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- W3090644247 abstract "This paper proposes a differential burn-in policy that considers the spatial nonhomogeneous distribution of defects in semiconductor manufacturing. Due to the nonhomogeneous distribution of spatial defects, devices at different locations on a semiconductor wafer may exhibit different probabilities of being defective. Unlike conventional burn-in policies, which subject all devices to the same burn-in test, the differential burn-in policy can take different actions for different devices, i.e., acceptance without burn-in, rejection without burn-in, or burn-in with a certain duration. A mixed integer nonlinear programming model is developed to find the cost-optimal decisions. A numerical example is used to demonstrate the potential application of the proposed burn-in policy." @default.
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- W3090644247 date "2020-08-01" @default.
- W3090644247 modified "2023-09-24" @default.
- W3090644247 title "A Differential Burn-in Policy Considering Nonhomogeneous Distribution of Spatial Defects in Semiconductor Manufacturing" @default.
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- W3090644247 doi "https://doi.org/10.1109/aparm49247.2020.9209427" @default.
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