Matches in SemOpenAlex for { <https://semopenalex.org/work/W3092203721> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W3092203721 endingPage "106722" @default.
- W3092203721 startingPage "106722" @default.
- W3092203721 abstract "Abstract In this work, GaN layer was deposited on patterned sapphire substrate (PSS) by e-beam evaporator and subsequently subjected to ammonia annealing at different temperatures of 900 °C, 950 °C, 980 °C and 1100 °C. The crystalline properties of the GaN layer improved as the temperature increased. In particular, the crystalline grains of the layer were transformed into more distinguishable structures and bigger size by increasing the annealing temperature. However, the unwanted Ga2O3 inclusions also presented in the layer due to the oxygen incorporation during the deposition. Such inclusions can be significantly suppressed by annealing the GaN layer at 980 °C. On the other hand, the re-evaporation of nitrogen atoms from the GaN layer became important at 1100 °C. Therefore, the oxygen from the annealing environment incorporated into the layer and formed the Ga2O3 inclusions." @default.
- W3092203721 created "2020-10-15" @default.
- W3092203721 creator A5015447223 @default.
- W3092203721 creator A5016586635 @default.
- W3092203721 creator A5042500243 @default.
- W3092203721 creator A5079173792 @default.
- W3092203721 creator A5084291587 @default.
- W3092203721 date "2020-12-01" @default.
- W3092203721 modified "2023-09-23" @default.
- W3092203721 title "Influence of post-ammonia annealing temperature on e-beam evaporation deposited GaN layer on patterned sapphire substrate" @default.
- W3092203721 cites W1980377230 @default.
- W3092203721 cites W2081818992 @default.
- W3092203721 cites W2088482032 @default.
- W3092203721 cites W2095093532 @default.
- W3092203721 cites W2110493549 @default.
- W3092203721 cites W2131108683 @default.
- W3092203721 cites W2254572018 @default.
- W3092203721 cites W2565275911 @default.
- W3092203721 cites W2590454351 @default.
- W3092203721 cites W2741417886 @default.
- W3092203721 cites W2797873372 @default.
- W3092203721 cites W2800859815 @default.
- W3092203721 doi "https://doi.org/10.1016/j.spmi.2020.106722" @default.
- W3092203721 hasPublicationYear "2020" @default.
- W3092203721 type Work @default.
- W3092203721 sameAs 3092203721 @default.
- W3092203721 citedByCount "1" @default.
- W3092203721 countsByYear W30922037212022 @default.
- W3092203721 crossrefType "journal-article" @default.
- W3092203721 hasAuthorship W3092203721A5015447223 @default.
- W3092203721 hasAuthorship W3092203721A5016586635 @default.
- W3092203721 hasAuthorship W3092203721A5042500243 @default.
- W3092203721 hasAuthorship W3092203721A5079173792 @default.
- W3092203721 hasAuthorship W3092203721A5084291587 @default.
- W3092203721 hasConcept C111368507 @default.
- W3092203721 hasConcept C120665830 @default.
- W3092203721 hasConcept C121332964 @default.
- W3092203721 hasConcept C127313418 @default.
- W3092203721 hasConcept C159985019 @default.
- W3092203721 hasConcept C178790620 @default.
- W3092203721 hasConcept C185592680 @default.
- W3092203721 hasConcept C192562407 @default.
- W3092203721 hasConcept C2776382133 @default.
- W3092203721 hasConcept C2777289219 @default.
- W3092203721 hasConcept C2777855556 @default.
- W3092203721 hasConcept C2779227376 @default.
- W3092203721 hasConcept C2780064504 @default.
- W3092203721 hasConcept C49040817 @default.
- W3092203721 hasConcept C520434653 @default.
- W3092203721 hasConcept C57410435 @default.
- W3092203721 hasConcept C61441594 @default.
- W3092203721 hasConcept C7770020 @default.
- W3092203721 hasConcept C97355855 @default.
- W3092203721 hasConceptScore W3092203721C111368507 @default.
- W3092203721 hasConceptScore W3092203721C120665830 @default.
- W3092203721 hasConceptScore W3092203721C121332964 @default.
- W3092203721 hasConceptScore W3092203721C127313418 @default.
- W3092203721 hasConceptScore W3092203721C159985019 @default.
- W3092203721 hasConceptScore W3092203721C178790620 @default.
- W3092203721 hasConceptScore W3092203721C185592680 @default.
- W3092203721 hasConceptScore W3092203721C192562407 @default.
- W3092203721 hasConceptScore W3092203721C2776382133 @default.
- W3092203721 hasConceptScore W3092203721C2777289219 @default.
- W3092203721 hasConceptScore W3092203721C2777855556 @default.
- W3092203721 hasConceptScore W3092203721C2779227376 @default.
- W3092203721 hasConceptScore W3092203721C2780064504 @default.
- W3092203721 hasConceptScore W3092203721C49040817 @default.
- W3092203721 hasConceptScore W3092203721C520434653 @default.
- W3092203721 hasConceptScore W3092203721C57410435 @default.
- W3092203721 hasConceptScore W3092203721C61441594 @default.
- W3092203721 hasConceptScore W3092203721C7770020 @default.
- W3092203721 hasConceptScore W3092203721C97355855 @default.
- W3092203721 hasLocation W30922037211 @default.
- W3092203721 hasOpenAccess W3092203721 @default.
- W3092203721 hasPrimaryLocation W30922037211 @default.
- W3092203721 hasRelatedWork W2031893134 @default.
- W3092203721 hasRelatedWork W2051431011 @default.
- W3092203721 hasRelatedWork W2088594828 @default.
- W3092203721 hasRelatedWork W2094792069 @default.
- W3092203721 hasRelatedWork W2139871202 @default.
- W3092203721 hasRelatedWork W2326383559 @default.
- W3092203721 hasRelatedWork W2360381900 @default.
- W3092203721 hasRelatedWork W2544288395 @default.
- W3092203721 hasRelatedWork W3195870230 @default.
- W3092203721 hasRelatedWork W833778081 @default.
- W3092203721 hasVolume "148" @default.
- W3092203721 isParatext "false" @default.
- W3092203721 isRetracted "false" @default.
- W3092203721 magId "3092203721" @default.
- W3092203721 workType "article" @default.