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- W3081995890 abstract "To meet the dimensional requirements for bioelectronic medicine, new packaging solutions are needed that could enable small, light-weight and flexible implants. For protecting the implantable electronics against biofluids, recently various atomic layer deposited (ALD) coatings have been proposed with high barrier properties. Before implantation, however, the protective coating should be evaluated for any defects which could otherwise lead to leakage and device failure. In these cases, the conventional helium leak test method can no longer be used due to the millimeter size of the implant. Therefore, an in-situ sensing platform is needed that could evaluate the coating and justify the implantation of the final device. In this work, we explore the possibility of using the CMOS bulk for such a platform. Towards this aim, as a proof of concept, test chips were made in a standard 6-metal 0.18 µm CMOS process and for the connection to the bulk, a p+ diffusion was used. A group of samples was then coated with an ALD multilayer. For coating evaluation, off-chip DC current leakage and impedance measurements were carried out in saline between the CMOS bulk and a platinum reference electrode. Results were compared between non-coated and coated chips that clearly demonstrated the potential of using the bulk as a sensing platform for coating evaluations. This novel approach could pave the way towards an all integrated in-situ hermeticity test, currently missing in mm-size implants." @default.
- W3081995890 created "2020-09-08" @default.
- W3081995890 creator A5020863005 @default.
- W3081995890 creator A5026038729 @default.
- W3081995890 creator A5026290532 @default.
- W3081995890 creator A5077686814 @default.
- W3081995890 date "2020-07-01" @default.
- W3081995890 modified "2023-09-23" @default.
- W3081995890 title "Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants" @default.
- W3081995890 cites W1984671579 @default.
- W3081995890 cites W1987796903 @default.
- W3081995890 cites W2178245272 @default.
- W3081995890 cites W2213929894 @default.
- W3081995890 cites W2794590112 @default.
- W3081995890 cites W2810368887 @default.
- W3081995890 cites W2903783951 @default.
- W3081995890 cites W2972568184 @default.
- W3081995890 cites W2980267197 @default.
- W3081995890 cites W2993221443 @default.
- W3081995890 cites W3048096433 @default.
- W3081995890 doi "https://doi.org/10.1109/embc44109.2020.9176103" @default.
- W3081995890 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/33018742" @default.
- W3081995890 hasPublicationYear "2020" @default.
- W3081995890 type Work @default.
- W3081995890 sameAs 3081995890 @default.
- W3081995890 citedByCount "1" @default.
- W3081995890 countsByYear W30819958902021 @default.
- W3081995890 crossrefType "proceedings-article" @default.
- W3081995890 hasAuthorship W3081995890A5020863005 @default.
- W3081995890 hasAuthorship W3081995890A5026038729 @default.
- W3081995890 hasAuthorship W3081995890A5026290532 @default.
- W3081995890 hasAuthorship W3081995890A5077686814 @default.
- W3081995890 hasConcept C127413603 @default.
- W3081995890 hasConcept C139719470 @default.
- W3081995890 hasConcept C147789679 @default.
- W3081995890 hasConcept C162324750 @default.
- W3081995890 hasConcept C171250308 @default.
- W3081995890 hasConcept C17525397 @default.
- W3081995890 hasConcept C185592680 @default.
- W3081995890 hasConcept C192562407 @default.
- W3081995890 hasConcept C24326235 @default.
- W3081995890 hasConcept C2777042071 @default.
- W3081995890 hasConcept C2779227376 @default.
- W3081995890 hasConcept C2781448156 @default.
- W3081995890 hasConcept C46362747 @default.
- W3081995890 hasConcept C49040817 @default.
- W3081995890 hasConcept C69544855 @default.
- W3081995890 hasConceptScore W3081995890C127413603 @default.
- W3081995890 hasConceptScore W3081995890C139719470 @default.
- W3081995890 hasConceptScore W3081995890C147789679 @default.
- W3081995890 hasConceptScore W3081995890C162324750 @default.
- W3081995890 hasConceptScore W3081995890C171250308 @default.
- W3081995890 hasConceptScore W3081995890C17525397 @default.
- W3081995890 hasConceptScore W3081995890C185592680 @default.
- W3081995890 hasConceptScore W3081995890C192562407 @default.
- W3081995890 hasConceptScore W3081995890C24326235 @default.
- W3081995890 hasConceptScore W3081995890C2777042071 @default.
- W3081995890 hasConceptScore W3081995890C2779227376 @default.
- W3081995890 hasConceptScore W3081995890C2781448156 @default.
- W3081995890 hasConceptScore W3081995890C46362747 @default.
- W3081995890 hasConceptScore W3081995890C49040817 @default.
- W3081995890 hasConceptScore W3081995890C69544855 @default.
- W3081995890 hasLocation W30819958901 @default.
- W3081995890 hasLocation W30819958902 @default.
- W3081995890 hasOpenAccess W3081995890 @default.
- W3081995890 hasPrimaryLocation W30819958901 @default.
- W3081995890 hasRelatedWork W2018547716 @default.
- W3081995890 hasRelatedWork W2034106250 @default.
- W3081995890 hasRelatedWork W2038208423 @default.
- W3081995890 hasRelatedWork W2038810658 @default.
- W3081995890 hasRelatedWork W2062957571 @default.
- W3081995890 hasRelatedWork W2157305822 @default.
- W3081995890 hasRelatedWork W2158042802 @default.
- W3081995890 hasRelatedWork W2581156470 @default.
- W3081995890 hasRelatedWork W2980874615 @default.
- W3081995890 hasRelatedWork W3127857378 @default.
- W3081995890 isParatext "false" @default.
- W3081995890 isRetracted "false" @default.
- W3081995890 magId "3081995890" @default.
- W3081995890 workType "article" @default.