Matches in SemOpenAlex for { <https://semopenalex.org/work/W3080331341> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W3080331341 abstract "In the digital age it has become a fundamental issue to monitor and control process parameters continuously and automatically. The monitoring of critical process parameters enables better quality at lower production costs and higher yields. In order to investigate the interactions between production quality and polishing parameters, we have developed a solution for automatic and reliable measurement of critical parameters. With this paper we first document the resolution and accuracy of the system compared to manual measuring methods currently in use." @default.
- W3080331341 created "2020-09-01" @default.
- W3080331341 creator A5020137639 @default.
- W3080331341 creator A5024319570 @default.
- W3080331341 creator A5051988154 @default.
- W3080331341 creator A5062959547 @default.
- W3080331341 date "2020-01-01" @default.
- W3080331341 modified "2023-10-16" @default.
- W3080331341 title "Octopus – Application test of a simple and effective tool for polishing slurry monitoring" @default.
- W3080331341 doi "https://doi.org/10.1051/epjconf/202023803004" @default.
- W3080331341 hasPublicationYear "2020" @default.
- W3080331341 type Work @default.
- W3080331341 sameAs 3080331341 @default.
- W3080331341 citedByCount "0" @default.
- W3080331341 crossrefType "journal-article" @default.
- W3080331341 hasAuthorship W3080331341A5020137639 @default.
- W3080331341 hasAuthorship W3080331341A5024319570 @default.
- W3080331341 hasAuthorship W3080331341A5051988154 @default.
- W3080331341 hasAuthorship W3080331341A5062959547 @default.
- W3080331341 hasBestOaLocation W30803313411 @default.
- W3080331341 hasConcept C111472728 @default.
- W3080331341 hasConcept C111919701 @default.
- W3080331341 hasConcept C115901376 @default.
- W3080331341 hasConcept C121332964 @default.
- W3080331341 hasConcept C127413603 @default.
- W3080331341 hasConcept C138113353 @default.
- W3080331341 hasConcept C138885662 @default.
- W3080331341 hasConcept C139719470 @default.
- W3080331341 hasConcept C162324750 @default.
- W3080331341 hasConcept C199639397 @default.
- W3080331341 hasConcept C200601418 @default.
- W3080331341 hasConcept C21880701 @default.
- W3080331341 hasConcept C2778348673 @default.
- W3080331341 hasConcept C2779530757 @default.
- W3080331341 hasConcept C2780586882 @default.
- W3080331341 hasConcept C41008148 @default.
- W3080331341 hasConcept C62520636 @default.
- W3080331341 hasConcept C78519656 @default.
- W3080331341 hasConcept C79403827 @default.
- W3080331341 hasConcept C87717796 @default.
- W3080331341 hasConcept C94293008 @default.
- W3080331341 hasConcept C98045186 @default.
- W3080331341 hasConceptScore W3080331341C111472728 @default.
- W3080331341 hasConceptScore W3080331341C111919701 @default.
- W3080331341 hasConceptScore W3080331341C115901376 @default.
- W3080331341 hasConceptScore W3080331341C121332964 @default.
- W3080331341 hasConceptScore W3080331341C127413603 @default.
- W3080331341 hasConceptScore W3080331341C138113353 @default.
- W3080331341 hasConceptScore W3080331341C138885662 @default.
- W3080331341 hasConceptScore W3080331341C139719470 @default.
- W3080331341 hasConceptScore W3080331341C162324750 @default.
- W3080331341 hasConceptScore W3080331341C199639397 @default.
- W3080331341 hasConceptScore W3080331341C200601418 @default.
- W3080331341 hasConceptScore W3080331341C21880701 @default.
- W3080331341 hasConceptScore W3080331341C2778348673 @default.
- W3080331341 hasConceptScore W3080331341C2779530757 @default.
- W3080331341 hasConceptScore W3080331341C2780586882 @default.
- W3080331341 hasConceptScore W3080331341C41008148 @default.
- W3080331341 hasConceptScore W3080331341C62520636 @default.
- W3080331341 hasConceptScore W3080331341C78519656 @default.
- W3080331341 hasConceptScore W3080331341C79403827 @default.
- W3080331341 hasConceptScore W3080331341C87717796 @default.
- W3080331341 hasConceptScore W3080331341C94293008 @default.
- W3080331341 hasConceptScore W3080331341C98045186 @default.
- W3080331341 hasLocation W30803313411 @default.
- W3080331341 hasLocation W30803313412 @default.
- W3080331341 hasOpenAccess W3080331341 @default.
- W3080331341 hasPrimaryLocation W30803313411 @default.
- W3080331341 hasRelatedWork W11369810 @default.
- W3080331341 hasRelatedWork W12152887 @default.
- W3080331341 hasRelatedWork W12667871 @default.
- W3080331341 hasRelatedWork W20132 @default.
- W3080331341 hasRelatedWork W3678022 @default.
- W3080331341 hasRelatedWork W4052452 @default.
- W3080331341 hasRelatedWork W547096 @default.
- W3080331341 hasRelatedWork W6109024 @default.
- W3080331341 hasRelatedWork W9476130 @default.
- W3080331341 hasRelatedWork W1771804 @default.
- W3080331341 isParatext "false" @default.
- W3080331341 isRetracted "false" @default.
- W3080331341 magId "3080331341" @default.
- W3080331341 workType "article" @default.