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- W3089779535 abstract "We describe, a integrated optical MEMS racetrack resonator based force sensor. This sensor works on the change in the refractive index of the optical sensing element. The resonant wavelength of the sensing element is changed under the applied force of the sensor, which can be read out at the drop-port of the IO racetrack resonator. This force sensor provides a wavelength shift obtained is 120 pm per 1µN, Q-factor of 8153." @default.
- W3089779535 created "2020-10-08" @default.
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- W3089779535 date "2020-07-01" @default.
- W3089779535 modified "2023-10-16" @default.
- W3089779535 title "Design and Analysis of MEMS Racetrack Resonators for Force Sensing Applications" @default.
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- W3089779535 doi "https://doi.org/10.1109/conecct50063.2020.9198431" @default.
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