Matches in SemOpenAlex for { <https://semopenalex.org/work/W3082395402> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W3082395402 endingPage "530" @default.
- W3082395402 startingPage "519" @default.
- W3082395402 abstract "Semiconductor manufacturing systems and ultra-precise machine tools now require nanometer-scale positioning accuracy. To improve positioning accuracy, it is efficient to support the top table with a noncontact guide system to prevent guide friction and heat transfer from the lower table or base. A magnetic levitation (maglev) stage can accomplish ultra-precise positioning accuracy with six-degrees-of-freedom (6DOF) control even in vacuum conditions. However, if the gravity of the levitated table is supported by the thrust of a linear motor, heat generation from the motor coil dramatically increases. In addition, a larger motor is required, which causes the moving mass to increase and the mechanical response to deteriorate. We aimed to develop a compact maglev stage for which the levitated mass is less than 1 kg and that is dramatically more lightweight than existing maglev stages. This compact feature was enabled by our newly proposed gravity compensation system with repellent force and a planar motor structure. The developed stage system also has long strokes, specifically 200 mm in the X and Y-directions on a horizontal plane. We designed a maglev stage with the following design concepts to create its compact structure: (1) Reduce top-table mass to minimize the motor dimensions and enable a light weight and high responsiveness. (2) Measure the top-table position from the base to eliminate positioning error and isolate vibrations of the coarse stage. (3) Install a motor in a symmetrical layout in view from the Z-axis to enable the same driving characteristics between the X and Y axes. The results of the performance evaluation showed that the developed maglev stage system with a compact structure with 0.81 kg levitated mass has ±10 nm positioning stability." @default.
- W3082395402 created "2020-09-08" @default.
- W3082395402 creator A5061704492 @default.
- W3082395402 creator A5063446995 @default.
- W3082395402 creator A5088653406 @default.
- W3082395402 date "2020-11-01" @default.
- W3082395402 modified "2023-09-29" @default.
- W3082395402 title "Compact maglev stage system for nanometer-scale positioning" @default.
- W3082395402 cites W2006735731 @default.
- W3082395402 cites W2049637920 @default.
- W3082395402 cites W2077042122 @default.
- W3082395402 cites W2115047545 @default.
- W3082395402 cites W2166780416 @default.
- W3082395402 cites W2312917853 @default.
- W3082395402 cites W2313773736 @default.
- W3082395402 cites W2995427461 @default.
- W3082395402 doi "https://doi.org/10.1016/j.precisioneng.2020.08.016" @default.
- W3082395402 hasPublicationYear "2020" @default.
- W3082395402 type Work @default.
- W3082395402 sameAs 3082395402 @default.
- W3082395402 citedByCount "6" @default.
- W3082395402 countsByYear W30823954022021 @default.
- W3082395402 countsByYear W30823954022022 @default.
- W3082395402 countsByYear W30823954022023 @default.
- W3082395402 crossrefType "journal-article" @default.
- W3082395402 hasAuthorship W3082395402A5061704492 @default.
- W3082395402 hasAuthorship W3082395402A5063446995 @default.
- W3082395402 hasAuthorship W3082395402A5088653406 @default.
- W3082395402 hasConcept C119599485 @default.
- W3082395402 hasConcept C127413603 @default.
- W3082395402 hasConcept C131513009 @default.
- W3082395402 hasConcept C154945302 @default.
- W3082395402 hasConcept C16389437 @default.
- W3082395402 hasConcept C196781063 @default.
- W3082395402 hasConcept C206736587 @default.
- W3082395402 hasConcept C2775924081 @default.
- W3082395402 hasConcept C27838914 @default.
- W3082395402 hasConcept C41008148 @default.
- W3082395402 hasConcept C46150780 @default.
- W3082395402 hasConcept C47446073 @default.
- W3082395402 hasConcept C78519656 @default.
- W3082395402 hasConcept C79420006 @default.
- W3082395402 hasConceptScore W3082395402C119599485 @default.
- W3082395402 hasConceptScore W3082395402C127413603 @default.
- W3082395402 hasConceptScore W3082395402C131513009 @default.
- W3082395402 hasConceptScore W3082395402C154945302 @default.
- W3082395402 hasConceptScore W3082395402C16389437 @default.
- W3082395402 hasConceptScore W3082395402C196781063 @default.
- W3082395402 hasConceptScore W3082395402C206736587 @default.
- W3082395402 hasConceptScore W3082395402C2775924081 @default.
- W3082395402 hasConceptScore W3082395402C27838914 @default.
- W3082395402 hasConceptScore W3082395402C41008148 @default.
- W3082395402 hasConceptScore W3082395402C46150780 @default.
- W3082395402 hasConceptScore W3082395402C47446073 @default.
- W3082395402 hasConceptScore W3082395402C78519656 @default.
- W3082395402 hasConceptScore W3082395402C79420006 @default.
- W3082395402 hasLocation W30823954021 @default.
- W3082395402 hasOpenAccess W3082395402 @default.
- W3082395402 hasPrimaryLocation W30823954021 @default.
- W3082395402 hasRelatedWork W2003694767 @default.
- W3082395402 hasRelatedWork W2019547902 @default.
- W3082395402 hasRelatedWork W2139746039 @default.
- W3082395402 hasRelatedWork W2142511921 @default.
- W3082395402 hasRelatedWork W2156813305 @default.
- W3082395402 hasRelatedWork W2475934867 @default.
- W3082395402 hasRelatedWork W2763797999 @default.
- W3082395402 hasRelatedWork W2889702227 @default.
- W3082395402 hasRelatedWork W4309229048 @default.
- W3082395402 hasRelatedWork W2149361079 @default.
- W3082395402 hasVolume "66" @default.
- W3082395402 isParatext "false" @default.
- W3082395402 isRetracted "false" @default.
- W3082395402 magId "3082395402" @default.
- W3082395402 workType "article" @default.