Matches in SemOpenAlex for { <https://semopenalex.org/work/W3082984771> ?p ?o ?g. }
- W3082984771 endingPage "147734" @default.
- W3082984771 startingPage "147734" @default.
- W3082984771 abstract "Aluminum/fluorine-codoped zinc oxide (AFZO) thin films were prepared on silicon and glass substrates through atomic layer deposition at 150 °C. Their structural, electrical, and optical properties were investigated as functions of the F/Al codoping ratio. The X-ray diffraction analysis revealed that the preferred growth orientation changed depending on the codoping with F, that is, from (0 0 0 2) for Al-doped ZnO (AZO) films to (1 0 1 0) for the AFZO ones. The electrical resistivity of the AFZO films (around 5.0 × 10–4 Ω∙cm) was lower than that of the AZO ones; this was mainly attributed to an increase in the n-type carrier concentration (from 4.11 × 1020 cm3 for AZO to 5.86 × 1020 cm3 for AFZO) due to the substitution of the Zn and O sublattice sites by, respectively, the Al and F atoms. The enhanced carrier concentration affected also the optical property of the AFZO films according to the Moss–Burstein shift. The carrier mobility was similarly improved (from 6.96 cm2/V∙s for AZO to 21.2 cm2/V∙s for AFZO) by the passivation of the oxygen vacancies via the F-doping." @default.
- W3082984771 created "2020-09-08" @default.
- W3082984771 creator A5015673562 @default.
- W3082984771 creator A5016836659 @default.
- W3082984771 creator A5031624814 @default.
- W3082984771 creator A5055532781 @default.
- W3082984771 creator A5057047579 @default.
- W3082984771 date "2021-01-01" @default.
- W3082984771 modified "2023-09-23" @default.
- W3082984771 title "Al/F codoping effect on the structural, electrical, and optical properties of ZnO films grown via atomic layer deposition" @default.
- W3082984771 cites W142141365 @default.
- W3082984771 cites W1620406619 @default.
- W3082984771 cites W1963916982 @default.
- W3082984771 cites W1965210884 @default.
- W3082984771 cites W1965223232 @default.
- W3082984771 cites W1967123189 @default.
- W3082984771 cites W1967652077 @default.
- W3082984771 cites W1969023199 @default.
- W3082984771 cites W1969855517 @default.
- W3082984771 cites W1972662958 @default.
- W3082984771 cites W1973035291 @default.
- W3082984771 cites W1982390842 @default.
- W3082984771 cites W1986988787 @default.
- W3082984771 cites W1989315501 @default.
- W3082984771 cites W2000979131 @default.
- W3082984771 cites W2002093212 @default.
- W3082984771 cites W2007065882 @default.
- W3082984771 cites W2008362017 @default.
- W3082984771 cites W2017580540 @default.
- W3082984771 cites W2018492997 @default.
- W3082984771 cites W2019187142 @default.
- W3082984771 cites W2019642150 @default.
- W3082984771 cites W2022340682 @default.
- W3082984771 cites W2023010144 @default.
- W3082984771 cites W2023710085 @default.
- W3082984771 cites W2024025132 @default.
- W3082984771 cites W2025172217 @default.
- W3082984771 cites W2028423728 @default.
- W3082984771 cites W2034047430 @default.
- W3082984771 cites W2034841988 @default.
- W3082984771 cites W2035368676 @default.
- W3082984771 cites W2041938988 @default.
- W3082984771 cites W2048538330 @default.
- W3082984771 cites W2048884020 @default.
- W3082984771 cites W2051286527 @default.
- W3082984771 cites W2052034456 @default.
- W3082984771 cites W2054179551 @default.
- W3082984771 cites W2057519049 @default.
- W3082984771 cites W2057608135 @default.
- W3082984771 cites W2060429741 @default.
- W3082984771 cites W2061146940 @default.
- W3082984771 cites W2069419250 @default.
- W3082984771 cites W2074701227 @default.
- W3082984771 cites W2078235521 @default.
- W3082984771 cites W2084676846 @default.
- W3082984771 cites W2085309274 @default.
- W3082984771 cites W2087631162 @default.
- W3082984771 cites W2089645573 @default.
- W3082984771 cites W2090717859 @default.
- W3082984771 cites W2092209234 @default.
- W3082984771 cites W2099315705 @default.
- W3082984771 cites W2109146548 @default.
- W3082984771 cites W2135363852 @default.
- W3082984771 cites W2155222778 @default.
- W3082984771 cites W2161849918 @default.
- W3082984771 cites W2188860375 @default.
- W3082984771 cites W2277614595 @default.
- W3082984771 cites W2291659701 @default.
- W3082984771 cites W2349396523 @default.
- W3082984771 cites W2460763180 @default.
- W3082984771 cites W2571465012 @default.
- W3082984771 cites W2926315641 @default.
- W3082984771 doi "https://doi.org/10.1016/j.apsusc.2020.147734" @default.
- W3082984771 hasPublicationYear "2021" @default.
- W3082984771 type Work @default.
- W3082984771 sameAs 3082984771 @default.
- W3082984771 citedByCount "18" @default.
- W3082984771 countsByYear W30829847712021 @default.
- W3082984771 countsByYear W30829847712022 @default.
- W3082984771 countsByYear W30829847712023 @default.
- W3082984771 crossrefType "journal-article" @default.
- W3082984771 hasAuthorship W3082984771A5015673562 @default.
- W3082984771 hasAuthorship W3082984771A5016836659 @default.
- W3082984771 hasAuthorship W3082984771A5031624814 @default.
- W3082984771 hasAuthorship W3082984771A5055532781 @default.
- W3082984771 hasAuthorship W3082984771A5057047579 @default.
- W3082984771 hasConcept C106782819 @default.
- W3082984771 hasConcept C113196181 @default.
- W3082984771 hasConcept C119599485 @default.
- W3082984771 hasConcept C127413603 @default.
- W3082984771 hasConcept C151730666 @default.
- W3082984771 hasConcept C159985019 @default.
- W3082984771 hasConcept C171250308 @default.
- W3082984771 hasConcept C185592680 @default.
- W3082984771 hasConcept C19067145 @default.
- W3082984771 hasConcept C191897082 @default.
- W3082984771 hasConcept C192562407 @default.
- W3082984771 hasConcept C2779227376 @default.