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- W3092309498 abstract "This work presents a new class of microelectromechanical system (MEMS) resonator toward 60 GHz for the fifth-generation (5G) wireless communications. The wide range of the operating frequencies is achieved by resorting to different orders of the antisymmetric Lamb wave modes in a 400-nm-thick Z-cut lithium niobate thin film. The resonance of 55 GHz demonstrated in this work marks the highest operating frequency for piezoelectric electromechanical devices. The fabricated device shows an extracted mechanical Q of 340 and an f x Q product of 1.87 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>13</sup> in a footprint of 2 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-3</sup> mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . The performance has shown the strong potential of LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> antisymmetric mode devices for front-end applications in 5G high-band." @default.
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- W3092309498 date "2020-12-01" @default.
- W3092309498 modified "2023-10-17" @default.
- W3092309498 title "10–60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate" @default.
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- W3092309498 doi "https://doi.org/10.1109/tmtt.2020.3027694" @default.
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