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- W3089668734 abstract "In EUV lithography, radiation chemistry is largely different from DUV. Engineers have explored self-assembled monolayers (SAM) in the context of lithography and some of their properties could be utilized in EUV. We study SAMs and their interaction with substrates using quantum chemistry.Interface chemistry between resists and underlayers is playing an increasingly important role in EUV. it is conceivable that the resist molecules near the interface are susceptible to activation by electrons originated in the substrate. For their monolayer nature and spontaneous ordering, SAMs can be used for engineering interface properties in a predictable manner.Understanding the physical and chemical processes at the interface in the presence of SAMs would be vital for better modelling their effects on imaging.To address these questions, quantum chemistry is used to understand the properties of SAMs, such as their packing order. The surface electronic structure is also studied to elucidate the physical properties at the interface that could impact EUV dose." @default.
- W3089668734 created "2020-10-08" @default.
- W3089668734 creator A5003343236 @default.
- W3089668734 creator A5024453016 @default.
- W3089668734 creator A5036392009 @default.
- W3089668734 creator A5066365150 @default.
- W3089668734 creator A5086850276 @default.
- W3089668734 date "2020-09-20" @default.
- W3089668734 modified "2023-10-18" @default.
- W3089668734 title "Engineering resist-substrate interface: a quantum chemistry study of self-assembled monolayers" @default.
- W3089668734 doi "https://doi.org/10.1117/12.2574879" @default.
- W3089668734 hasPublicationYear "2020" @default.
- W3089668734 type Work @default.
- W3089668734 sameAs 3089668734 @default.
- W3089668734 citedByCount "0" @default.
- W3089668734 crossrefType "proceedings-article" @default.
- W3089668734 hasAuthorship W3089668734A5003343236 @default.
- W3089668734 hasAuthorship W3089668734A5024453016 @default.
- W3089668734 hasAuthorship W3089668734A5036392009 @default.
- W3089668734 hasAuthorship W3089668734A5066365150 @default.
- W3089668734 hasAuthorship W3089668734A5086850276 @default.
- W3089668734 hasConcept C111368507 @default.
- W3089668734 hasConcept C127313418 @default.
- W3089668734 hasConcept C131649739 @default.
- W3089668734 hasConcept C151730666 @default.
- W3089668734 hasConcept C159467904 @default.
- W3089668734 hasConcept C162996421 @default.
- W3089668734 hasConcept C171250308 @default.
- W3089668734 hasConcept C185592680 @default.
- W3089668734 hasConcept C192562407 @default.
- W3089668734 hasConcept C204223013 @default.
- W3089668734 hasConcept C26856880 @default.
- W3089668734 hasConcept C2777289219 @default.
- W3089668734 hasConcept C2779227376 @default.
- W3089668734 hasConcept C2779343474 @default.
- W3089668734 hasConcept C49040817 @default.
- W3089668734 hasConcept C53524968 @default.
- W3089668734 hasConcept C7070889 @default.
- W3089668734 hasConcept C86803240 @default.
- W3089668734 hasConceptScore W3089668734C111368507 @default.
- W3089668734 hasConceptScore W3089668734C127313418 @default.
- W3089668734 hasConceptScore W3089668734C131649739 @default.
- W3089668734 hasConceptScore W3089668734C151730666 @default.
- W3089668734 hasConceptScore W3089668734C159467904 @default.
- W3089668734 hasConceptScore W3089668734C162996421 @default.
- W3089668734 hasConceptScore W3089668734C171250308 @default.
- W3089668734 hasConceptScore W3089668734C185592680 @default.
- W3089668734 hasConceptScore W3089668734C192562407 @default.
- W3089668734 hasConceptScore W3089668734C204223013 @default.
- W3089668734 hasConceptScore W3089668734C26856880 @default.
- W3089668734 hasConceptScore W3089668734C2777289219 @default.
- W3089668734 hasConceptScore W3089668734C2779227376 @default.
- W3089668734 hasConceptScore W3089668734C2779343474 @default.
- W3089668734 hasConceptScore W3089668734C49040817 @default.
- W3089668734 hasConceptScore W3089668734C53524968 @default.
- W3089668734 hasConceptScore W3089668734C7070889 @default.
- W3089668734 hasConceptScore W3089668734C86803240 @default.
- W3089668734 hasLocation W30896687341 @default.
- W3089668734 hasOpenAccess W3089668734 @default.
- W3089668734 hasPrimaryLocation W30896687341 @default.
- W3089668734 hasRelatedWork W10400272 @default.
- W3089668734 hasRelatedWork W11246958 @default.
- W3089668734 hasRelatedWork W1327695 @default.
- W3089668734 hasRelatedWork W13437215 @default.
- W3089668734 hasRelatedWork W14592056 @default.
- W3089668734 hasRelatedWork W14850107 @default.
- W3089668734 hasRelatedWork W15237264 @default.
- W3089668734 hasRelatedWork W18573621 @default.
- W3089668734 hasRelatedWork W27237931 @default.
- W3089668734 hasRelatedWork W7608048 @default.
- W3089668734 isParatext "false" @default.
- W3089668734 isRetracted "false" @default.
- W3089668734 magId "3089668734" @default.
- W3089668734 workType "article" @default.