Matches in SemOpenAlex for { <https://semopenalex.org/work/W3088392286> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W3088392286 abstract "Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength laser pulses for shooting and debris mitigation by magnetic field have been applied. We have developed first practical source for HVM; “GL200E” 1) in 2014. Then it is demonstrated which high average power CO2 laser more than 20kW at output power in cooperation with Mitsubishi Electric2). Pilot#1 is up running and it demonstrates HVM capability; EUV power recorded at 111W on average (117W in burst stabilized, 95% duty) with 5% conversion efficiency for 22 hour operation in October 20163). Availability is achievable at 89% (2 weeks average), also superior magnetic mitigation has demonstrated promising mirror degradation rate (= 0.5%/Gp) at 100W or higher power operation with dummy mirror test. We have demonstrated >300W operation data (short-term) and actual collector mirror reflectivity degradation rate is less than 0.15%/Gp by using real collector mirror around 125W (at I/F clean) in burst power > 10 Billion pulses operation4). Also we will update latest challenges for >250W average long-term operation with collector mirror at the conference.REFERENCE1) Hakaru Mizoguchi, et. al.: “Sub-hundred Watt operation demonstration of HVM LPP-EUV source”, Proc. SPIE 9048, (2014) 2) Yoichi Tanino et.al.:” A Driver CO2 Laser Using Transverse-flow CO2 Laser Amplifiers”, EUV Symposium 2013, ( Oct.6-10.2013, Toyama)3) Hakaru Mizoguchi, et al: ” High Power HVM LPP-EUV Source with Long Collector Mirror Lifetime”, EUVL Workshop 2017, (Berkley, 12-15, June, 2017) 4) Hakaru Mizoguchi et al.:” Challenge of >300W high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM”, Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI (2019) [11323-28]" @default.
- W3088392286 created "2020-10-01" @default.
- W3088392286 creator A5000535326 @default.
- W3088392286 creator A5000968339 @default.
- W3088392286 creator A5003596492 @default.
- W3088392286 creator A5004010257 @default.
- W3088392286 creator A5027481082 @default.
- W3088392286 creator A5028354285 @default.
- W3088392286 creator A5035063671 @default.
- W3088392286 creator A5036441599 @default.
- W3088392286 creator A5039909065 @default.
- W3088392286 creator A5043330325 @default.
- W3088392286 creator A5043841738 @default.
- W3088392286 creator A5069267019 @default.
- W3088392286 creator A5071829339 @default.
- W3088392286 creator A5072114603 @default.
- W3088392286 creator A5079818777 @default.
- W3088392286 creator A5079852190 @default.
- W3088392286 creator A5081242026 @default.
- W3088392286 creator A5086027716 @default.
- W3088392286 creator A5089651544 @default.
- W3088392286 date "2020-09-20" @default.
- W3088392286 modified "2023-09-26" @default.
- W3088392286 title "Update of >300W high power LPP-EUV source challenge for semiconductor HVM" @default.
- W3088392286 cites W1966617197 @default.
- W3088392286 doi "https://doi.org/10.1117/12.2574707" @default.
- W3088392286 hasPublicationYear "2020" @default.
- W3088392286 type Work @default.
- W3088392286 sameAs 3088392286 @default.
- W3088392286 citedByCount "0" @default.
- W3088392286 crossrefType "proceedings-article" @default.
- W3088392286 hasAuthorship W3088392286A5000535326 @default.
- W3088392286 hasAuthorship W3088392286A5000968339 @default.
- W3088392286 hasAuthorship W3088392286A5003596492 @default.
- W3088392286 hasAuthorship W3088392286A5004010257 @default.
- W3088392286 hasAuthorship W3088392286A5027481082 @default.
- W3088392286 hasAuthorship W3088392286A5028354285 @default.
- W3088392286 hasAuthorship W3088392286A5035063671 @default.
- W3088392286 hasAuthorship W3088392286A5036441599 @default.
- W3088392286 hasAuthorship W3088392286A5039909065 @default.
- W3088392286 hasAuthorship W3088392286A5043330325 @default.
- W3088392286 hasAuthorship W3088392286A5043841738 @default.
- W3088392286 hasAuthorship W3088392286A5069267019 @default.
- W3088392286 hasAuthorship W3088392286A5071829339 @default.
- W3088392286 hasAuthorship W3088392286A5072114603 @default.
- W3088392286 hasAuthorship W3088392286A5079818777 @default.
- W3088392286 hasAuthorship W3088392286A5079852190 @default.
- W3088392286 hasAuthorship W3088392286A5081242026 @default.
- W3088392286 hasAuthorship W3088392286A5086027716 @default.
- W3088392286 hasAuthorship W3088392286A5089651544 @default.
- W3088392286 hasConcept C119599485 @default.
- W3088392286 hasConcept C120665830 @default.
- W3088392286 hasConcept C121332964 @default.
- W3088392286 hasConcept C127413603 @default.
- W3088392286 hasConcept C146024833 @default.
- W3088392286 hasConcept C162996421 @default.
- W3088392286 hasConcept C163258240 @default.
- W3088392286 hasConcept C192562407 @default.
- W3088392286 hasConcept C199822604 @default.
- W3088392286 hasConcept C200649887 @default.
- W3088392286 hasConcept C49040817 @default.
- W3088392286 hasConcept C520434653 @default.
- W3088392286 hasConcept C62520636 @default.
- W3088392286 hasConceptScore W3088392286C119599485 @default.
- W3088392286 hasConceptScore W3088392286C120665830 @default.
- W3088392286 hasConceptScore W3088392286C121332964 @default.
- W3088392286 hasConceptScore W3088392286C127413603 @default.
- W3088392286 hasConceptScore W3088392286C146024833 @default.
- W3088392286 hasConceptScore W3088392286C162996421 @default.
- W3088392286 hasConceptScore W3088392286C163258240 @default.
- W3088392286 hasConceptScore W3088392286C192562407 @default.
- W3088392286 hasConceptScore W3088392286C199822604 @default.
- W3088392286 hasConceptScore W3088392286C200649887 @default.
- W3088392286 hasConceptScore W3088392286C49040817 @default.
- W3088392286 hasConceptScore W3088392286C520434653 @default.
- W3088392286 hasConceptScore W3088392286C62520636 @default.
- W3088392286 hasLocation W30883922861 @default.
- W3088392286 hasOpenAccess W3088392286 @default.
- W3088392286 hasPrimaryLocation W30883922861 @default.
- W3088392286 hasRelatedWork W11281200 @default.
- W3088392286 hasRelatedWork W11536948 @default.
- W3088392286 hasRelatedWork W1166483 @default.
- W3088392286 hasRelatedWork W12467566 @default.
- W3088392286 hasRelatedWork W14281840 @default.
- W3088392286 hasRelatedWork W15248379 @default.
- W3088392286 hasRelatedWork W16717396 @default.
- W3088392286 hasRelatedWork W3827924 @default.
- W3088392286 hasRelatedWork W4839647 @default.
- W3088392286 hasRelatedWork W8746176 @default.
- W3088392286 isParatext "false" @default.
- W3088392286 isRetracted "false" @default.
- W3088392286 magId "3088392286" @default.
- W3088392286 workType "article" @default.