FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3092129744> ?p ?o ?g. }

• W3092129744 endingPage "125670" @default.
• W3092129744 startingPage "125670" @default.
• W3092129744 abstract "The effect of ceria concentration on the removal rate of silicon oxide via chemical mechanical planarization was investigated. The removal rate decreased with increasing abrasive concentration. Surface analysis was used to confirm adsorption of ceria particles on silicon oxide wafers. A wide adsorption layer was formed on the wafer surface with ceria abrasive of both positive and negative charges. This adsorption layer was widened with increasing ceria concentration. Silica CMP did not show a decrease of removal rate and showed only a small area of adsorption. It was confirmed that adsorption of these ceria particles is caused by applied pressure as well as the effect of electrostatic force. It was confirmed through particle size distribution analysis of the slurry waste that the largest number of activated particles was achieved at 0.5 wt% concentration. The mechanism of effect for ceria concentration vs. removal rate is suggested with a schematic. Understanding of adsorption between ceria and silicon oxide, understood from various perspectives, will be helpful in further investigation of post CMP cleaning processes as well as CMP processes." @default.
• W3092129744 created "2020-10-15" @default.
• W3092129744 creator A5021893726 @default.
• W3092129744 creator A5030520232 @default.
• W3092129744 creator A5041849580 @default.
• W3092129744 creator A5057415867 @default.
• W3092129744 creator A5071938277 @default.
• W3092129744 date "2021-02-01" @default.
• W3092129744 modified "2023-09-30" @default.
• W3092129744 title "Study on the effect of ceria concentration on the silicon oxide removal rate in chemical mechanical planarization" @default.
• W3092129744 cites W1004719110 @default.
• W3092129744 cites W1968083733 @default.
• W3092129744 cites W1972207333 @default.
• W3092129744 cites W2004778852 @default.
• W3092129744 cites W2007608264 @default.
• W3092129744 cites W2010766710 @default.
• W3092129744 cites W2020478069 @default.
• W3092129744 cites W2038581511 @default.
• W3092129744 cites W2080118254 @default.
• W3092129744 cites W2086133421 @default.
• W3092129744 cites W2095353347 @default.
• W3092129744 cites W2099278477 @default.
• W3092129744 cites W2147101605 @default.
• W3092129744 cites W2170473090 @default.
• W3092129744 cites W2170806798 @default.
• W3092129744 cites W2755740208 @default.
• W3092129744 cites W3021089042 @default.
• W3092129744 doi "https://doi.org/10.1016/j.colsurfa.2020.125670" @default.
• W3092129744 hasPublicationYear "2021" @default.
• W3092129744 type Work @default.
• W3092129744 sameAs 3092129744 @default.
• W3092129744 citedByCount "11" @default.
• W3092129744 countsByYear W30921297442020 @default.
• W3092129744 countsByYear W30921297442021 @default.
• W3092129744 countsByYear W30921297442022 @default.
• W3092129744 countsByYear W30921297442023 @default.
• W3092129744 crossrefType "journal-article" @default.
• W3092129744 hasAuthorship W3092129744A5021893726 @default.
• W3092129744 hasAuthorship W3092129744A5030520232 @default.
• W3092129744 hasAuthorship W3092129744A5041849580 @default.
• W3092129744 hasAuthorship W3092129744A5057415867 @default.
• W3092129744 hasAuthorship W3092129744A5071938277 @default.
• W3092129744 hasConcept C111368507 @default.
• W3092129744 hasConcept C127313418 @default.
• W3092129744 hasConcept C127413603 @default.
• W3092129744 hasConcept C150394285 @default.
• W3092129744 hasConcept C159985019 @default.
• W3092129744 hasConcept C160671074 @default.
• W3092129744 hasConcept C171250308 @default.
• W3092129744 hasConcept C178790620 @default.
• W3092129744 hasConcept C179104552 @default.
• W3092129744 hasConcept C180088628 @default.
• W3092129744 hasConcept C185592680 @default.
• W3092129744 hasConcept C187530423 @default.
• W3092129744 hasConcept C191897082 @default.
• W3092129744 hasConcept C192562407 @default.
• W3092129744 hasConcept C2777431650 @default.
• W3092129744 hasConcept C2778517922 @default.
• W3092129744 hasConcept C2779105228 @default.
• W3092129744 hasConcept C2779227376 @default.
• W3092129744 hasConcept C2779851234 @default.
• W3092129744 hasConcept C2780957350 @default.
• W3092129744 hasConcept C42360764 @default.
• W3092129744 hasConcept C544956773 @default.
• W3092129744 hasConcept C94293008 @default.
• W3092129744 hasConceptScore W3092129744C111368507 @default.
• W3092129744 hasConceptScore W3092129744C127313418 @default.
• W3092129744 hasConceptScore W3092129744C127413603 @default.
• W3092129744 hasConceptScore W3092129744C150394285 @default.
• W3092129744 hasConceptScore W3092129744C159985019 @default.
• W3092129744 hasConceptScore W3092129744C160671074 @default.
• W3092129744 hasConceptScore W3092129744C171250308 @default.
• W3092129744 hasConceptScore W3092129744C178790620 @default.
• W3092129744 hasConceptScore W3092129744C179104552 @default.
• W3092129744 hasConceptScore W3092129744C180088628 @default.
• W3092129744 hasConceptScore W3092129744C185592680 @default.
• W3092129744 hasConceptScore W3092129744C187530423 @default.
• W3092129744 hasConceptScore W3092129744C191897082 @default.
• W3092129744 hasConceptScore W3092129744C192562407 @default.
• W3092129744 hasConceptScore W3092129744C2777431650 @default.
• W3092129744 hasConceptScore W3092129744C2778517922 @default.
• W3092129744 hasConceptScore W3092129744C2779105228 @default.
• W3092129744 hasConceptScore W3092129744C2779227376 @default.
• W3092129744 hasConceptScore W3092129744C2779851234 @default.
• W3092129744 hasConceptScore W3092129744C2780957350 @default.
• W3092129744 hasConceptScore W3092129744C42360764 @default.
• W3092129744 hasConceptScore W3092129744C544956773 @default.
• W3092129744 hasConceptScore W3092129744C94293008 @default.
• W3092129744 hasFunder F4320321681 @default.
• W3092129744 hasLocation W30921297441 @default.
• W3092129744 hasOpenAccess W3092129744 @default.
• W3092129744 hasPrimaryLocation W30921297441 @default.
• W3092129744 hasRelatedWork W1968031169 @default.
• W3092129744 hasRelatedWork W2013921521 @default.
• W3092129744 hasRelatedWork W2072988759 @default.
• W3092129744 hasRelatedWork W2081351621 @default.
• W3092129744 hasRelatedWork W2106409363 @default.
• W3092129744 hasRelatedWork W2147352784 @default.

• next