Matches in SemOpenAlex for { <https://semopenalex.org/work/W3092174920> ?p ?o ?g. }
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- W3092174920 endingPage "154" @default.
- W3092174920 startingPage "152" @default.
- W3092174920 abstract "The localized removal of a polyamid-imide (PAI) insulator films (thickness of 10 μm) coated on a copper winding wire of 90 μm diameter using an atmospheric-pressure microplasma jet (APμPJ) was investigated. The APμPJs of Ar and Ar/O2 gases were generated from the tip of a stainless steel surgical needle having outer/inner diameters of 0.4/0.2 mm by a RF excitation of 13.56 MHz. The insulator films around the copper wire were completely removed by the plasma irradiation from a certain direction without fusing the wire. The removal time decreased with increasing rf power and/or by O2 addition (5%). The removal mechanism of the PAI films was attributed to chemical etching by atomic oxygen radicals. The removal time was only 3 s at an Ar flow rate of 200 ml/min and a RF power of 4 W. Fluorescence microscopy and scanning electron microscopy images revealed that good selectivity of the insulator film to the copper was achieved." @default.
- W3092174920 created "2020-10-15" @default.
- W3092174920 creator A5043722030 @default.
- W3092174920 creator A5051269817 @default.
- W3092174920 date "2008-01-01" @default.
- W3092174920 modified "2023-10-14" @default.
- W3092174920 cites W2030885738 @default.
- W3092174920 doi "https://doi.org/10.3131/jvsj2.51.152" @default.
- W3092174920 hasPublicationYear "2008" @default.
- W3092174920 type Work @default.
- W3092174920 sameAs 3092174920 @default.
- W3092174920 citedByCount "0" @default.
- W3092174920 crossrefType "journal-article" @default.
- W3092174920 hasAuthorship W3092174920A5043722030 @default.
- W3092174920 hasAuthorship W3092174920A5051269817 @default.
- W3092174920 hasBestOaLocation W30921749201 @default.
- W3092174920 hasConcept C100460472 @default.
- W3092174920 hasConcept C111337013 @default.
- W3092174920 hasConcept C111368507 @default.
- W3092174920 hasConcept C113196181 @default.
- W3092174920 hasConcept C121332964 @default.
- W3092174920 hasConcept C127313418 @default.
- W3092174920 hasConcept C146088050 @default.
- W3092174920 hasConcept C159985019 @default.
- W3092174920 hasConcept C171250308 @default.
- W3092174920 hasConcept C172120300 @default.
- W3092174920 hasConcept C178790620 @default.
- W3092174920 hasConcept C185544564 @default.
- W3092174920 hasConcept C185592680 @default.
- W3092174920 hasConcept C191897082 @default.
- W3092174920 hasConcept C192562407 @default.
- W3092174920 hasConcept C200239111 @default.
- W3092174920 hasConcept C212702 @default.
- W3092174920 hasConcept C26771246 @default.
- W3092174920 hasConcept C2779227376 @default.
- W3092174920 hasConcept C43617362 @default.
- W3092174920 hasConcept C49040817 @default.
- W3092174920 hasConcept C544778455 @default.
- W3092174920 hasConcept C547737533 @default.
- W3092174920 hasConcept C62520636 @default.
- W3092174920 hasConcept C70420769 @default.
- W3092174920 hasConcept C82706917 @default.
- W3092174920 hasConceptScore W3092174920C100460472 @default.
- W3092174920 hasConceptScore W3092174920C111337013 @default.
- W3092174920 hasConceptScore W3092174920C111368507 @default.
- W3092174920 hasConceptScore W3092174920C113196181 @default.
- W3092174920 hasConceptScore W3092174920C121332964 @default.
- W3092174920 hasConceptScore W3092174920C127313418 @default.
- W3092174920 hasConceptScore W3092174920C146088050 @default.
- W3092174920 hasConceptScore W3092174920C159985019 @default.
- W3092174920 hasConceptScore W3092174920C171250308 @default.
- W3092174920 hasConceptScore W3092174920C172120300 @default.
- W3092174920 hasConceptScore W3092174920C178790620 @default.
- W3092174920 hasConceptScore W3092174920C185544564 @default.
- W3092174920 hasConceptScore W3092174920C185592680 @default.
- W3092174920 hasConceptScore W3092174920C191897082 @default.
- W3092174920 hasConceptScore W3092174920C192562407 @default.
- W3092174920 hasConceptScore W3092174920C200239111 @default.
- W3092174920 hasConceptScore W3092174920C212702 @default.
- W3092174920 hasConceptScore W3092174920C26771246 @default.
- W3092174920 hasConceptScore W3092174920C2779227376 @default.
- W3092174920 hasConceptScore W3092174920C43617362 @default.
- W3092174920 hasConceptScore W3092174920C49040817 @default.
- W3092174920 hasConceptScore W3092174920C544778455 @default.
- W3092174920 hasConceptScore W3092174920C547737533 @default.
- W3092174920 hasConceptScore W3092174920C62520636 @default.
- W3092174920 hasConceptScore W3092174920C70420769 @default.
- W3092174920 hasConceptScore W3092174920C82706917 @default.
- W3092174920 hasIssue "3" @default.
- W3092174920 hasLocation W30921749201 @default.
- W3092174920 hasOpenAccess W3092174920 @default.
- W3092174920 hasPrimaryLocation W30921749201 @default.
- W3092174920 hasRelatedWork W1587966659 @default.
- W3092174920 hasRelatedWork W2017222986 @default.
- W3092174920 hasRelatedWork W2036370299 @default.
- W3092174920 hasRelatedWork W2114020859 @default.
- W3092174920 hasRelatedWork W2150100790 @default.
- W3092174920 hasRelatedWork W2217585231 @default.
- W3092174920 hasRelatedWork W2406795334 @default.
- W3092174920 hasRelatedWork W2904149736 @default.
- W3092174920 hasRelatedWork W3202222294 @default.
- W3092174920 hasRelatedWork W2141234336 @default.
- W3092174920 hasVolume "51" @default.
- W3092174920 isParatext "false" @default.
- W3092174920 isRetracted "false" @default.
- W3092174920 magId "3092174920" @default.
- W3092174920 workType "article" @default.