Matches in SemOpenAlex for { <https://semopenalex.org/work/W3087242086> ?p ?o ?g. }
- W3087242086 abstract "Wake‐up effect is still an obstacle in the commercialization of hafnia‐based ferroelectric thin films. Herein, the effect of defects, controlled by ozone dosage, on the field cycling behavior of the atomic layer deposited Hf 0.5 Zr 0.5 O 2 (HZO) films is investigated. A nearly wake‐up free device is achieved after reduction of carbon contamination and oxygen defects by increasing the ozone dosage. The sample which is grown at 30 s ozone pulse duration shows about 97% of the woken‐up P r at the pristine state whereas that grown below 5 s ozone pulse time shows a pinched hysteresis loop, that underwent a large wake‐up effect. This behavior is attributed to the increase in oxygen vacancy and carbon concentration in the films deposited at insufficient O 3 dosage, which is confirmed by X‐ray photoelectron spectroscopy (XPS). The X‐ray diffraction (XRD) scan shows that the increase in ozone pulse time yields the reduction of tetragonal phase; therefore, the dielectric constant reduces. The I – V measurements reveal the increase in current density as the ozone dosage decreases, which might be due to the generation of oxygen vacancies in the deposited film. Finally, the dynamics of wake‐up effect is investigated, and it appears to be explained well by the Johnson–Mehl–Avrami–Kolmogoroff model, which is based on structural phase transformation." @default.
- W3087242086 created "2020-09-25" @default.
- W3087242086 creator A5059294163 @default.
- W3087242086 creator A5063614002 @default.
- W3087242086 creator A5078472646 @default.
- W3087242086 date "2020-09-28" @default.
- W3087242086 modified "2023-10-15" @default.
- W3087242086 title "Defect Engineering to Achieve Wake‐up Free HfO <sub>2</sub> ‐Based Ferroelectrics" @default.
- W3087242086 cites W1129967587 @default.
- W3087242086 cites W1625170149 @default.
- W3087242086 cites W1636395677 @default.
- W3087242086 cites W2023413597 @default.
- W3087242086 cites W2024600253 @default.
- W3087242086 cites W2046801014 @default.
- W3087242086 cites W2076638902 @default.
- W3087242086 cites W2099834391 @default.
- W3087242086 cites W2121058624 @default.
- W3087242086 cites W2123808367 @default.
- W3087242086 cites W2143137448 @default.
- W3087242086 cites W2154831337 @default.
- W3087242086 cites W2158012362 @default.
- W3087242086 cites W2295632285 @default.
- W3087242086 cites W2323198919 @default.
- W3087242086 cites W2345091875 @default.
- W3087242086 cites W2346962696 @default.
- W3087242086 cites W2483506684 @default.
- W3087242086 cites W2578813091 @default.
- W3087242086 cites W2585709198 @default.
- W3087242086 cites W2753603922 @default.
- W3087242086 cites W2772225823 @default.
- W3087242086 cites W2788888243 @default.
- W3087242086 cites W2808007855 @default.
- W3087242086 cites W2853985035 @default.
- W3087242086 cites W2904668006 @default.
- W3087242086 cites W2907225533 @default.
- W3087242086 cites W2969157225 @default.
- W3087242086 cites W2969602497 @default.
- W3087242086 cites W3013521000 @default.
- W3087242086 cites W3014354503 @default.
- W3087242086 cites W3098844363 @default.
- W3087242086 cites W3105213179 @default.
- W3087242086 doi "https://doi.org/10.1002/adem.202000791" @default.
- W3087242086 hasPublicationYear "2020" @default.
- W3087242086 type Work @default.
- W3087242086 sameAs 3087242086 @default.
- W3087242086 citedByCount "49" @default.
- W3087242086 countsByYear W30872420862020 @default.
- W3087242086 countsByYear W30872420862021 @default.
- W3087242086 countsByYear W30872420862022 @default.
- W3087242086 countsByYear W30872420862023 @default.
- W3087242086 crossrefType "journal-article" @default.
- W3087242086 hasAuthorship W3087242086A5059294163 @default.
- W3087242086 hasAuthorship W3087242086A5063614002 @default.
- W3087242086 hasAuthorship W3087242086A5078472646 @default.
- W3087242086 hasConcept C113196181 @default.
- W3087242086 hasConcept C121332964 @default.
- W3087242086 hasConcept C123609680 @default.
- W3087242086 hasConcept C133386390 @default.
- W3087242086 hasConcept C134132462 @default.
- W3087242086 hasConcept C159985019 @default.
- W3087242086 hasConcept C170751736 @default.
- W3087242086 hasConcept C175708663 @default.
- W3087242086 hasConcept C178790620 @default.
- W3087242086 hasConcept C185592680 @default.
- W3087242086 hasConcept C192562407 @default.
- W3087242086 hasConcept C2776778127 @default.
- W3087242086 hasConcept C43617362 @default.
- W3087242086 hasConcept C44280652 @default.
- W3087242086 hasConcept C46141821 @default.
- W3087242086 hasConcept C49040817 @default.
- W3087242086 hasConcept C508106653 @default.
- W3087242086 hasConcept C540031477 @default.
- W3087242086 hasConcept C79090758 @default.
- W3087242086 hasConceptScore W3087242086C113196181 @default.
- W3087242086 hasConceptScore W3087242086C121332964 @default.
- W3087242086 hasConceptScore W3087242086C123609680 @default.
- W3087242086 hasConceptScore W3087242086C133386390 @default.
- W3087242086 hasConceptScore W3087242086C134132462 @default.
- W3087242086 hasConceptScore W3087242086C159985019 @default.
- W3087242086 hasConceptScore W3087242086C170751736 @default.
- W3087242086 hasConceptScore W3087242086C175708663 @default.
- W3087242086 hasConceptScore W3087242086C178790620 @default.
- W3087242086 hasConceptScore W3087242086C185592680 @default.
- W3087242086 hasConceptScore W3087242086C192562407 @default.
- W3087242086 hasConceptScore W3087242086C2776778127 @default.
- W3087242086 hasConceptScore W3087242086C43617362 @default.
- W3087242086 hasConceptScore W3087242086C44280652 @default.
- W3087242086 hasConceptScore W3087242086C46141821 @default.
- W3087242086 hasConceptScore W3087242086C49040817 @default.
- W3087242086 hasConceptScore W3087242086C508106653 @default.
- W3087242086 hasConceptScore W3087242086C540031477 @default.
- W3087242086 hasConceptScore W3087242086C79090758 @default.
- W3087242086 hasFunder F4320322120 @default.
- W3087242086 hasIssue "1" @default.
- W3087242086 hasLocation W30872420861 @default.
- W3087242086 hasOpenAccess W3087242086 @default.
- W3087242086 hasPrimaryLocation W30872420861 @default.
- W3087242086 hasRelatedWork W1971091260 @default.
- W3087242086 hasRelatedWork W1981729695 @default.
- W3087242086 hasRelatedWork W2023413597 @default.