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Matches in SemOpenAlex for { <https://semopenalex.org/work/W3089568996> ?p ?o ?g. }

• W3089568996 endingPage "1509" @default.
• W3089568996 startingPage "1504" @default.
• W3089568996 abstract "Zinc oxide (ZnO) is a metal oxide semiconductor of interest for a wide range of electronic and optoelectronic device applications. Many devices require etching of ZnO structures and there have been many investigations of ZnO wet-etching processes. However, most reported etches have problems with reproducibility and especially control of vertical and lateral (or undercut) etching uniformity. In this work, we report new buffer solutions that provide controlled vertical and lateral etching of ZnO. We compare the ZnO etch characteristics of buffer etchants to a previously reported ammonium chloride etch. Using buffer etchants of suitable composition we find reaction-rate-limited, uniform, reproducible etching, and similar vertical and lateral etch rates." @default.
• W3089568996 created "2020-10-08" @default.
• W3089568996 creator A5009900380 @default.
• W3089568996 creator A5028095303 @default.
• W3089568996 creator A5034793442 @default.
• W3089568996 creator A5054272454 @default.
• W3089568996 creator A5059843180 @default.
• W3089568996 date "2020-12-01" @default.
• W3089568996 modified "2023-10-16" @default.
• W3089568996 title "Precision Wet Etching of ZnO Using Buffer Solutions" @default.
• W3089568996 cites W161020096 @default.
• W3089568996 cites W2038249164 @default.
• W3089568996 cites W2076608431 @default.
• W3089568996 cites W2080376887 @default.
• W3089568996 cites W2109515598 @default.
• W3089568996 cites W2109777297 @default.
• W3089568996 cites W2111826330 @default.
• W3089568996 cites W2111905836 @default.
• W3089568996 cites W2117819814 @default.
• W3089568996 cites W2120854685 @default.
• W3089568996 cites W2135374697 @default.
• W3089568996 cites W2138363484 @default.
• W3089568996 cites W2140653055 @default.
• W3089568996 cites W2151602074 @default.
• W3089568996 cites W2330817459 @default.
• W3089568996 cites W2334596119 @default.
• W3089568996 cites W2942102366 @default.
• W3089568996 doi "https://doi.org/10.1109/jmems.2020.3025744" @default.
• W3089568996 hasPublicationYear "2020" @default.
• W3089568996 type Work @default.
• W3089568996 sameAs 3089568996 @default.
• W3089568996 citedByCount "4" @default.
• W3089568996 countsByYear W30895689962021 @default.
• W3089568996 countsByYear W30895689962022 @default.
• W3089568996 crossrefType "journal-article" @default.
• W3089568996 hasAuthorship W3089568996A5009900380 @default.
• W3089568996 hasAuthorship W3089568996A5028095303 @default.
• W3089568996 hasAuthorship W3089568996A5034793442 @default.
• W3089568996 hasAuthorship W3089568996A5054272454 @default.
• W3089568996 hasAuthorship W3089568996A5059843180 @default.
• W3089568996 hasBestOaLocation W30895689961 @default.
• W3089568996 hasConcept C100460472 @default.
• W3089568996 hasConcept C1291036 @default.
• W3089568996 hasConcept C145018004 @default.
• W3089568996 hasConcept C159985019 @default.
• W3089568996 hasConcept C171250308 @default.
• W3089568996 hasConcept C178790620 @default.
• W3089568996 hasConcept C185592680 @default.
• W3089568996 hasConcept C191897082 @default.
• W3089568996 hasConcept C192562407 @default.
• W3089568996 hasConcept C2779227376 @default.
• W3089568996 hasConcept C2779292183 @default.
• W3089568996 hasConcept C2779660836 @default.
• W3089568996 hasConcept C2779851234 @default.
• W3089568996 hasConcept C33220542 @default.
• W3089568996 hasConcept C41008148 @default.
• W3089568996 hasConcept C43617362 @default.
• W3089568996 hasConcept C49040817 @default.
• W3089568996 hasConcept C535196362 @default.
• W3089568996 hasConcept C76155785 @default.
• W3089568996 hasConcept C9893847 @default.
• W3089568996 hasConceptScore W3089568996C100460472 @default.
• W3089568996 hasConceptScore W3089568996C1291036 @default.
• W3089568996 hasConceptScore W3089568996C145018004 @default.
• W3089568996 hasConceptScore W3089568996C159985019 @default.
• W3089568996 hasConceptScore W3089568996C171250308 @default.
• W3089568996 hasConceptScore W3089568996C178790620 @default.
• W3089568996 hasConceptScore W3089568996C185592680 @default.
• W3089568996 hasConceptScore W3089568996C191897082 @default.
• W3089568996 hasConceptScore W3089568996C192562407 @default.
• W3089568996 hasConceptScore W3089568996C2779227376 @default.
• W3089568996 hasConceptScore W3089568996C2779292183 @default.
• W3089568996 hasConceptScore W3089568996C2779660836 @default.
• W3089568996 hasConceptScore W3089568996C2779851234 @default.
• W3089568996 hasConceptScore W3089568996C33220542 @default.
• W3089568996 hasConceptScore W3089568996C41008148 @default.
• W3089568996 hasConceptScore W3089568996C43617362 @default.
• W3089568996 hasConceptScore W3089568996C49040817 @default.
• W3089568996 hasConceptScore W3089568996C535196362 @default.
• W3089568996 hasConceptScore W3089568996C76155785 @default.
• W3089568996 hasConceptScore W3089568996C9893847 @default.
• W3089568996 hasFunder F4320306076 @default.
• W3089568996 hasIssue "6" @default.
• W3089568996 hasLocation W30895689961 @default.
• W3089568996 hasOpenAccess W3089568996 @default.
• W3089568996 hasPrimaryLocation W30895689961 @default.
• W3089568996 hasRelatedWork W1977768702 @default.
• W3089568996 hasRelatedWork W1980236984 @default.
• W3089568996 hasRelatedWork W1984469697 @default.
• W3089568996 hasRelatedWork W1993620123 @default.
• W3089568996 hasRelatedWork W2168306150 @default.
• W3089568996 hasRelatedWork W2376678868 @default.
• W3089568996 hasRelatedWork W2381640903 @default.
• W3089568996 hasRelatedWork W3089568996 @default.
• W3089568996 hasRelatedWork W4284891372 @default.
• W3089568996 hasRelatedWork W836216862 @default.
• W3089568996 hasVolume "29" @default.
• W3089568996 isParatext "false" @default.

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