Matches in SemOpenAlex for { <https://semopenalex.org/work/W3082351304> ?p ?o ?g. }
- W3082351304 endingPage "969" @default.
- W3082351304 startingPage "959" @default.
- W3082351304 abstract "High Q-factor inductors are critical in designing high performance RF/microwave circuits on SOI technology. Substrate losses is a key limiting factor when designing inductors with high Q-factors. In this context, we report a substrate engineering method that enables improvement of quality factors of already fabricated inductors on SOI. A novel femtosecond laser milling process is utilized for the fabrication of locally suspended membranes of inductors with handler silicon completely etched. Such flexible membranes suspended freely on the BOX show up to 92 % improvement in Q-factor for single turn inductor. The improvement in Q-factor is reported on large sized inductors due to reduced parallel capacitance which allows enhanced operation of inductors at high frequencies. A compact model extraction methodology has been developed to model inductor membranes. These membranes have been utilized for the improvement of noise performance of LNA working in the 4.9 - 5.9 GHz range. A 0.1 dB improvement in noise figure has been reported by taking an existing design and suspending the input side inductors of the LNA circuit. The substrate engineering method reported in this work is not only applicable to inductors but also to active circuits, making it a powerful tool for enhancement of RF devices." @default.
- W3082351304 created "2020-09-08" @default.
- W3082351304 creator A5009321740 @default.
- W3082351304 creator A5012303056 @default.
- W3082351304 creator A5018499383 @default.
- W3082351304 creator A5044875650 @default.
- W3082351304 creator A5062702178 @default.
- W3082351304 creator A5069050747 @default.
- W3082351304 creator A5071046310 @default.
- W3082351304 creator A5075157334 @default.
- W3082351304 creator A5081645961 @default.
- W3082351304 date "2020-01-01" @default.
- W3082351304 modified "2023-10-14" @default.
- W3082351304 title "Substrate Engineering of Inductors on SOI for Improvement of Q-Factor and Application in LNA" @default.
- W3082351304 cites W1715906283 @default.
- W3082351304 cites W1972036137 @default.
- W3082351304 cites W1984574682 @default.
- W3082351304 cites W1988720953 @default.
- W3082351304 cites W2050500303 @default.
- W3082351304 cites W2051002503 @default.
- W3082351304 cites W2053291782 @default.
- W3082351304 cites W2063404190 @default.
- W3082351304 cites W2065419206 @default.
- W3082351304 cites W2074794933 @default.
- W3082351304 cites W2097049090 @default.
- W3082351304 cites W2099409846 @default.
- W3082351304 cites W2102096768 @default.
- W3082351304 cites W2104151487 @default.
- W3082351304 cites W2108199118 @default.
- W3082351304 cites W2121160546 @default.
- W3082351304 cites W2124422949 @default.
- W3082351304 cites W2124758156 @default.
- W3082351304 cites W2125186588 @default.
- W3082351304 cites W2125189719 @default.
- W3082351304 cites W2128660367 @default.
- W3082351304 cites W2129137755 @default.
- W3082351304 cites W2134709562 @default.
- W3082351304 cites W2142640275 @default.
- W3082351304 cites W2144546776 @default.
- W3082351304 cites W2147451535 @default.
- W3082351304 cites W2160385842 @default.
- W3082351304 cites W2160428624 @default.
- W3082351304 cites W2164532932 @default.
- W3082351304 cites W2169838451 @default.
- W3082351304 cites W2292338669 @default.
- W3082351304 cites W2316075187 @default.
- W3082351304 cites W2498062958 @default.
- W3082351304 cites W2507463527 @default.
- W3082351304 cites W2620516189 @default.
- W3082351304 cites W2902309776 @default.
- W3082351304 cites W2918931293 @default.
- W3082351304 cites W2925838413 @default.
- W3082351304 cites W2971936929 @default.
- W3082351304 cites W2971982453 @default.
- W3082351304 cites W3217269181 @default.
- W3082351304 doi "https://doi.org/10.1109/jeds.2020.3019884" @default.
- W3082351304 hasPublicationYear "2020" @default.
- W3082351304 type Work @default.
- W3082351304 sameAs 3082351304 @default.
- W3082351304 citedByCount "11" @default.
- W3082351304 countsByYear W30823513042021 @default.
- W3082351304 countsByYear W30823513042022 @default.
- W3082351304 countsByYear W30823513042023 @default.
- W3082351304 crossrefType "journal-article" @default.
- W3082351304 hasAuthorship W3082351304A5009321740 @default.
- W3082351304 hasAuthorship W3082351304A5012303056 @default.
- W3082351304 hasAuthorship W3082351304A5018499383 @default.
- W3082351304 hasAuthorship W3082351304A5044875650 @default.
- W3082351304 hasAuthorship W3082351304A5062702178 @default.
- W3082351304 hasAuthorship W3082351304A5069050747 @default.
- W3082351304 hasAuthorship W3082351304A5071046310 @default.
- W3082351304 hasAuthorship W3082351304A5075157334 @default.
- W3082351304 hasAuthorship W3082351304A5081645961 @default.
- W3082351304 hasBestOaLocation W30823513041 @default.
- W3082351304 hasConcept C111368507 @default.
- W3082351304 hasConcept C112806910 @default.
- W3082351304 hasConcept C119599485 @default.
- W3082351304 hasConcept C121332964 @default.
- W3082351304 hasConcept C127313418 @default.
- W3082351304 hasConcept C127413603 @default.
- W3082351304 hasConcept C134146338 @default.
- W3082351304 hasConcept C144534570 @default.
- W3082351304 hasConcept C154318817 @default.
- W3082351304 hasConcept C165801399 @default.
- W3082351304 hasConcept C17525397 @default.
- W3082351304 hasConcept C187725362 @default.
- W3082351304 hasConcept C192562407 @default.
- W3082351304 hasConcept C194257627 @default.
- W3082351304 hasConcept C24326235 @default.
- W3082351304 hasConcept C2777289219 @default.
- W3082351304 hasConcept C30066665 @default.
- W3082351304 hasConcept C46362747 @default.
- W3082351304 hasConcept C49040817 @default.
- W3082351304 hasConcept C53143962 @default.
- W3082351304 hasConcept C544956773 @default.
- W3082351304 hasConcept C62520636 @default.
- W3082351304 hasConcept C97126364 @default.
- W3082351304 hasConceptScore W3082351304C111368507 @default.