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- W3086872589 abstract "This paper describes the design and fabrication of high-current multijunction thermal converters (HC-MJTCs) on Si substrates using wet chemical etching. The fabricated devices consist of a Si heat-reservoir under a heater. The low-resistive Cu 80 Au 20 alloy heater is thermally isolated from the rest of the chip by a nitride-oxide membrane, which is produced by utilizing a simple potassium hydroxide (KOH) wet chemical etching. Measurements show that the devices exceed their rated current level up to 2 A without failure. Furthermore, the ac-dc differences of the devices were below $13 mu mathrm{A}/mathrm{A}$ over the input current levels at frequencies above 400 Hz, though large negative ac-dc differences were present below 100 Hz." @default.
- W3086872589 created "2020-09-21" @default.
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- W3086872589 date "2020-08-01" @default.
- W3086872589 modified "2023-09-24" @default.
- W3086872589 title "Fabrication of High-Current Multijunction Thermal Current Converters on Silicon Substrates by Wet Chemical Etching" @default.
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- W3086872589 doi "https://doi.org/10.1109/cpem49742.2020.9191874" @default.
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