 @default.
• W3065149780 doi "https://doi.org/10.1039/d0tc02346a" @default.
• W3065149780 hasPublicationYear "2020" @default.
• W3065149780 type Work @default.
• W3065149780 sameAs 3065149780 @default.
• W3065149780 citedByCount "4" @default.
• W3065149780 countsByYear W30651497802021 @default.
• W3065149780 countsByYear W30651497802022 @default.
• W3065149780 countsByYear W30651497802023 @default.
• W3065149780 crossrefType "journal-article" @default.
• W3065149780 hasAuthorship W3065149780A5000275104 @default.
• W3065149780 hasAuthorship W3065149780A5028649041 @default.
• W3065149780 hasAuthorship W3065149780A5044693849 @default.
• W3065149780 hasAuthorship W3065149780A5047838710 @default.
• W3065149780 hasAuthorship W3065149780A5048174462 @default.
• W3065149780 hasAuthorship W3065149780A5063084145 @default.
• W3065149780 hasAuthorship W3065149780A5078032697 @default.
• W3065149780 hasAuthorship W3065149780A5080668936 @default.
• W3065149780 hasConcept C111368507 @default.
• W3065149780 hasConcept C119599485 @default.
• W3065149780 hasConcept C121332964 @default.
• W3065149780 hasConcept C127313418 @default.
• W3065149780 hasConcept C127413603 @default.
• W3065149780 hasConcept C133386390 @default.
• W3065149780 hasConcept C153294291 @default.
• W3065149780 hasConcept C163258240 @default.
• W3065149780 hasConcept C165801399 @default.
• W3065149780 hasConcept C171250308 @default.
• W3065149780 hasConcept C19067145 @default.
• W3065149780 hasConcept C192562407 @default.
• W3065149780 hasConcept C20254490 @default.
• W3065149780 hasConcept C2777289219 @default.
• W3065149780 hasConcept C2777822432 @default.
• W3065149780 hasConcept C2779227376 @default.
• W3065149780 hasConcept C43214815 @default.
• W3065149780 hasConcept C49040817 @default.
• W3065149780 hasConcept C62520636 @default.
• W3065149780 hasConcept C69544855 @default.
• W3065149780 hasConceptScore W3065149780C111368507 @default.
• W3065149780 hasConceptScore W3065149780C119599485 @default.
• W3065149780 hasConceptScore W3065149780C121332964 @default.
• W3065149780 hasConceptScore W3065149780C127313418 @default.
• W3065149780 hasConceptScore W3065149780C127413603 @default.
• W3065149780 hasConceptScore W3065149780C133386390 @default.
• W3065149780 hasConceptScore W3065149780C153294291 @default.
• W3065149780 hasConceptScore W3065149780C163258240 @default.
• W3065149780 hasConceptScore W3065149780C165801399 @default.
• W3065149780 hasConceptScore W3065149780C171250308 @default.
• W3065149780 hasConceptScore W3065149780C19067145 @default.

• next