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- W307002607 abstract "Abstract : The major effort in the program has been the development of a microwave source to lower the sputter plasma voltage. I originally proposed an electron gun. However, the electron gun had a fundamental flaw. It extinguished the plasma near its insertion point with a resulting non-uniform deposition." @default.
- W307002607 created "2016-06-24" @default.
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- W307002607 date "2001-11-03" @default.
- W307002607 modified "2023-09-27" @default.
- W307002607 title "Sputter Deposition Method for III-V Semiconductor" @default.
- W307002607 doi "https://doi.org/10.21236/ada389442" @default.
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