Matches in SemOpenAlex for { <https://semopenalex.org/work/W3086280807> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W3086280807 abstract "3D Manifolded embedded Micro-Coolers (3DMMC) devices are becoming increasingly attractive and thereby, sought after active cooling solutions for high power density electronic components and devices. 3D-MMCs have shown the potential to effectively cool extreme levels of heat flux, characteristic of high- power density electronics and microprocessors. Despite numerous studies that have experimentally demonstrated promising performance of small area (25 mm2) micro-coolers, the challenges associated with fabrication of large area (>500 mm2) have not been adequately discussed or documented. This study discusses in details, a well validated, repeatable and reliable process flow for making 3D-MMC devices of sizes ranging from 10 mm2 to 1000 mm2 hotspot area via Silicon wafer microprocessing. Specifically, this study delves deep into the high aspect ratio (>10) anisotropic Silicon etching that is characteristic of such microfluidic devices. Additionally, we have provided insight into process development in Deep Reactive Ion Etching (DRIE) by discussing several issues that are frequently encountered during this deep Si etching step, namely, formation of black Si by photoresist micro-masking, high surface roughness resulting from deep etching and etch rate drop off. We have demonstrated the importance of tweaking etching and passivation cycle times during etching, by showing that merely 10% change in cycle times can eliminate these problems completely - this information is widely valuable to the Silicon microfabrication community. This study aims to document and disseminate a reliable high aspect ratio deep Si etching recipe that can be used to fabricate high performance large area microcooler devices, and will hopefully act as a starting point for fabrication efforts and new recipe development." @default.
- W3086280807 created "2020-09-21" @default.
- W3086280807 creator A5014762439 @default.
- W3086280807 creator A5017971510 @default.
- W3086280807 creator A5021435494 @default.
- W3086280807 creator A5044958007 @default.
- W3086280807 creator A5065315323 @default.
- W3086280807 creator A5068961665 @default.
- W3086280807 creator A5070890191 @default.
- W3086280807 creator A5081758173 @default.
- W3086280807 date "2020-07-01" @default.
- W3086280807 modified "2023-10-17" @default.
- W3086280807 title "Microfabrication Challenges for Silicon-based Large Area (>500 mm2) 3D-manifolded Embedded Microcooler Devices for High Heat Flux Removal" @default.
- W3086280807 cites W1968701219 @default.
- W3086280807 cites W1983906266 @default.
- W3086280807 cites W1997913942 @default.
- W3086280807 cites W2007489405 @default.
- W3086280807 cites W2095097485 @default.
- W3086280807 cites W2153779113 @default.
- W3086280807 cites W2160557247 @default.
- W3086280807 cites W2487926637 @default.
- W3086280807 cites W2496902375 @default.
- W3086280807 cites W2501216460 @default.
- W3086280807 cites W2743954646 @default.
- W3086280807 cites W2785400123 @default.
- W3086280807 cites W2805815957 @default.
- W3086280807 cites W2901693299 @default.
- W3086280807 doi "https://doi.org/10.1109/itherm45881.2020.9190541" @default.
- W3086280807 hasPublicationYear "2020" @default.
- W3086280807 type Work @default.
- W3086280807 sameAs 3086280807 @default.
- W3086280807 citedByCount "2" @default.
- W3086280807 countsByYear W30862808072022 @default.
- W3086280807 crossrefType "proceedings-article" @default.
- W3086280807 hasAuthorship W3086280807A5014762439 @default.
- W3086280807 hasAuthorship W3086280807A5017971510 @default.
- W3086280807 hasAuthorship W3086280807A5021435494 @default.
- W3086280807 hasAuthorship W3086280807A5044958007 @default.
- W3086280807 hasAuthorship W3086280807A5065315323 @default.
- W3086280807 hasAuthorship W3086280807A5068961665 @default.
- W3086280807 hasAuthorship W3086280807A5070890191 @default.
- W3086280807 hasAuthorship W3086280807A5081758173 @default.
- W3086280807 hasConcept C100460472 @default.
- W3086280807 hasConcept C124634506 @default.
- W3086280807 hasConcept C130472188 @default.
- W3086280807 hasConcept C136525101 @default.
- W3086280807 hasConcept C142724271 @default.
- W3086280807 hasConcept C160671074 @default.
- W3086280807 hasConcept C171250308 @default.
- W3086280807 hasConcept C192562407 @default.
- W3086280807 hasConcept C204787440 @default.
- W3086280807 hasConcept C2778166601 @default.
- W3086280807 hasConcept C2779227376 @default.
- W3086280807 hasConcept C33574316 @default.
- W3086280807 hasConcept C49040817 @default.
- W3086280807 hasConcept C527607 @default.
- W3086280807 hasConcept C544956773 @default.
- W3086280807 hasConcept C71924100 @default.
- W3086280807 hasConceptScore W3086280807C100460472 @default.
- W3086280807 hasConceptScore W3086280807C124634506 @default.
- W3086280807 hasConceptScore W3086280807C130472188 @default.
- W3086280807 hasConceptScore W3086280807C136525101 @default.
- W3086280807 hasConceptScore W3086280807C142724271 @default.
- W3086280807 hasConceptScore W3086280807C160671074 @default.
- W3086280807 hasConceptScore W3086280807C171250308 @default.
- W3086280807 hasConceptScore W3086280807C192562407 @default.
- W3086280807 hasConceptScore W3086280807C204787440 @default.
- W3086280807 hasConceptScore W3086280807C2778166601 @default.
- W3086280807 hasConceptScore W3086280807C2779227376 @default.
- W3086280807 hasConceptScore W3086280807C33574316 @default.
- W3086280807 hasConceptScore W3086280807C49040817 @default.
- W3086280807 hasConceptScore W3086280807C527607 @default.
- W3086280807 hasConceptScore W3086280807C544956773 @default.
- W3086280807 hasConceptScore W3086280807C71924100 @default.
- W3086280807 hasLocation W30862808071 @default.
- W3086280807 hasOpenAccess W3086280807 @default.
- W3086280807 hasPrimaryLocation W30862808071 @default.
- W3086280807 hasRelatedWork W12381324 @default.
- W3086280807 hasRelatedWork W12490543 @default.
- W3086280807 hasRelatedWork W15299909 @default.
- W3086280807 hasRelatedWork W15876909 @default.
- W3086280807 hasRelatedWork W36146442 @default.
- W3086280807 hasRelatedWork W37138511 @default.
- W3086280807 hasRelatedWork W37398761 @default.
- W3086280807 hasRelatedWork W4141922 @default.
- W3086280807 hasRelatedWork W45216076 @default.
- W3086280807 hasRelatedWork W6325652 @default.
- W3086280807 isParatext "false" @default.
- W3086280807 isRetracted "false" @default.
- W3086280807 magId "3086280807" @default.
- W3086280807 workType "article" @default.