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- W3074215219 abstract "This paper presents the development of high frequency (>10MHz) silicon-based thin-film magnetic-core inductors for DC-DC converter applications with high conversion efficiency. These inductors were fabricated with far-BEOL compatible process on 300 mm wafers. With an improved laminated thinfilm magnetic core and thick electro-plated Cu windings, these inductors achieved a wide range of inductance ranging from 10 to 250nH, a high Q factor of up to 17, and a saturation current of up to 650 mA in a small area of 1mm2. These inductor properties translate to more than 90% inductor power efficiency in a multiple-phased 3.6V-to-1V DC-DC converter within a current range of 0.1A to 1A." @default.
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- W3074215219 date "2020-09-01" @default.
- W3074215219 modified "2023-09-25" @default.
- W3074215219 title "Silicon-based Ultimate Miniature Magnetic Inductors Technology for High-efficiency DC-DC Conversion" @default.
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- W3074215219 doi "https://doi.org/10.1109/ispsd46842.2020.9170162" @default.
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