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- W3088471487 abstract "Virtual source size of an electron source is key for the high spatial resolution of electron microscopy. A small source size has been achieved by using small crystal facets; however, the emission current is reduced when the facet area is decreased. To achieve a small source size while maintaining a large emission current, we conceived of the novel idea of a facetless electron source with a curved emission surface. Computational simulations of electron trajectories revealed that the virtual source, which is the spot at which back-projected trajectories are focused, of a facetless source was smaller than that of the conventional source with a facet and that the brightness of the facetless source was approximately four times larger. To achieve electron emission from a curved surface, we fabricated a facetless source by coating amorphous carbon on a metallic electron source. Electron emission from the coated surface showed a homogeneous pattern, which is clear evidence for emission from the curved surface of the facetless source." @default.
- W3088471487 created "2020-10-01" @default.
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- W3088471487 date "2020-07-01" @default.
- W3088471487 modified "2023-09-25" @default.
- W3088471487 title "Facetless electron emission source for reducing virtual source size" @default.
- W3088471487 cites W1530306380 @default.
- W3088471487 doi "https://doi.org/10.1109/ivnc49440.2020.9203311" @default.
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