Matches in SemOpenAlex for { <https://semopenalex.org/work/W3091741561> ?p ?o ?g. }
- W3091741561 endingPage "123866" @default.
- W3091741561 startingPage "123866" @default.
- W3091741561 abstract "Titanium nitride (TiN), Titanium aluminum nitride (TiAlN), and Titanium aluminum silicon nitride (TiAlSiN) coatings were deposited over Silicon (Si) (100) substrates using chemical vapor deposition (CVD) process at a constant temperature under different N 2 flow rate. Scanning electron microscopy (SEM) images reveal a smoother TiN coating surface compared to other coatings. Atomic force microscopy (AFM) indicates enhancement of particle size of TiN and TiAlN coatings with higher N 2 gas flow rate. However, the particle size of TiAlSiN found to decrease with a higher N 2 flow rate. X-ray diffraction (XRD) results confirm the diffraction phases of TiN, TiAlN and TiAlSiN at (111) and (200) crystal planes. The electrochemical test indicates higher corrosion resistance of TiAlSiN coating as compared to other coatings. Nano-indentation results reveal that TiAlSiN possesses higher hardness (H) and Young's modulus (E) as compared to other coatings. • Surface irregularity of TiAlSiN is more than TiN and TiAlN observed from SEM images. • Tensile stress is present in the coatings as peak shifted to higher diffraction angle. • The N atoms of coatings are increased monotonically with higher N 2 flow rate. • Mechanical properties of TiAlSiN are found to be better than TiN and TiAlN." @default.
- W3091741561 created "2020-10-08" @default.
- W3091741561 creator A5025052665 @default.
- W3091741561 creator A5045809386 @default.
- W3091741561 creator A5049800346 @default.
- W3091741561 creator A5066346419 @default.
- W3091741561 date "2021-01-01" @default.
- W3091741561 modified "2023-10-17" @default.
- W3091741561 title "A comparative analysis over different properties of TiN, TiAlN and TiAlSiN thin film coatings grown in nitrogen gas atmosphere" @default.
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- W3091741561 cites W1945134463 @default.
- W3091741561 cites W1971806505 @default.
- W3091741561 cites W1978196951 @default.
- W3091741561 cites W1978572838 @default.
- W3091741561 cites W1980101902 @default.
- W3091741561 cites W1981768287 @default.
- W3091741561 cites W1982412278 @default.
- W3091741561 cites W1987204088 @default.
- W3091741561 cites W1987607215 @default.
- W3091741561 cites W1988936626 @default.
- W3091741561 cites W1990068475 @default.
- W3091741561 cites W1990395969 @default.
- W3091741561 cites W1998286937 @default.
- W3091741561 cites W2003253845 @default.
- W3091741561 cites W2006126028 @default.
- W3091741561 cites W2006667262 @default.
- W3091741561 cites W2007573679 @default.
- W3091741561 cites W2008483680 @default.
- W3091741561 cites W2009188688 @default.
- W3091741561 cites W2014706250 @default.
- W3091741561 cites W2018932520 @default.
- W3091741561 cites W2025106944 @default.
- W3091741561 cites W2025446832 @default.
- W3091741561 cites W2026500752 @default.
- W3091741561 cites W2038400174 @default.
- W3091741561 cites W2045963605 @default.
- W3091741561 cites W2046237569 @default.
- W3091741561 cites W2050592753 @default.
- W3091741561 cites W2051409927 @default.
- W3091741561 cites W2062323791 @default.
- W3091741561 cites W2064385470 @default.
- W3091741561 cites W2064972552 @default.
- W3091741561 cites W2066117692 @default.
- W3091741561 cites W2066725071 @default.
- W3091741561 cites W2068621877 @default.
- W3091741561 cites W2069070356 @default.
- W3091741561 cites W2070965998 @default.
- W3091741561 cites W2078912777 @default.
- W3091741561 cites W2083316113 @default.
- W3091741561 cites W2086933933 @default.
- W3091741561 cites W2088480258 @default.
- W3091741561 cites W2090258114 @default.
- W3091741561 cites W2090854518 @default.
- W3091741561 cites W2091088897 @default.
- W3091741561 cites W2093111102 @default.
- W3091741561 cites W2110087074 @default.
- W3091741561 cites W2131630255 @default.
- W3091741561 cites W2132008118 @default.
- W3091741561 cites W2137922456 @default.
- W3091741561 cites W2140411217 @default.
- W3091741561 cites W2163163478 @default.
- W3091741561 cites W2281551636 @default.
- W3091741561 cites W2289309662 @default.
- W3091741561 cites W2324535494 @default.
- W3091741561 cites W2333560012 @default.
- W3091741561 cites W2407090708 @default.
- W3091741561 cites W2530962844 @default.
- W3091741561 cites W2587772170 @default.
- W3091741561 cites W2616412598 @default.
- W3091741561 cites W2775179562 @default.
- W3091741561 cites W832579008 @default.
- W3091741561 cites W938534533 @default.
- W3091741561 doi "https://doi.org/10.1016/j.matchemphys.2020.123866" @default.
- W3091741561 hasPublicationYear "2021" @default.
- W3091741561 type Work @default.
- W3091741561 sameAs 3091741561 @default.
- W3091741561 citedByCount "24" @default.
- W3091741561 countsByYear W30917415612020 @default.
- W3091741561 countsByYear W30917415612021 @default.
- W3091741561 countsByYear W30917415612022 @default.
- W3091741561 countsByYear W30917415612023 @default.
- W3091741561 crossrefType "journal-article" @default.
- W3091741561 hasAuthorship W3091741561A5025052665 @default.
- W3091741561 hasAuthorship W3091741561A5045809386 @default.
- W3091741561 hasAuthorship W3091741561A5049800346 @default.
- W3091741561 hasAuthorship W3091741561A5066346419 @default.
- W3091741561 hasConcept C159985019 @default.
- W3091741561 hasConcept C191897082 @default.
- W3091741561 hasConcept C192562407 @default.
- W3091741561 hasConcept C194760766 @default.
- W3091741561 hasConcept C26771246 @default.
- W3091741561 hasConcept C2778489163 @default.
- W3091741561 hasConcept C2779227376 @default.
- W3091741561 hasConcept C2781448156 @default.
- W3091741561 hasConcept C506065880 @default.
- W3091741561 hasConcept C525849907 @default.
- W3091741561 hasConceptScore W3091741561C159985019 @default.
- W3091741561 hasConceptScore W3091741561C191897082 @default.