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• W3080117105 abstract "In a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates is proposed to decouple the rigid body and flexible modes. The closed-loop subspace identification method based on orthogonal is utilized to develop an unbiased standard state-space model. Based on the similarity principle, a modal analysis method is proposed to transfer the standard state-space model to the proposed modal-decomposition-dependent state-space model. Controllability and observability criteria are met to guarantee the minimum realization of the proposed state-space model. Finally, a modeling and modal analysis experiment is conducted on a developed wafer stage of lithographic tool. The results verify the effectiveness and accuracy of the proposed modeling method, as well as the controllability and observability of the proposed model." @default.
• W3080117105 created "2020-09-01" @default.
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• W3080117105 date "2020-08-24" @default.
• W3080117105 modified "2023-10-17" @default.
• W3080117105 title "Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment" @default.
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• W3080117105 doi "https://doi.org/10.1155/2020/8859222" @default.
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