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- W3085709062 abstract "The doping technologies and doping profiling metrologies are facing huge challenges for nonplanar or 3-D devices and structures. Ambient-controlled scanning spreading resistance microscopy (AC-SSRM) has been developed and well established for 2-D cross-sectional doping profiling measurements on dynamic random access memory (DRAM) access devices. Good correlations between 2-D doping profiling measurements and device electrical performance have been demonstrated. Thanks to AC-SSRM 2-D cross-sectional doping profiling measurements, plasma doping (PLAD) process has been demonstrated beneficial on nonplanar or 3-D device manufacturing." @default.
- W3085709062 created "2020-09-21" @default.
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- W3085709062 date "2020-11-01" @default.
- W3085709062 modified "2023-09-25" @default.
- W3085709062 title "AC-SSRM 2-D Cross-Sectional Doping Profiling for DRAM Access Devices Contact Implants" @default.
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- W3085709062 doi "https://doi.org/10.1109/ted.2020.3020525" @default.
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