Matches in SemOpenAlex for { <https://semopenalex.org/work/W3090535596> ?p ?o ?g. }
- W3090535596 endingPage "148046" @default.
- W3090535596 startingPage "148046" @default.
- W3090535596 abstract "Synthetic graphene suffers from surface contamination after the removal of transfer polymer. This impacts the chemical and electronic properties at the interface of graphene-metal structures. Hydrogen plasma treatment is promising to effectively clean, dope and pattern graphene. However, it also causes irreversible damage to the graphene lattice or reversible graphene hydrogenation which primarily depends on the flux and energy of plasma radicals/ions. Here, we optimize a downstream Ar/H2 plasma with moderate flux and low energy thermal H radicals to eliminate polymer residues and enhance the charge transfer at the graphene-metal interface. A systematic study is carried out to evaluate the plasma-induced doping and defectivity in ruthenium capped graphene devices. Single layer graphene is found to be n-doped after plasma treatment accompanied by an increase in defect density. Similarly, bilayer graphene (BLG) also undergoes n-doping but does not incur significant plasma-induced damage. Sheet resistance of Ru capped plasma cleaned BLG is found to decrease by 18%. After device fabrication, a final plasma clean reduces the surface roughness of the capping metal, and further improves the electrical conductivity. This study provides a viable basis to effectively clean and dope graphene-metal interface with a fab-compliant plasma technique while preserving the high quality of graphene." @default.
- W3090535596 created "2020-10-08" @default.
- W3090535596 creator A5002813632 @default.
- W3090535596 creator A5020950364 @default.
- W3090535596 creator A5029810556 @default.
- W3090535596 creator A5039627420 @default.
- W3090535596 creator A5041866423 @default.
- W3090535596 creator A5042776013 @default.
- W3090535596 creator A5050022243 @default.
- W3090535596 creator A5053777799 @default.
- W3090535596 creator A5059195637 @default.
- W3090535596 creator A5083194625 @default.
- W3090535596 creator A5088219910 @default.
- W3090535596 date "2021-02-01" @default.
- W3090535596 modified "2023-10-18" @default.
- W3090535596 title "Enhancing interface doping in graphene-metal hybrid devices using H2 plasma clean" @default.
- W3090535596 cites W1938159255 @default.
- W3090535596 cites W1971868693 @default.
- W3090535596 cites W1989189480 @default.
- W3090535596 cites W1997159984 @default.
- W3090535596 cites W2012345291 @default.
- W3090535596 cites W2020863878 @default.
- W3090535596 cites W2024227324 @default.
- W3090535596 cites W2029609558 @default.
- W3090535596 cites W2035438942 @default.
- W3090535596 cites W2038754799 @default.
- W3090535596 cites W2041407651 @default.
- W3090535596 cites W2048748427 @default.
- W3090535596 cites W2056616725 @default.
- W3090535596 cites W2069494184 @default.
- W3090535596 cites W2074880343 @default.
- W3090535596 cites W2080432958 @default.
- W3090535596 cites W2087742855 @default.
- W3090535596 cites W2095114847 @default.
- W3090535596 cites W2101180579 @default.
- W3090535596 cites W2112677210 @default.
- W3090535596 cites W2114351820 @default.
- W3090535596 cites W2120607392 @default.
- W3090535596 cites W2125740733 @default.
- W3090535596 cites W2126421651 @default.
- W3090535596 cites W2135342828 @default.
- W3090535596 cites W2143315835 @default.
- W3090535596 cites W2145153471 @default.
- W3090535596 cites W2150486237 @default.
- W3090535596 cites W2171662081 @default.
- W3090535596 cites W2185129199 @default.
- W3090535596 cites W2279397786 @default.
- W3090535596 cites W2319403363 @default.
- W3090535596 cites W2323393499 @default.
- W3090535596 cites W2326876620 @default.
- W3090535596 cites W2461579578 @default.
- W3090535596 cites W2565048871 @default.
- W3090535596 cites W2580127137 @default.
- W3090535596 cites W2603103018 @default.
- W3090535596 cites W2604871373 @default.
- W3090535596 cites W2787948554 @default.
- W3090535596 cites W2883053054 @default.
- W3090535596 cites W2892654000 @default.
- W3090535596 cites W2908747511 @default.
- W3090535596 cites W2913452040 @default.
- W3090535596 cites W2951668629 @default.
- W3090535596 cites W2963652387 @default.
- W3090535596 cites W2974092343 @default.
- W3090535596 cites W2975458838 @default.
- W3090535596 cites W3098364797 @default.
- W3090535596 cites W3103107222 @default.
- W3090535596 cites W3103800038 @default.
- W3090535596 cites W3103801494 @default.
- W3090535596 cites W4298205942 @default.
- W3090535596 doi "https://doi.org/10.1016/j.apsusc.2020.148046" @default.
- W3090535596 hasPublicationYear "2021" @default.
- W3090535596 type Work @default.
- W3090535596 sameAs 3090535596 @default.
- W3090535596 citedByCount "8" @default.
- W3090535596 countsByYear W30905355962021 @default.
- W3090535596 countsByYear W30905355962022 @default.
- W3090535596 countsByYear W30905355962023 @default.
- W3090535596 crossrefType "journal-article" @default.
- W3090535596 hasAuthorship W3090535596A5002813632 @default.
- W3090535596 hasAuthorship W3090535596A5020950364 @default.
- W3090535596 hasAuthorship W3090535596A5029810556 @default.
- W3090535596 hasAuthorship W3090535596A5039627420 @default.
- W3090535596 hasAuthorship W3090535596A5041866423 @default.
- W3090535596 hasAuthorship W3090535596A5042776013 @default.
- W3090535596 hasAuthorship W3090535596A5050022243 @default.
- W3090535596 hasAuthorship W3090535596A5053777799 @default.
- W3090535596 hasAuthorship W3090535596A5059195637 @default.
- W3090535596 hasAuthorship W3090535596A5083194625 @default.
- W3090535596 hasAuthorship W3090535596A5088219910 @default.
- W3090535596 hasConcept C10777958 @default.
- W3090535596 hasConcept C121332964 @default.
- W3090535596 hasConcept C127413603 @default.
- W3090535596 hasConcept C140807948 @default.
- W3090535596 hasConcept C143401881 @default.
- W3090535596 hasConcept C171250308 @default.
- W3090535596 hasConcept C192562407 @default.
- W3090535596 hasConcept C205286655 @default.
- W3090535596 hasConcept C30080830 @default.