Matches in SemOpenAlex for { <https://semopenalex.org/work/W3083701858> ?p ?o ?g. }
- W3083701858 endingPage "108072" @default.
- W3083701858 startingPage "108072" @default.
- W3083701858 abstract "Microcrystalline diamond (MCD) and nanocrystalline diamond (NCD) films were synthesized on Si substrates by a microwave plasma chemical vapor deposition in methane-hydrogen gas mixtures with a wide range of methane concentrations of 0.5–40%. The samples were investigated with scanning electron microscopy, atomic force microscopy, and Raman spectroscopy. We observed an unusual transition of the produced material structure from MCD to NCD and again to MCD with the increase in CH4 content in the gas. The deposition rate, grain size, and the roughness of the films exhibited extrema in the middle of the methane concentration range ([CH4] = 20%). Further increase of CH4 percentage leads to improvement of the diamond film quality, as confirmed by Raman spectra and SEM images while keeping a high deposition rate. These results may be used for the growth of the wide range of PCD films to be used as multipurpose protective layers, hard coatings for the cutting tools, and the diamond base for composite MCD/NCD structures." @default.
- W3083701858 created "2020-09-11" @default.
- W3083701858 creator A5022998780 @default.
- W3083701858 creator A5030475733 @default.
- W3083701858 creator A5031916834 @default.
- W3083701858 creator A5035330500 @default.
- W3083701858 creator A5073242203 @default.
- W3083701858 creator A5083708577 @default.
- W3083701858 date "2020-11-01" @default.
- W3083701858 modified "2023-10-01" @default.
- W3083701858 title "Deposition of diamond films on Si by microwave plasma CVD in varied CH4-H2 mixtures: Reverse nanocrystalline-to-microcrystalline structure transition at very high methane concentrations" @default.
- W3083701858 cites W1039098740 @default.
- W3083701858 cites W1990221681 @default.
- W3083701858 cites W1994687326 @default.
- W3083701858 cites W2006105697 @default.
- W3083701858 cites W2009068715 @default.
- W3083701858 cites W2010887005 @default.
- W3083701858 cites W2012452880 @default.
- W3083701858 cites W2039131493 @default.
- W3083701858 cites W2046968235 @default.
- W3083701858 cites W2056924160 @default.
- W3083701858 cites W2078491741 @default.
- W3083701858 cites W2111217609 @default.
- W3083701858 cites W2114387724 @default.
- W3083701858 cites W2147526941 @default.
- W3083701858 cites W2169300608 @default.
- W3083701858 cites W2171487797 @default.
- W3083701858 cites W2199750937 @default.
- W3083701858 cites W2267033657 @default.
- W3083701858 cites W2287040032 @default.
- W3083701858 cites W2322903285 @default.
- W3083701858 cites W2567813176 @default.
- W3083701858 cites W2568521073 @default.
- W3083701858 cites W2606169523 @default.
- W3083701858 cites W2606496646 @default.
- W3083701858 cites W2623203780 @default.
- W3083701858 cites W2737365364 @default.
- W3083701858 cites W2767827634 @default.
- W3083701858 cites W2775903262 @default.
- W3083701858 cites W2784341676 @default.
- W3083701858 cites W2894509061 @default.
- W3083701858 cites W2903786338 @default.
- W3083701858 cites W2907451426 @default.
- W3083701858 cites W2967939903 @default.
- W3083701858 cites W2969345723 @default.
- W3083701858 cites W2979523296 @default.
- W3083701858 cites W2992336030 @default.
- W3083701858 cites W4211168088 @default.
- W3083701858 doi "https://doi.org/10.1016/j.diamond.2020.108072" @default.
- W3083701858 hasPublicationYear "2020" @default.
- W3083701858 type Work @default.
- W3083701858 sameAs 3083701858 @default.
- W3083701858 citedByCount "31" @default.
- W3083701858 countsByYear W30837018582021 @default.
- W3083701858 countsByYear W30837018582022 @default.
- W3083701858 countsByYear W30837018582023 @default.
- W3083701858 crossrefType "journal-article" @default.
- W3083701858 hasAuthorship W3083701858A5022998780 @default.
- W3083701858 hasAuthorship W3083701858A5030475733 @default.
- W3083701858 hasAuthorship W3083701858A5031916834 @default.
- W3083701858 hasAuthorship W3083701858A5035330500 @default.
- W3083701858 hasAuthorship W3083701858A5073242203 @default.
- W3083701858 hasAuthorship W3083701858A5083708577 @default.
- W3083701858 hasConcept C107872376 @default.
- W3083701858 hasConcept C111368507 @default.
- W3083701858 hasConcept C113196181 @default.
- W3083701858 hasConcept C120665830 @default.
- W3083701858 hasConcept C121332964 @default.
- W3083701858 hasConcept C127313418 @default.
- W3083701858 hasConcept C127413603 @default.
- W3083701858 hasConcept C140676511 @default.
- W3083701858 hasConcept C151730666 @default.
- W3083701858 hasConcept C159985019 @default.
- W3083701858 hasConcept C171250308 @default.
- W3083701858 hasConcept C178790620 @default.
- W3083701858 hasConcept C185592680 @default.
- W3083701858 hasConcept C19067145 @default.
- W3083701858 hasConcept C191897082 @default.
- W3083701858 hasConcept C192562407 @default.
- W3083701858 hasConcept C201370411 @default.
- W3083701858 hasConcept C26771246 @default.
- W3083701858 hasConcept C2776921476 @default.
- W3083701858 hasConcept C2777289219 @default.
- W3083701858 hasConcept C2816523 @default.
- W3083701858 hasConcept C38347018 @default.
- W3083701858 hasConcept C40003534 @default.
- W3083701858 hasConcept C42360764 @default.
- W3083701858 hasConcept C516920438 @default.
- W3083701858 hasConcept C57410435 @default.
- W3083701858 hasConcept C64297162 @default.
- W3083701858 hasConcept C75937256 @default.
- W3083701858 hasConcept C8010536 @default.
- W3083701858 hasConcept C86803240 @default.
- W3083701858 hasConceptScore W3083701858C107872376 @default.
- W3083701858 hasConceptScore W3083701858C111368507 @default.
- W3083701858 hasConceptScore W3083701858C113196181 @default.
- W3083701858 hasConceptScore W3083701858C120665830 @default.
- W3083701858 hasConceptScore W3083701858C121332964 @default.