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- W3089080303 abstract "Laser polymerization has emerged as a direct writing technique allowing the fabrication of complex 3D structures with microscale resolution. The technique provides rapid prototyping capabilities for a broad range of applications, but to meet the growing interest in 3D nanoscale structures the resolution limits need to be pushed beyond the 100 nm benchmark, which is challenging in practical implementations. As a possible path towards this goal, a post processing of laser polymerized structures is presented. Precise control of the cross-sectional dimensions of structural elements as well as tuning of an overall size of the entire 3D structure was achieved by combining isotropic plasma etching and pyrolysis. The smallest obtainable feature sizes are mostly limited by the mechanical properties of the polymerized resist and the geometry of 3D structure. Thus the demonstrated post processing steps open new avenues to explore free form 3D structures at the nanoscale." @default.
- W3089080303 created "2020-10-01" @default.
- W3089080303 creator A5005585317 @default.
- W3089080303 creator A5017488082 @default.
- W3089080303 creator A5019076769 @default.
- W3089080303 creator A5020632738 @default.
- W3089080303 creator A5023736823 @default.
- W3089080303 creator A5026911336 @default.
- W3089080303 date "2018-07-23" @default.
- W3089080303 modified "2023-10-17" @default.
- W3089080303 title "Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions" @default.
- W3089080303 cites W586102426 @default.
- W3089080303 doi "https://doi.org/10.48550/arxiv.1807.08462" @default.
- W3089080303 hasPublicationYear "2018" @default.
- W3089080303 type Work @default.
- W3089080303 sameAs 3089080303 @default.
- W3089080303 citedByCount "0" @default.
- W3089080303 crossrefType "posted-content" @default.
- W3089080303 hasAuthorship W3089080303A5005585317 @default.
- W3089080303 hasAuthorship W3089080303A5017488082 @default.
- W3089080303 hasAuthorship W3089080303A5019076769 @default.
- W3089080303 hasAuthorship W3089080303A5020632738 @default.
- W3089080303 hasAuthorship W3089080303A5023736823 @default.
- W3089080303 hasAuthorship W3089080303A5026911336 @default.
- W3089080303 hasBestOaLocation W30890803031 @default.
- W3089080303 hasConcept C120665830 @default.
- W3089080303 hasConcept C121332964 @default.
- W3089080303 hasConcept C136525101 @default.
- W3089080303 hasConcept C142724271 @default.
- W3089080303 hasConcept C145420912 @default.
- W3089080303 hasConcept C159985019 @default.
- W3089080303 hasConcept C171250308 @default.
- W3089080303 hasConcept C179428855 @default.
- W3089080303 hasConcept C192562407 @default.
- W3089080303 hasConcept C204223013 @default.
- W3089080303 hasConcept C204787440 @default.
- W3089080303 hasConcept C2779227376 @default.
- W3089080303 hasConcept C2780395129 @default.
- W3089080303 hasConcept C33923547 @default.
- W3089080303 hasConcept C41008148 @default.
- W3089080303 hasConcept C44228677 @default.
- W3089080303 hasConcept C45206210 @default.
- W3089080303 hasConcept C49040817 @default.
- W3089080303 hasConcept C520434653 @default.
- W3089080303 hasConcept C521977710 @default.
- W3089080303 hasConcept C524769229 @default.
- W3089080303 hasConcept C53524968 @default.
- W3089080303 hasConcept C71924100 @default.
- W3089080303 hasConceptScore W3089080303C120665830 @default.
- W3089080303 hasConceptScore W3089080303C121332964 @default.
- W3089080303 hasConceptScore W3089080303C136525101 @default.
- W3089080303 hasConceptScore W3089080303C142724271 @default.
- W3089080303 hasConceptScore W3089080303C145420912 @default.
- W3089080303 hasConceptScore W3089080303C159985019 @default.
- W3089080303 hasConceptScore W3089080303C171250308 @default.
- W3089080303 hasConceptScore W3089080303C179428855 @default.
- W3089080303 hasConceptScore W3089080303C192562407 @default.
- W3089080303 hasConceptScore W3089080303C204223013 @default.
- W3089080303 hasConceptScore W3089080303C204787440 @default.
- W3089080303 hasConceptScore W3089080303C2779227376 @default.
- W3089080303 hasConceptScore W3089080303C2780395129 @default.
- W3089080303 hasConceptScore W3089080303C33923547 @default.
- W3089080303 hasConceptScore W3089080303C41008148 @default.
- W3089080303 hasConceptScore W3089080303C44228677 @default.
- W3089080303 hasConceptScore W3089080303C45206210 @default.
- W3089080303 hasConceptScore W3089080303C49040817 @default.
- W3089080303 hasConceptScore W3089080303C520434653 @default.
- W3089080303 hasConceptScore W3089080303C521977710 @default.
- W3089080303 hasConceptScore W3089080303C524769229 @default.
- W3089080303 hasConceptScore W3089080303C53524968 @default.
- W3089080303 hasConceptScore W3089080303C71924100 @default.
- W3089080303 hasLocation W30890803031 @default.
- W3089080303 hasLocation W30890803032 @default.
- W3089080303 hasOpenAccess W3089080303 @default.
- W3089080303 hasPrimaryLocation W30890803031 @default.
- W3089080303 hasRelatedWork W1980261913 @default.
- W3089080303 hasRelatedWork W2062151620 @default.
- W3089080303 hasRelatedWork W2336405346 @default.
- W3089080303 hasRelatedWork W2478487396 @default.
- W3089080303 hasRelatedWork W2518797246 @default.
- W3089080303 hasRelatedWork W2792297505 @default.
- W3089080303 hasRelatedWork W2914219921 @default.
- W3089080303 hasRelatedWork W4211104017 @default.
- W3089080303 hasRelatedWork W4223942653 @default.
- W3089080303 hasRelatedWork W4307818291 @default.
- W3089080303 isParatext "false" @default.
- W3089080303 isRetracted "false" @default.
- W3089080303 magId "3089080303" @default.
- W3089080303 workType "article" @default.