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- W3088962679 abstract "Thermal silicidation characteristics of Ni/Si1-xGex with various Ge content was studied under different annealing temperatures in the range of 225oC ~ 400oC in N2 ambient. TiN capped Ni/Si1-xGex/Si/SiO2/Si wafers with x values in the range of 0.15 and 0.30 in 0.05 intervals were used. Thermal silicide formation was performed in a stacked hotplate-based annealing system designed for 300mm wafers. For silicide characterization, measurements of spectral reflectance, sheet resistance, Raman spectra as well as X-ray diffraction curves were performed to investigate optical properties, electrical properties, crystallographic phases and reaction mechanisms. Multiwavelingth micro-Raman spectroscopy was found to be very promising as a non-contact, in-line silicidation process monitoring technique. We have studied effects of Ge content and annealing temperature dependence on the electrical and crystallographic properties of the resulting thermal silicides (nickel germanosilicides)." @default.
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- W3088962679 date "2020-09-23" @default.
- W3088962679 modified "2023-10-16" @default.
- W3088962679 title "Thermal Silicidation of Ni/SiGe and Characterization of Resulting Silicide Films Using Raman Spectroscopy and X-ray Diffraction" @default.
- W3088962679 doi "https://doi.org/10.1149/09805.0457ecst" @default.
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