Matches in SemOpenAlex for { <https://semopenalex.org/work/W3081809604> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W3081809604 endingPage "317" @default.
- W3081809604 startingPage "312" @default.
- W3081809604 abstract "The monolayer-sensitive variable-angle spectroscopic ellipsometry technique was used to study the temperature-dependent growth mechanisms of an ultrathin oxide layer on top of silicon. The oxidation was done in atomic oxygen produced in a pure oxygen plasma and driven by an RF power source. The results have been compared with the recently proposed model of Murali and Murarka for ultrathin oxide growth on top of silicon. The activation energies of different growth parameters associated with the oxide growth have also been determined." @default.
- W3081809604 created "2020-09-08" @default.
- W3081809604 creator A5016022752 @default.
- W3081809604 creator A5083826558 @default.
- W3081809604 date "1990-01-01" @default.
- W3081809604 modified "2023-09-27" @default.
- W3081809604 title "Study of temperature-dependent ultrathin oxide growth on Si(111) using variable-angle spectroscopic ellipsometry" @default.
- W3081809604 hasPublicationYear "1990" @default.
- W3081809604 type Work @default.
- W3081809604 sameAs 3081809604 @default.
- W3081809604 citedByCount "0" @default.
- W3081809604 crossrefType "journal-article" @default.
- W3081809604 hasAuthorship W3081809604A5016022752 @default.
- W3081809604 hasAuthorship W3081809604A5083826558 @default.
- W3081809604 hasConcept C113196181 @default.
- W3081809604 hasConcept C171250308 @default.
- W3081809604 hasConcept C178790620 @default.
- W3081809604 hasConcept C18293161 @default.
- W3081809604 hasConcept C185592680 @default.
- W3081809604 hasConcept C19067145 @default.
- W3081809604 hasConcept C191897082 @default.
- W3081809604 hasConcept C192562407 @default.
- W3081809604 hasConcept C2777431650 @default.
- W3081809604 hasConcept C2779105228 @default.
- W3081809604 hasConcept C2779227376 @default.
- W3081809604 hasConcept C2779851234 @default.
- W3081809604 hasConcept C43617362 @default.
- W3081809604 hasConcept C49040817 @default.
- W3081809604 hasConcept C540031477 @default.
- W3081809604 hasConcept C544956773 @default.
- W3081809604 hasConcept C7070889 @default.
- W3081809604 hasConceptScore W3081809604C113196181 @default.
- W3081809604 hasConceptScore W3081809604C171250308 @default.
- W3081809604 hasConceptScore W3081809604C178790620 @default.
- W3081809604 hasConceptScore W3081809604C18293161 @default.
- W3081809604 hasConceptScore W3081809604C185592680 @default.
- W3081809604 hasConceptScore W3081809604C19067145 @default.
- W3081809604 hasConceptScore W3081809604C191897082 @default.
- W3081809604 hasConceptScore W3081809604C192562407 @default.
- W3081809604 hasConceptScore W3081809604C2777431650 @default.
- W3081809604 hasConceptScore W3081809604C2779105228 @default.
- W3081809604 hasConceptScore W3081809604C2779227376 @default.
- W3081809604 hasConceptScore W3081809604C2779851234 @default.
- W3081809604 hasConceptScore W3081809604C43617362 @default.
- W3081809604 hasConceptScore W3081809604C49040817 @default.
- W3081809604 hasConceptScore W3081809604C540031477 @default.
- W3081809604 hasConceptScore W3081809604C544956773 @default.
- W3081809604 hasConceptScore W3081809604C7070889 @default.
- W3081809604 hasLocation W30818096041 @default.
- W3081809604 hasOpenAccess W3081809604 @default.
- W3081809604 hasPrimaryLocation W30818096041 @default.
- W3081809604 hasRelatedWork W1963488610 @default.
- W3081809604 hasRelatedWork W1975872342 @default.
- W3081809604 hasRelatedWork W1982540250 @default.
- W3081809604 hasRelatedWork W2004128183 @default.
- W3081809604 hasRelatedWork W2021769990 @default.
- W3081809604 hasRelatedWork W2040177156 @default.
- W3081809604 hasRelatedWork W2045722021 @default.
- W3081809604 hasRelatedWork W2063481075 @default.
- W3081809604 hasRelatedWork W2067258751 @default.
- W3081809604 hasRelatedWork W2071877989 @default.
- W3081809604 hasRelatedWork W2077160285 @default.
- W3081809604 hasRelatedWork W2088523707 @default.
- W3081809604 hasRelatedWork W2091334838 @default.
- W3081809604 hasRelatedWork W2753941476 @default.
- W3081809604 hasRelatedWork W2772703116 @default.
- W3081809604 hasRelatedWork W2907846485 @default.
- W3081809604 hasRelatedWork W2914006042 @default.
- W3081809604 hasRelatedWork W2995586416 @default.
- W3081809604 hasRelatedWork W3151777920 @default.
- W3081809604 hasRelatedWork W2170121201 @default.
- W3081809604 hasVolume "2" @default.
- W3081809604 isParatext "false" @default.
- W3081809604 isRetracted "false" @default.
- W3081809604 magId "3081809604" @default.
- W3081809604 workType "article" @default.